Ion implantation in semiconductors and other materials: Proceedings of the Third Internat. Conference on Ion Implantation in Semiconductors and other materials held at the IBM Thomas J. Watson Research Center, Yorktown Heights, New York, Dec. 11-14, 1972
Saved in:
| Format: | Book |
|---|---|
| Language: | Undetermined |
| Published: |
New York
Plenum Pr.
1973
|
| Series: | The IBM research symposia series.
|
| Subjects: | |
| Physical Description: | XII,657 S.m.Abb. |
Staff View
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV007283250 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | t | ||
| 008 | 930421s1973 |||| 10||| und d | ||
| 035 | |a (OCoLC)632976775 | ||
| 035 | |a (DE-599)BVBBV007283250 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | |a und | ||
| 049 | |a DE-355 |a DE-91 | ||
| 084 | |a UP 3000 |0 (DE-625)146369: |2 rvk | ||
| 245 | 1 | 0 | |a Ion implantation in semiconductors and other materials |b Proceedings of the Third Internat. Conference on Ion Implantation in Semiconductors and other materials held at the IBM Thomas J. Watson Research Center, Yorktown Heights, New York, Dec. 11-14, 1972 |c Hrsg. von Billy L. Crowder* |
| 264 | 1 | |a New York |b Plenum Pr. |c 1973 | |
| 300 | |a XII,657 S.m.Abb. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a The IBM research symposia series. | |
| 650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Ionenimplantation |0 (DE-588)4027606-5 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Halbleiter |0 (DE-588)4022993-2 |D s |
| 689 | 0 | 1 | |a Ionenimplantation |0 (DE-588)4027606-5 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Crowder, Billy L. |e Sonstige |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-004678017 | ||
Record in the Search Index
| _version_ | 1804121509531222016 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV007283250 |
| classification_rvk | UP 3000 |
| ctrlnum | (OCoLC)632976775 (DE-599)BVBBV007283250 |
| discipline | Physik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01311nam a2200337 c 4500</leader><controlfield tag="001">BV007283250</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">930421s1973 |||| 10||| und d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)632976775</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV007283250</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">und</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-355</subfield><subfield code="a">DE-91</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 3000</subfield><subfield code="0">(DE-625)146369:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Ion implantation in semiconductors and other materials</subfield><subfield code="b">Proceedings of the Third Internat. Conference on Ion Implantation in Semiconductors and other materials held at the IBM Thomas J. Watson Research Center, Yorktown Heights, New York, Dec. 11-14, 1972</subfield><subfield code="c">Hrsg. von Billy L. Crowder*</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York</subfield><subfield code="b">Plenum Pr.</subfield><subfield code="c">1973</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XII,657 S.m.Abb.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">The IBM research symposia series.</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ionenimplantation</subfield><subfield code="0">(DE-588)4027606-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Ionenimplantation</subfield><subfield code="0">(DE-588)4027606-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Crowder, Billy L.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-004678017</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV007283250 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T16:59:07Z |
| institution | BVB |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-004678017 |
| oclc_num | 632976775 |
| open_access_boolean | |
| owner | DE-355 DE-BY-UBR DE-91 DE-BY-TUM |
| owner_facet | DE-355 DE-BY-UBR DE-91 DE-BY-TUM |
| physical | XII,657 S.m.Abb. |
| publishDate | 1973 |
| publishDateSearch | 1973 |
| publishDateSort | 1973 |
| publisher | Plenum Pr. |
| record_format | marc |
| series2 | The IBM research symposia series. |
| spelling | Ion implantation in semiconductors and other materials Proceedings of the Third Internat. Conference on Ion Implantation in Semiconductors and other materials held at the IBM Thomas J. Watson Research Center, Yorktown Heights, New York, Dec. 11-14, 1972 Hrsg. von Billy L. Crowder* New York Plenum Pr. 1973 XII,657 S.m.Abb. txt rdacontent n rdamedia nc rdacarrier The IBM research symposia series. Halbleiter (DE-588)4022993-2 gnd rswk-swf Ionenimplantation (DE-588)4027606-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Halbleiter (DE-588)4022993-2 s Ionenimplantation (DE-588)4027606-5 s DE-604 Crowder, Billy L. Sonstige oth |
| spellingShingle | Ion implantation in semiconductors and other materials Proceedings of the Third Internat. Conference on Ion Implantation in Semiconductors and other materials held at the IBM Thomas J. Watson Research Center, Yorktown Heights, New York, Dec. 11-14, 1972 Halbleiter (DE-588)4022993-2 gnd Ionenimplantation (DE-588)4027606-5 gnd |
| subject_GND | (DE-588)4022993-2 (DE-588)4027606-5 (DE-588)1071861417 |
| title | Ion implantation in semiconductors and other materials Proceedings of the Third Internat. Conference on Ion Implantation in Semiconductors and other materials held at the IBM Thomas J. Watson Research Center, Yorktown Heights, New York, Dec. 11-14, 1972 |
| title_auth | Ion implantation in semiconductors and other materials Proceedings of the Third Internat. Conference on Ion Implantation in Semiconductors and other materials held at the IBM Thomas J. Watson Research Center, Yorktown Heights, New York, Dec. 11-14, 1972 |
| title_exact_search | Ion implantation in semiconductors and other materials Proceedings of the Third Internat. Conference on Ion Implantation in Semiconductors and other materials held at the IBM Thomas J. Watson Research Center, Yorktown Heights, New York, Dec. 11-14, 1972 |
| title_full | Ion implantation in semiconductors and other materials Proceedings of the Third Internat. Conference on Ion Implantation in Semiconductors and other materials held at the IBM Thomas J. Watson Research Center, Yorktown Heights, New York, Dec. 11-14, 1972 Hrsg. von Billy L. Crowder* |
| title_fullStr | Ion implantation in semiconductors and other materials Proceedings of the Third Internat. Conference on Ion Implantation in Semiconductors and other materials held at the IBM Thomas J. Watson Research Center, Yorktown Heights, New York, Dec. 11-14, 1972 Hrsg. von Billy L. Crowder* |
| title_full_unstemmed | Ion implantation in semiconductors and other materials Proceedings of the Third Internat. Conference on Ion Implantation in Semiconductors and other materials held at the IBM Thomas J. Watson Research Center, Yorktown Heights, New York, Dec. 11-14, 1972 Hrsg. von Billy L. Crowder* |
| title_short | Ion implantation in semiconductors and other materials |
| title_sort | ion implantation in semiconductors and other materials proceedings of the third internat conference on ion implantation in semiconductors and other materials held at the ibm thomas j watson research center yorktown heights new york dec 11 14 1972 |
| title_sub | Proceedings of the Third Internat. Conference on Ion Implantation in Semiconductors and other materials held at the IBM Thomas J. Watson Research Center, Yorktown Heights, New York, Dec. 11-14, 1972 |
| topic | Halbleiter (DE-588)4022993-2 gnd Ionenimplantation (DE-588)4027606-5 gnd |
| topic_facet | Halbleiter Ionenimplantation Konferenzschrift |
| work_keys_str_mv | AT crowderbillyl ionimplantationinsemiconductorsandothermaterialsproceedingsofthethirdinternatconferenceonionimplantationinsemiconductorsandothermaterialsheldattheibmthomasjwatsonresearchcenteryorktownheightsnewyorkdec11141972 |