Ion implantation in semiconductors and other materials: Proceedings of the Third Internat. Conference on Ion Implantation in Semiconductors and other materials held at the IBM Thomas J. Watson Research Center, Yorktown Heights, New York, Dec. 11-14, 1972
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | Undetermined |
| Veröffentlicht: |
New York
Plenum Pr.
1973
|
| Schriftenreihe: | The IBM research symposia series.
|
| Schlagworte: | |
| Beschreibung: | XII,657 S.m.Abb. |
Internformat
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| physical | XII,657 S.m.Abb. |
| publishDate | 1973 |
| publishDateSearch | 1973 |
| publishDateSort | 1973 |
| publisher | Plenum Pr. |
| record_format | marc |
| series2 | The IBM research symposia series. |
| spelling | Ion implantation in semiconductors and other materials Proceedings of the Third Internat. Conference on Ion Implantation in Semiconductors and other materials held at the IBM Thomas J. Watson Research Center, Yorktown Heights, New York, Dec. 11-14, 1972 Hrsg. von Billy L. Crowder* New York Plenum Pr. 1973 XII,657 S.m.Abb. txt rdacontent n rdamedia nc rdacarrier The IBM research symposia series. Halbleiter (DE-588)4022993-2 gnd rswk-swf Ionenimplantation (DE-588)4027606-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Halbleiter (DE-588)4022993-2 s Ionenimplantation (DE-588)4027606-5 s DE-604 Crowder, Billy L. Sonstige oth |
| spellingShingle | Ion implantation in semiconductors and other materials Proceedings of the Third Internat. Conference on Ion Implantation in Semiconductors and other materials held at the IBM Thomas J. Watson Research Center, Yorktown Heights, New York, Dec. 11-14, 1972 Halbleiter (DE-588)4022993-2 gnd Ionenimplantation (DE-588)4027606-5 gnd |
| subject_GND | (DE-588)4022993-2 (DE-588)4027606-5 (DE-588)1071861417 |
| title | Ion implantation in semiconductors and other materials Proceedings of the Third Internat. Conference on Ion Implantation in Semiconductors and other materials held at the IBM Thomas J. Watson Research Center, Yorktown Heights, New York, Dec. 11-14, 1972 |
| title_auth | Ion implantation in semiconductors and other materials Proceedings of the Third Internat. Conference on Ion Implantation in Semiconductors and other materials held at the IBM Thomas J. Watson Research Center, Yorktown Heights, New York, Dec. 11-14, 1972 |
| title_exact_search | Ion implantation in semiconductors and other materials Proceedings of the Third Internat. Conference on Ion Implantation in Semiconductors and other materials held at the IBM Thomas J. Watson Research Center, Yorktown Heights, New York, Dec. 11-14, 1972 |
| title_full | Ion implantation in semiconductors and other materials Proceedings of the Third Internat. Conference on Ion Implantation in Semiconductors and other materials held at the IBM Thomas J. Watson Research Center, Yorktown Heights, New York, Dec. 11-14, 1972 Hrsg. von Billy L. Crowder* |
| title_fullStr | Ion implantation in semiconductors and other materials Proceedings of the Third Internat. Conference on Ion Implantation in Semiconductors and other materials held at the IBM Thomas J. Watson Research Center, Yorktown Heights, New York, Dec. 11-14, 1972 Hrsg. von Billy L. Crowder* |
| title_full_unstemmed | Ion implantation in semiconductors and other materials Proceedings of the Third Internat. Conference on Ion Implantation in Semiconductors and other materials held at the IBM Thomas J. Watson Research Center, Yorktown Heights, New York, Dec. 11-14, 1972 Hrsg. von Billy L. Crowder* |
| title_short | Ion implantation in semiconductors and other materials |
| title_sort | ion implantation in semiconductors and other materials proceedings of the third internat conference on ion implantation in semiconductors and other materials held at the ibm thomas j watson research center yorktown heights new york dec 11 14 1972 |
| title_sub | Proceedings of the Third Internat. Conference on Ion Implantation in Semiconductors and other materials held at the IBM Thomas J. Watson Research Center, Yorktown Heights, New York, Dec. 11-14, 1972 |
| topic | Halbleiter (DE-588)4022993-2 gnd Ionenimplantation (DE-588)4027606-5 gnd |
| topic_facet | Halbleiter Ionenimplantation Konferenzschrift |
| work_keys_str_mv | AT crowderbillyl ionimplantationinsemiconductorsandothermaterialsproceedingsofthethirdinternatconferenceonionimplantationinsemiconductorsandothermaterialsheldattheibmthomasjwatsonresearchcenteryorktownheightsnewyorkdec11141972 |