(1977). Ion implantation in semiconductors 1976. Plenum Pr.
Chicago Style (17th ed.) CitationIon Implantation in Semiconductors 1976. New York: Plenum Pr, 1977.
MLA (9th ed.) CitationIon Implantation in Semiconductors 1976. Plenum Pr, 1977.
Warning: These citations may not always be 100% accurate.