APA (7th ed.) Citation

(1973). Ion implantation in semiconductors and other materials: Proceedings of the Third Internat. Conference on Ion Implantation in Semiconductors and other materials held at the IBM Thomas J. Watson Research Center, Yorktown Heights, New York, Dec. 11-14, 1972. Plenum Pr.

Chicago Style (17th ed.) Citation

Ion Implantation in Semiconductors and Other Materials: Proceedings of the Third Internat. Conference on Ion Implantation in Semiconductors and Other Materials Held at the IBM Thomas J. Watson Research Center, Yorktown Heights, New York, Dec. 11-14, 1972. New York: Plenum Pr, 1973.

MLA (9th ed.) Citation

Ion Implantation in Semiconductors and Other Materials: Proceedings of the Third Internat. Conference on Ion Implantation in Semiconductors and Other Materials Held at the IBM Thomas J. Watson Research Center, Yorktown Heights, New York, Dec. 11-14, 1972. Plenum Pr, 1973.