APA (7th ed.) Citation

(1991). Lasers in microelectronic manufacturing: 10 - 11 September 1991, San Jose, California. SPIE.

Chicago Style (17th ed.) Citation

Lasers in Microelectronic Manufacturing: 10 - 11 September 1991, San Jose, California. Bellingham, Wash: SPIE, 1991.

MLA (9th ed.) Citation

Lasers in Microelectronic Manufacturing: 10 - 11 September 1991, San Jose, California. SPIE, 1991.

Warning: These citations may not always be 100% accurate.