Ion implantation in semiconductors 1976:
Saved in:
| Format: | Conference Proceeding Book |
|---|---|
| Language: | English |
| Published: |
New York
Plenum Pr.
1977
|
| Subjects: | |
| Physical Description: | XIV, 754 S. |
| ISBN: | 0306362562 |
Staff View
MARC
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Record in the Search Index
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| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
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| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV007513263 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T17:03:47Z |
| institution | BVB |
| institution_GND | (DE-588)5221329-8 |
| isbn | 0306362562 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-004889092 |
| oclc_num | 2818225 |
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| physical | XIV, 754 S. |
| publishDate | 1977 |
| publishDateSearch | 1977 |
| publishDateSort | 1977 |
| publisher | Plenum Pr. |
| record_format | marc |
| spelling | Ion implantation in semiconductors 1976 Urheber: International Conference on Ion Implantation in Semiconductors and Other Materials <5, 1976, Boulder, Colo.>. Ed. by Fred Chernow ... New York Plenum Pr. 1977 XIV, 754 S. txt rdacontent n rdamedia nc rdacarrier Ion implantation Congresses Semiconductors Effect of radiation on Congresses Ionenimplantation (DE-588)4027606-5 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Halbleiter (DE-588)4022993-2 s Ionenimplantation (DE-588)4027606-5 s DE-604 Chernow, Fred Sonstige oth International Conference on Ion Implantation in Semiconductors and Other Materials 5 1976 Boulder, Colo. Sonstige (DE-588)5221329-8 oth |
| spellingShingle | Ion implantation in semiconductors 1976 Ion implantation Congresses Semiconductors Effect of radiation on Congresses Ionenimplantation (DE-588)4027606-5 gnd Halbleiter (DE-588)4022993-2 gnd |
| subject_GND | (DE-588)4027606-5 (DE-588)4022993-2 (DE-588)1071861417 |
| title | Ion implantation in semiconductors 1976 |
| title_auth | Ion implantation in semiconductors 1976 |
| title_exact_search | Ion implantation in semiconductors 1976 |
| title_full | Ion implantation in semiconductors 1976 Urheber: International Conference on Ion Implantation in Semiconductors and Other Materials <5, 1976, Boulder, Colo.>. Ed. by Fred Chernow ... |
| title_fullStr | Ion implantation in semiconductors 1976 Urheber: International Conference on Ion Implantation in Semiconductors and Other Materials <5, 1976, Boulder, Colo.>. Ed. by Fred Chernow ... |
| title_full_unstemmed | Ion implantation in semiconductors 1976 Urheber: International Conference on Ion Implantation in Semiconductors and Other Materials <5, 1976, Boulder, Colo.>. Ed. by Fred Chernow ... |
| title_short | Ion implantation in semiconductors 1976 |
| title_sort | ion implantation in semiconductors 1976 |
| topic | Ion implantation Congresses Semiconductors Effect of radiation on Congresses Ionenimplantation (DE-588)4027606-5 gnd Halbleiter (DE-588)4022993-2 gnd |
| topic_facet | Ion implantation Congresses Semiconductors Effect of radiation on Congresses Ionenimplantation Halbleiter Konferenzschrift |
| work_keys_str_mv | AT chernowfred ionimplantationinsemiconductors1976 AT internationalconferenceonionimplantationinsemiconductorsandothermaterialsbouldercolo ionimplantationinsemiconductors1976 |