(1991). Metallization: Performance and reliability issues for VLSI and ULSI ; 12 - 13 September 1991, San Jose, California. SPIE.
Chicago-Zitierstil (17. Ausg.)Metallization: Performance and Reliability Issues for VLSI and ULSI ; 12 - 13 September 1991, San Jose, California. Bellingham, Wash: SPIE, 1991.
MLA-Zitierstil (9. Ausg.)Metallization: Performance and Reliability Issues for VLSI and ULSI ; 12 - 13 September 1991, San Jose, California. SPIE, 1991.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.