Micro electro mechanical systems: proceedings ; an investigation of micro structures, sensors, actuators, machines and robots ; Nara, Japan, 30 January - 2 February 1991
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
New York, NY
Inst. of Electrical and Electronics Engineers
1991
|
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Item Description: | Literaturangaben |
| Physical Description: | XIV, 288 S. Ill., graph. Darst. |
| ISBN: | 0879426411 087942642X 0879426438 |
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MARC
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| 245 | 1 | 0 | |a Micro electro mechanical systems |b proceedings ; an investigation of micro structures, sensors, actuators, machines and robots ; Nara, Japan, 30 January - 2 February 1991 |c IEEE |
| 246 | 1 | 3 | |a Micro-electro-mechanical systems |
| 264 | 1 | |a New York, NY |b Inst. of Electrical and Electronics Engineers |c 1991 | |
| 300 | |a XIV, 288 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Literaturangaben | ||
| 650 | 0 | 7 | |a Elektromechanik |0 (DE-588)4151846-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikromechanik |0 (DE-588)4205811-9 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1991 |z Nara |2 gnd-content | |
| 689 | 0 | 0 | |a Mikromechanik |0 (DE-588)4205811-9 |D s |
| 689 | 0 | 1 | |a Elektromechanik |0 (DE-588)4151846-9 |D s |
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| 999 | |a oai:aleph.bib-bvb.de:BVB01-003725011 | ||
Record in the Search Index
| _version_ | 1804120137741107200 |
|---|---|
| adam_text | PROGRAM
Thursday, January
31, 1991
9:00
am OPENING ADDRESS
SESSION CHAIR:
Hiroyuki Fujita
Page
9.20
am INVITED TALK
1
Microtribology related to MEMS
—
Concept, Measurements, Applications
R.Kaneko
NTT Applied Electronics Laboratories
SESSION A
—
MICROACTUATORS
10:05
am Film Actuators: Planar, Electrostatic Surface-Drive Actuators
9
S.Egawa, T.Niino.and T.Higuchi
University of Tokyo
10:30
am BREAK
11:00
am Single Crystal Silicon Rotational Micromotors
15
K.Suzuki and H.Tanigawa
NEC Corporation
11
:25 am Normal and Tangential Impact in Micro
21
Electromechanical Structures
A.P.Lee, A.P.Pisano,and
L.Lin
University of California at Berkeley
11
:50 am
Microfabricated
Actuator with Moving Permanent Magnet
27
B.Wagner and W.
Benecke
Fraunhofer-Institut für Mikrostrukturtechnik
12:15
pm
LUNCH
SESSION CO-CHAIRS:
Roger T. Howe
Kenichiro Suzuki
1:45 pm INVITED TALK
33
Integrated Microelectromechanical Systems:
A Perspective on MEMS in the
90s
K.D.Wise
The University of Michigan
vi
Page
SESSION
В
—
NOVEL TECHNOLOGIES
2:30
pm Optical Exposure Systems for Three-Dimensional
39
Fabrication of
Microprobe
M.Esashi, K.
Minami,
and S.Shoji
Tohoku University
2:55
pm Fabrication of Micro-structures Using Non-Planar Lithography
45
(NPL)
S.C.Jacobsen, D.L.Weils, C.C.Davis.and
J.E.Wood
University of Utah
3:20
pm BREAK
3:50
pm Self-Adjusting Microstructures (SAMS)
51
M.W.Judy, Y.-H.Cho, R.T.Howe,and A.P.
Pisano
University of California at Berkeley
4 15
pm Sub-Micron Gaps Without Sub-Micron Etching
57
T.Furuhatai
,
T.Hirano1, K.J.Gabriel2, and H.Fujita3
1IBM Research, Tokyo Research Laboratory
2AT&T Bell Laboratories
3University of Tokyo
4:40
pm Thermal Assembly of Polysilicon Microstructures
63
G.K.Fedder and R.T.Howe
University of California at Berkeley
5:05
pm BREAK
SESSION CO-CHAIRS:
Wolfgang
Benecke
Kazuo Sato
SESSION
С
—
MICRO MACHINING
5:35
pm The
LIGA
Technique
—
a Novel Concept for Microstructures
69
and the Combination with Si-Technologies by Injection Molding
W.Menz, W.Bacher, M.Harmening.and A.Michel
Kernforschungszentrum
Karlsruhe
Institute
für Mikrostrukturtechnik
6:00
pm Fabrication of Assembled Micromechanical Components
74
via Deep X-ray Lithography
H.Guckel, K.J.Skrobis, T.R.Christenson,
J.Klein, S.Han, B.Choi, and E.G.Lovell
University of Wisconsin
6:25
pm A Micropipe Fabrication Process
80
C.-L.Kuo, T.Masuzawa, and M.Fujino
University of Tokyo
6:50
pm Micro-Magnetic Alloy Tubes for Switching
86
and Splicing Single-mode Fibers
S.Nagaoka
NTT Opto-electronics Laboratories
7:15
pm RECEPTION
vii
Friday, February
1, 1991
SESSION CHAIR:
Masayoshi Esashi
Page
8:55
am INVITED TALK
92
Silicon Wafer Bonding Techniques For Assembly
of Micromechanical Elements
A.
Hanneborg
Center for Industrial Research
SESSION
D
—
MATERIAL PROPERTIES and SIMULATION
9:40
am In Situ Observation and Analysis of Wet Etching Process
99
for Micro Electro Mechanical Systems
O.Tabata, K.Shimaoka.and S.Sugiyama
Toyota Central Research and Development Laboratories
Inc.
10:05
am Mathematical Model and Experimental Verification
103
of Shape Memory Alloy for Designing Micro Actuator
K.lkuta1, M.Tsukamoto2, and S.Hirose3
1
Kyushu Institute of Technology
2Asahi Chemical Industry Co., Ltd.
3Tokyo Institute of Technology
10:30
am BREAK
11:00 am Ferroelectric Thin Flim Ultrasonic Micromotors
109
K.R.Udayakumar1, S.F.Bart2, A.M.FIynn2, J.Chen1,
L.S.Tavrow2, LE.Cross1,
R.A.Brooks2,
and
DJ.Ehrlich3
Pennsylvania State University
2MIT Artificial Intelligence Laboratory
3MIT Lincoln Laboratory
11.25
am Properties of Piezoelectric Thin Films for Micromechanical
114
Devices and Systems
W.Tjhen, T.Tamagawa, C.-P.Ye, C.-C. Hsueh,
P.Schiller, and D.L.
Polla
University of Minnesota
11:50 am FREE TIME
4:30
pm POSTER SESSION
Magnetic Micro-Actuator
120
K.Yanagisawa, A.Tago, T.Ohkubo, and H.Kuwano
NTT Applied Electronics Laboratories
Non-Contact Magnetic Gear for Micro Transmission Mechanism
125
K.lkuta1, S.Makita2, S.Arimoto2
1Kyushu Institute of Technology
2University of Tokyo
Miniature Cybernetic Actuators Using Piezo Electric Device
131
K.lkuta1, A.Kawahara2, and S. Yamazumi2
1Kyushu Institute of Technology
2Yasukawa Electric Mfg. Co., Ltd.
viii
Page
Micro-step XY-stage Using Piezoelectric Tube Actuator
137
R.Matsuda and R.Kaneko
NTT Applied Electronics Laboratories
Friction and Wear Studies on Lubricants and Materials
143
Applicable to MEMS
S.Suzuki1, T.Matsuura1, M.Uchizawa1, S.Yura1,
H.Shibata1, and H.Fujita2
1
Mitsubishi Electric Corporation
2University of Tokyo
The Measurements of Friction on Micromechatoronics Elements
148
K.Noguchi1, H. Fujita2, M.Suzuki1, and N.Yoshimura1
1Akita University
2University of Tokyo
Theoretical Modeling of Boundary Conditions
154
in
Microfabricated
Beams
R.L.Mullen, M.Mehregany, M.P.Omar, and W.H.Ko
Case Western Reserve University
Optical Excitation of Micro-Mechanical Resonators
160
T.S.J.Lammerink, M.EIwenspoek, and J.H.J. Fluitman
University of Twente
Fast Reversible NiTi Fibers For Use In
MicroRobotics
166
I.W.
Hunter,
S.Lafontaine,
J.M.
Hollerbach,
and
P.J.Hunter
McGill University
A Miniature Device for Medical Intracavitary Intervention
171
P.Dario, R.Valleggi,
M.Pardini, and A.Sabatini
ARTS Lab,
Scuola Superiore
S.
Anna at Pisa
Noninvasive and Precise Motion Detection for
Micromachines
176
Using High-Speed Digital Subtraction Echography
(High-speed DSE)
K.lshihara1, J.Tanouchi1, A.Kitabatake1,
T.Kamada1, and S.Kishimoto2
1
0saka University
2R
&
A Center Hitachi Medical Corporation
Surface-Machined Micromechanical Membrane Pump
182
J.W.Judy, T.Tamagawa, D.L.Polla
University of Minnesota
Polysilicon
Microstructures
187
M.M.Farooqui and A.G.R.Evans
University of Southampton
Fast and Extremely Selective Polyimide Etching with
192
a Magnetically Controlled Reactive Ion Etching System
F.Shimokawa, A.Furuya, and S.Matsui
NTT Applied Electronics Laboratories
Band Model for Explaining New Effects Observed
198
in Electrochemical Micromachining of Si
H.C.Özdemir
and
J.G.Smith
University of Southampton
Laser-Chemical Three-Dimensional Writing of Multimaterial
202
Structures for Microelectromechanics
T.M.BIoomstein and
DJ.Ehrlich
Massachusetts Institute of Technology
6:30
pm NOH-DRAMA
7:15
pm BANQUET
ix
Saturday, February
2, 1991
SESSION CO-CHAIRS:
Albert P.
Pisano
Hideki Kawakatsu
SESSION
E
—
ACTUATORS FOR MINIATURE ROBOTS
and BULK MICRO MACHINING
Page
8:50
am Flexible Microactuator for Miniature Robots
204
K.Suzumori1, S.likura1, and H.Tanaka2
Toshiba Corporation
2Yokohama National University
9:15
am Giant
Magnetostrictive Alloy(GMA)
Applications to Micro Mobile
210
Robot as a Micro Actuator without Power Supply Cables
T.Fukuda1, H.Hosokai2, H.Ohyama2, H.Hashimoto3,
and F.Arai1
1Nagoya University
2Science University of Tokyo
3University of Tokyo
9:40
am Simulation of Two-d
imenşi
nal
Etch Profile of Silicon during
216
Orientation-dependent
Anisotropie
Etching
A.Koide, K.Sato, and S.Tanaka
Hitachi, Ltd.
10:05
am Dopant Selective HF Anodic Etching of Silicon
221
(For the Realization of Low-doped Monocrystalline Silicon
Microstructures)
J.Branebjerg1, C.J.M.Eijkel2, J.G.E.Gardeniers2,
and F.C.M.van
de Pol3
1Danfoss A/S
2University of Twente
^chlumberger Industries SMR
10:30
am BREAK
SESSION
F
—
OPTICS and POSITIONING
11
:00 am A Miniature Opto-electric Transformer
227
M.Kimura, N.Miyakoshi, and M.Daibou
Tohoku-Gakuin University
11
:25 am Fabrication of Active Integrated Optical Micro-Encoder
233
R.Sawada, H.Tanaka, O.Ohguchi, J.Shimada, and S.Hara
NTT Applied Electronics Laboratories
11
:50 am Crystalline Lattice for Metrology and Positioning Control
239
H.Kawakatsu, Y.Hoshi, H.Kitano and T.Higuchi
University of Tokyo
12:15
pm LUNCH
page
1 45
pm
INVITED TALK
Characteristics of an Ultra-small Biomotor
245
N.
Kami-ike1, S.Kudo1, Y. Magariyama1, S.Aizawa1,
and H.Hotani2
Molecular Dynamic Assembly Project, ERATO, JRDC
2Teikyo University
SESSION CO-CHAIRS:
Jan H. Fluitman
Koji Ikuta
SESSION
G
—
MEDICAL APPLICATION and FLUIDICS
2:30
pm Micromachined, Silicon Based Electrode Arrays for Electrical
247
Stimulation of or Recording from Cerebral Cortex
R.A.Normann, P.K.Campbell, and K.E.Jones
University of Utah
2:55
pm Mating and Piercing Micromechanical Structures for Surface
253
Bonding Applications
H.Han, L.E.Weiss, and M.LReed
Carnegie Mellon University
3:20
pm BREAK
3:50
pm Linear Motion of Dielectric Particles and Living Cells in
259
Microfabricated
Structures Induced by Traveling Electric Fields
G.Fuhr1,
R.Hagedorn1, T.Müller1,
B.Wagner2,
and
W.
Benecke2
1Humboldt-University
of Berlin
2Fraunhofer-lnstitut
für Mikrostrukturtechnik
4:15 pm A Development of Micro Sheath Flow Chamber
265
R.Miyake, H.Ohki, I.Yamazaki, and R.Yabe
Hitachi, Ltd.
4:40
pm Electrohydrodynamic Pumping and Flow Measurement
271
A.Richter, A.PIettner,
K.A.Hofmann,
and H.Sandmaier
Fraunhofer-Institute
for Solid State Technology
5:05
pm Ultrasonically Induced
Microtransport
277
R.M.Moroney, R.M.White, and R.T.Howe
University of California at Berkeley
5:30
pm A Piezo-Electric Pump Driven by a Flexural Progressive Wave
283
S.Miyazaki, T.Kawai,
and M.Araragi
Yokogawa Electric Corporation
xi
AUTHOR INDEX
Aizawa, S.
- 245
Arai,
F. - 210
Araragi,
M. -
283
Arimoto,
S.
- 125
Bacher, W. - 69
Bart,
S.F.
- 109
Benecke,
W.
- 27, 259
Bloomstein,
T.M. -
202
Branebjerg,
J.
- 221
Brooks,
R.
Α.
- 109
Campbell,
Р.К.
- 247
Chen, J.
- 109
Cho, Y.-H.
- 51
Choi,
B.
- 74
Christenson, T.R.
- 74
Cross,
L.E. - 109
Daibou, M.
- 227
Dario,
P.
- 171
Davis,
C.C. -
45
Egawa, S.
- 9
Ehrlich, DJ. - 109, 202
Eijkel,
C.J.M. -
221
Elwenspoek, M.
- 160
Esashi, M.
- 39
Evans, A.G.R.
- 187
Farooqui, M.M.
- 187
Fedder, G.K.
- 63
Fluitman, J.H.J.
- 160
Flynn,
A.M.
- 109
Fuhr,
G.
- 259
Fujino, M.
- 80
Fujita, H.
- 57, 143, 148
Fukuda, T.
- 210
Furuhata, T.
- 57
Furuya, A.
- 192
Gabriel,
K.J. - 57
Gardeniers, J.G.E.
- 221
Guckel, H.
- 74
Hagedorn,
R. -
259
Han,
H.
- 253
Han,
S.
- 74
Hanneborg,
Α.
- 92
Hara,
S.
- 233
Harmening, M.
- 69
Hashimoto,
H.
- 210
Higuchi, T.
- 9, 239
Hirano, T.
- 57
Hirose, S.
- 103
Hofmann, K.A.
- 271
Hollerbach, J.M. - 166
Hoshi, Y.
- 239
Hosokai, H.
- 210
Hotani, H.
- 245
Howe, R.T.
-51, 63,277
Hsueh, C.-C.
- 114
Hunter,
I.W. - 166
Hunter, P.J.
- 166
likura,
S.
- 204
Ikuta,
К. -
103, 125, 131
Ishihara,
К.
- 176
Jacobsen,
S.C. -
45
Jones,
K.E. - 247
Judy, J.W.
- 182
Judy, M.W.
- 51
Kamada, T. - 176
Kami-ike,
N. - 245
Kaneko, R.
- 1, 137
Kawai, T.
- 283
Kawahara, A.
- 131
Kawakatsu, H.
- 239
Kimura, M.
- 227
Kishimoto, S.
- 176
Kitabatake, A.
- 176
Kitano, H.
- 239
Klein, J.
- 74
Ko,
W.H. -
154
Koìde, A.
- 216
Kudo,
S.
- 245
Kuo, C.-L. - 80
Kuwano,
H. -
120
Lafontaine,
S.
- 166
Lammerink, T.S.J. - 160
Lee, A.P.
- 21
Lin,
L. -
21
Lovell,
E.G. -
74
Magariyama, Y.
- 245
Makita, S.
- 125
Masuzawa, T.
- 80
Matsuda, R.
- 137
Matsui, S.
- 192
Matsuura, T.
- 143
Mehregany, M.
- 154
Menz,
W. -
69
Michel, A.
- 69
Minami,
К. -
39
Miyaké,
R. -
265
Miyakoshi,
N. - 227
Miyazaki,
S.
- 283
Moroney, R.M.
- 277
Mullen,
R.L.
- 154
Müller,
T.
- 259
Nagaoka, S.
- 86
Niino, T.
- 9
Noguchi, K.
- 148
Normann, R.A.
- 247
Ohguchi, O.
- 233
Ohki, H.
- 265
Ohkubo, T.
- 120
Ohyama, H.
- 210
Omar, M.P.
- 154
Özdemir,
H.C. -
198
Pardini, M.
- 171
Pisano, A.P.
- 21, 51
Plettner, A.
- 271
Polla, D.L.
- 114, 182
Reed,
M.
L.
- 253
Richter,
Α.
- 271
Sabatini, A.
- 171
Sandmaier,
Η.
- 271
Sato, K.
- 216
Sawada, R.
- 233
Schiller,
P.
- 114
Shibata,
H.
- 143
Shimada,
J.
- 233
Shimaoka,
К.
- 99
xii
AUTHOR INDEX
Shimokawa, F.
- 192
Shoji, S.
- 39
Skrobis,
K.J. - 74
Smith, J.G.
- 198
Sugiyama, S.
- 99
Suzuki, K.
- 15
Suzuki, S.
- 143
Suzuki, M.
- 148
Suzumori, K.
- 204
Tabata, O.
- 99
Tago, A.
- 120
Tamagawa, T.
- 114, 182
Tanaka, Hirohisa
- 204
Tanaka, Hidenao
- 233
Tanaka, S.
- 216
Tanigawa, H.
- 15
Tanouchi, J.
- 176
Tavrow, L.S.
- 109
Tjhen, W.
- 114
Tsukamoto, M.
- 103
Uchizawa, M.
- 143
Udayakumar, K.R.
- 109
Valleggi,
R.
- 171
van
de Pol, F.C.M. -
221
Wagner,
В.
- 27, 259
Weiss,
LE. -
253
Wells,
D.L. -
45
White,
R.M.
- 277
Wise, K.D.
- 33
Wood, J.E.
- 45
Yabe, R.
- 265
Yamazaki, I.
- 265
Yamazumi, S.
- 131
Yanagisawa, K.
- 120
Ye, C.-P.
- 114
Yoshimura,
N. - 148
Yura, S.
- 143
xiii
|
| any_adam_object | 1 |
| building | Verbundindex |
| bvnumber | BV005943673 |
| classification_tum | ELT 859f MAS 990f FER 792f |
| ctrlnum | (OCoLC)246730638 (DE-599)BVBBV005943673 |
| discipline | Elektrotechnik Fertigungstechnik Maschinenbau |
| format | Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1991 Nara gnd-content |
| genre_facet | Konferenzschrift 1991 Nara |
| id | DE-604.BV005943673 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:37:19Z |
| institution | BVB |
| isbn | 0879426411 087942642X 0879426438 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-003725011 |
| oclc_num | 246730638 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-634 DE-83 |
| owner_facet | DE-91 DE-BY-TUM DE-634 DE-83 |
| physical | XIV, 288 S. Ill., graph. Darst. |
| publishDate | 1991 |
| publishDateSearch | 1991 |
| publishDateSort | 1991 |
| publisher | Inst. of Electrical and Electronics Engineers |
| record_format | marc |
| spelling | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots ; Nara, Japan, 30 January - 2 February 1991 IEEE Micro-electro-mechanical systems New York, NY Inst. of Electrical and Electronics Engineers 1991 XIV, 288 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben Elektromechanik (DE-588)4151846-9 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1991 Nara gnd-content Mikromechanik (DE-588)4205811-9 s Elektromechanik (DE-588)4151846-9 s DE-604 Digitalisierung TU Muenchen application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=003725011&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots ; Nara, Japan, 30 January - 2 February 1991 Elektromechanik (DE-588)4151846-9 gnd Mikromechanik (DE-588)4205811-9 gnd |
| subject_GND | (DE-588)4151846-9 (DE-588)4205811-9 (DE-588)1071861417 |
| title | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots ; Nara, Japan, 30 January - 2 February 1991 |
| title_alt | Micro-electro-mechanical systems |
| title_auth | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots ; Nara, Japan, 30 January - 2 February 1991 |
| title_exact_search | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots ; Nara, Japan, 30 January - 2 February 1991 |
| title_full | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots ; Nara, Japan, 30 January - 2 February 1991 IEEE |
| title_fullStr | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots ; Nara, Japan, 30 January - 2 February 1991 IEEE |
| title_full_unstemmed | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots ; Nara, Japan, 30 January - 2 February 1991 IEEE |
| title_short | Micro electro mechanical systems |
| title_sort | micro electro mechanical systems proceedings an investigation of micro structures sensors actuators machines and robots nara japan 30 january 2 february 1991 |
| title_sub | proceedings ; an investigation of micro structures, sensors, actuators, machines and robots ; Nara, Japan, 30 January - 2 February 1991 |
| topic | Elektromechanik (DE-588)4151846-9 gnd Mikromechanik (DE-588)4205811-9 gnd |
| topic_facet | Elektromechanik Mikromechanik Konferenzschrift 1991 Nara |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=003725011&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |