Lasers in microelectronic manufacturing: 10 - 11 September 1991, San Jose, California
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Bellingham, Wash.
SPIE
1991
|
| Series: | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE
1598 |
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Item Description: | Literaturangaben |
| Physical Description: | VII, 240 S. Ill., graph. Darst. |
| ISBN: | 0819407291 |
Staff View
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Record in the Search Index
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|---|---|
| adam_text | LASERS IN
MICROELECTRONIC
MANUFACTURING
Volume 1598
CONTENTS
Conference Committee
..................................................................
v
Introduction
.........................................................................
vii
SESSION
1
LASER
CLEANING, ABLATION, AND
3-D
OBJECTS
1598-01
Threshold measurements in laser-assisted particle removal (Invited Paper)
S. J. Lee, K. Imen, S. D. Allen, Univ. of Iowa
................................................ 2
1598-02
Efficient
laser cleaning of small particulates using pulsed laser irradiation synchronized
with liquid-film deposition
A. C.
Tam,
ШМ
/Almaden
Research Ctr.; W. Zapka, W.
Ziemlich,
IBM/German Manufacturing
Technology Ctr. (FRG)
................................................................. 13
1598-03
Thin-film selective multishot ablation at
248
nm
H.
E
Hunger, H. Pietsch, S. Petzoldt, E. Matthias,
Freie Univ.
Berlin (FRG)
..................... 19
1598-04
KrF laser ablation of polyurethane
S.
Küper,
J. H.
Brannon,
ШМ
/Almaden
Research Ctr
........................................ 27
1598-05
Excimer laser projector for microelectronics applications
P. T. Rumsby,
M. C
Gower,
Exitech
Ltd. (UK)
............................................36
1598-06
Material influence on cutting and drilling of metals using copper vapor lasers
R.
Kupfer,
H.
W.
Bergmann,
M.
Lingenauer, Univ. Erlangen-Nürnberg (FRG)...................46
1598-07
Laser-generated 3-D prototypes
F.
E.
DeAngelis, DTM Corp.............................................................61
SESSION 2 LASER PROCESSING
OF WIDE-BANDGAP
MATERIALS
AND SEMICONDUCTORS
1598-08
Role of defects in the ablation of wide-bandgap materials (Invited Paper)
J. T. Dickinson, S. C. Langford, L. C. Jensen, Washington State Univ
...........................72
1598-09
Dynamics of the optical parameters of molten silicon during nanosecond laser
annealing
J. Boneberg, O. Yavas, B. Mierswa, P.
Leiderer, Univ. Konstanz (FRG)..........................84
1598-10
Interference effect on laser trimming and layer thickness optimization
Y. Sun, Electro Scientific Industries,
Inc
...................................................91
1598-11
Characterization of
microstructure
of Si films grown by laser-enhanced photo-CVD
using Si^
S.
Lian,
В.
Fowler,
S.
Krishnan,
L.
Jung,
С.
Li, S. Banerjee, Univ. of Texas/Austin
................98
1598-12
Modeling of photochemical vapor deposition of epitaxial silicon using an ArF excimer
laser
B. Fowler, S.
Lian,
S.
Krishnan,
L.
jung,
С.
Li,
S. Banerjee, Univ.
of
Texas/
Austin
...............108
1598-13
Laser
drilling
vias
in GaAs wafers
S. Riley, TriQuint
Semiconductor,
Inc.; L. A.
Schick,
Electro Scientific
Industries
............... 118
(continued)
SPIE
Vol.
1598
Lasers in Microelectronic Manufacturing 1
1991)/
Hi
LASERS IN MICROELECTRONIC
MANUFACTURING
Volume 1598
SESSION 3 LASER
REPAIR PROCESSES IN
MICROELECTRONIC
MANUFACTURING
1598-14
Laser-induced gold deposition for thin-film circuit repair (Invited Paper)
T. H.
Baum,
P. B.
Comită,
ШМ
/Almaden
Research Ctr.;
T. T. Kodas, Univ.
of New Mexico
......122
1598-16
Laser process for personalization and repair of multichip modules
H. G.
Müller,
С.
T.
Galanakis,
S.
С.
Sommerfeldt,
Т.
J.
Hirsch,
R.
F. Miracky,
Microelectronics and Computer Technology Corp..........................................132
1598-17 Laser
processes for repair of thin-film wiring
T, A. Wassick, IBM/East Fishkill Facility
.................................................141
1598-18 1С
rewiring by laser microchemistry
G. Pelous, Y. Guern, Société
BERTIN
(France);
D.
Gobleid, Texas Instruments (France); J. David,
IBM/Corbeil (France); A. Chion, SGS-Thomson (France); D.
Tonneau, CNRS
(France)
.......... 149
SESSION
4
LASER APPLICATIONS IN ADVANCED PACKAGING
1598-21
Laser-formed structures to facilitate TAB bonding
P. G.
Ledermann,
G.
W.
Johnson,
M.
В.
Ritter,
IBM/Thomas J. Watson Research Ctr
............ 160
1598-22
Development of laser bonding as a manufacturing process for inner-lead bonding
J. D. Havward, Advanced Micro Devices,
Inc
..............................................164
1598-23
Experimental investigations in laser microsoldering
M. Hartmann,
ATZ-EVUS (FRG); H. W.
Bergmann,
R.
Kupfer, Friedrich-Alexander Univ.
Erlangen-Nürnberg (FRG).............................................................175
1598-28 Applications
of excimer lasers in
microelectronics
C. Yu, G. S. Sandhu,
V.
K. Mathews, T. T. Doan, Micron Technology Ine......................186
SESSION 5 POSTER SESSION
1598-24 Reflow
soldering of fine-pitch devices using a Nd:YAG laser
T. J. Glynn, A. J. Flanagan,
R. M.
Redfern, Univ.
College Galway (Ireland)
.....................200
1598-27
Unique symbol for marking and tracking very small semiconductor products
J. P.
Martín,
Veritec,
Inc
...............................................................206
1598-26
Cumulative effect and cutting quality improvement of XeCl laser ablation of PMMA
Q. Lou, H. Guo, Shanghai Institute of Optics and Fine Mechanics (China)
.....................221
1598-31
Stoichiometry of laser-deposited Bi-Sr-Ca-Cu-O films on silicon and mass spectrometric
investigations of superconductors
J. S. Becker, M.
Lorenz,
Institute of Isotope and Radiation Research (FRG); H. Dietze,
Research Ctr. Julich GmbH (FRG)
......................................................227
Addendum
..........................................................................239
Author Index
........................................................................240
iv /
SPIE
Vol.
1
598
Lasers in Microelectronic Manufacturing
(1991)
|
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| genre_facet | Konferenzschrift 1991 San Jose Calif. |
| id | DE-604.BV006146158 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:41:03Z |
| institution | BVB |
| isbn | 0819407291 |
| language | English |
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| physical | VII, 240 S. Ill., graph. Darst. |
| publishDate | 1991 |
| publishDateSearch | 1991 |
| publishDateSort | 1991 |
| publisher | SPIE |
| record_format | marc |
| series | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE |
| series2 | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE |
| spelling | Lasers in microelectronic manufacturing 10 - 11 September 1991, San Jose, California Bodil Braren chair/ed. Bellingham, Wash. SPIE 1991 VII, 240 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE 1598 Literaturangaben Lasers Industrial applications Congresses Microelectronics Congresses Laser (DE-588)4034610-9 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1991 San Jose Calif. gnd-content Halbleitertechnologie (DE-588)4158814-9 s Laser (DE-588)4034610-9 s DE-604 Braren, Bodil Sonstige oth Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE 1598 (DE-604)BV000010887 1598 Digitalisierung TU Muenchen application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=003885762&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Lasers in microelectronic manufacturing 10 - 11 September 1991, San Jose, California Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE Lasers Industrial applications Congresses Microelectronics Congresses Laser (DE-588)4034610-9 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4034610-9 (DE-588)4158814-9 (DE-588)1071861417 |
| title | Lasers in microelectronic manufacturing 10 - 11 September 1991, San Jose, California |
| title_auth | Lasers in microelectronic manufacturing 10 - 11 September 1991, San Jose, California |
| title_exact_search | Lasers in microelectronic manufacturing 10 - 11 September 1991, San Jose, California |
| title_full | Lasers in microelectronic manufacturing 10 - 11 September 1991, San Jose, California Bodil Braren chair/ed. |
| title_fullStr | Lasers in microelectronic manufacturing 10 - 11 September 1991, San Jose, California Bodil Braren chair/ed. |
| title_full_unstemmed | Lasers in microelectronic manufacturing 10 - 11 September 1991, San Jose, California Bodil Braren chair/ed. |
| title_short | Lasers in microelectronic manufacturing |
| title_sort | lasers in microelectronic manufacturing 10 11 september 1991 san jose california |
| title_sub | 10 - 11 September 1991, San Jose, California |
| topic | Lasers Industrial applications Congresses Microelectronics Congresses Laser (DE-588)4034610-9 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Lasers Industrial applications Congresses Microelectronics Congresses Laser Halbleitertechnologie Konferenzschrift 1991 San Jose Calif. |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=003885762&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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