APA (7th ed.) Citation

(1991). Micro electro mechanical systems: Proceedings ; an investigation of micro structures, sensors, actuators, machines and robots ; Nara, Japan, 30 January - 2 February 1991. Inst. of Electrical and Electronics Engineers.

Chicago Style (17th ed.) Citation

Micro Electro Mechanical Systems: Proceedings ; an Investigation of Micro Structures, Sensors, Actuators, Machines and Robots ; Nara, Japan, 30 January - 2 February 1991. New York, NY: Inst. of Electrical and Electronics Engineers, 1991.

MLA (9th ed.) Citation

Micro Electro Mechanical Systems: Proceedings ; an Investigation of Micro Structures, Sensors, Actuators, Machines and Robots ; Nara, Japan, 30 January - 2 February 1991. Inst. of Electrical and Electronics Engineers, 1991.