Design, fabrication and characterization of piezoresistive pressure sensors, including the study of electrochemical etch-stop:
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
1989
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| Subjects: | |
| Physical Description: | VIII, 149 S. Ill., graph. Darst. |
Staff View
MARC
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| indexdate | 2024-07-09T17:07:42Z |
| institution | BVB |
| language | English |
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| physical | VIII, 149 S. Ill., graph. Darst. |
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| spelling | Kloeck, Ben Verfasser aut Design, fabrication and characterization of piezoresistive pressure sensors, including the study of electrochemical etch-stop by Ben Kloeck 1989 VIII, 149 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Neuchâtel, Univ., Diss., 1989 Siliciumbauelement (DE-588)4181368-6 gnd rswk-swf Drucksensor (DE-588)4150765-4 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Drucksensor (DE-588)4150765-4 s Siliciumbauelement (DE-588)4181368-6 s DE-604 |
| spellingShingle | Kloeck, Ben Design, fabrication and characterization of piezoresistive pressure sensors, including the study of electrochemical etch-stop Siliciumbauelement (DE-588)4181368-6 gnd Drucksensor (DE-588)4150765-4 gnd |
| subject_GND | (DE-588)4181368-6 (DE-588)4150765-4 (DE-588)4113937-9 |
| title | Design, fabrication and characterization of piezoresistive pressure sensors, including the study of electrochemical etch-stop |
| title_auth | Design, fabrication and characterization of piezoresistive pressure sensors, including the study of electrochemical etch-stop |
| title_exact_search | Design, fabrication and characterization of piezoresistive pressure sensors, including the study of electrochemical etch-stop |
| title_full | Design, fabrication and characterization of piezoresistive pressure sensors, including the study of electrochemical etch-stop by Ben Kloeck |
| title_fullStr | Design, fabrication and characterization of piezoresistive pressure sensors, including the study of electrochemical etch-stop by Ben Kloeck |
| title_full_unstemmed | Design, fabrication and characterization of piezoresistive pressure sensors, including the study of electrochemical etch-stop by Ben Kloeck |
| title_short | Design, fabrication and characterization of piezoresistive pressure sensors, including the study of electrochemical etch-stop |
| title_sort | design fabrication and characterization of piezoresistive pressure sensors including the study of electrochemical etch stop |
| topic | Siliciumbauelement (DE-588)4181368-6 gnd Drucksensor (DE-588)4150765-4 gnd |
| topic_facet | Siliciumbauelement Drucksensor Hochschulschrift |
| work_keys_str_mv | AT kloeckben designfabricationandcharacterizationofpiezoresistivepressuresensorsincludingthestudyofelectrochemicaletchstop |