Kloeck, B. (1989). Design, fabrication and characterization of piezoresistive pressure sensors, including the study of electrochemical etch-stop.
Chicago-Zitierstil (17. Ausg.)Kloeck, Ben. Design, Fabrication and Characterization of Piezoresistive Pressure Sensors, Including the Study of Electrochemical Etch-stop. 1989.
MLA-Zitierstil (9. Ausg.)Kloeck, Ben. Design, Fabrication and Characterization of Piezoresistive Pressure Sensors, Including the Study of Electrochemical Etch-stop. 1989.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.