Leading edge of VLSI manufacturing technology: proceedings ; June 25 - 26, Intex Osaka, Osaka, Japan = VLSI-no-sentan-seizō-gijutsu
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | Undetermined |
| Veröffentlicht: |
S.l.
Semiconductor Equipment and Materials Inst.
[Ca. 1987]
|
| Schlagworte: | |
| Beschreibung: | Literaturangaben. - Beitr. teilw. engl., teilw. japan. |
| Beschreibung: | V, 328 S. Ill., graph. Darst. |
Internformat
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Datensatz im Suchindex
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| bvnumber | BV005908834 |
| classification_tum | ELT 270f |
| ctrlnum | (OCoLC)630343739 (DE-599)BVBBV005908834 |
| discipline | Elektrotechnik |
| format | Conference Proceeding Book |
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| genre_facet | Konferenzschrift 1987 Osaka |
| id | DE-604.BV005908834 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:36:40Z |
| institution | BVB |
| institution_GND | (DE-588)1400534-7 |
| language | Undetermined |
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| owner_facet | DE-91 DE-BY-TUM |
| physical | V, 328 S. Ill., graph. Darst. |
| publishDate | 1987 |
| publishDateSearch | 1987 |
| publishDateSort | 1987 |
| publisher | Semiconductor Equipment and Materials Inst. |
| record_format | marc |
| spelling | Leading edge of VLSI manufacturing technology proceedings ; June 25 - 26, Intex Osaka, Osaka, Japan = VLSI-no-sentan-seizō-gijutsu Semicon Osaka Technology Seminar '87 VLSI-no-sentan-seizō-gijutsu S.l. Semiconductor Equipment and Materials Inst. [Ca. 1987] V, 328 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben. - Beitr. teilw. engl., teilw. japan. Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1987 Osaka gnd-content Halbleitertechnologie (DE-588)4158814-9 s DE-604 SEMICON Technology Seminar 1987 Osaka Sonstige (DE-588)1400534-7 oth |
| spellingShingle | Leading edge of VLSI manufacturing technology proceedings ; June 25 - 26, Intex Osaka, Osaka, Japan = VLSI-no-sentan-seizō-gijutsu Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4158814-9 (DE-588)1071861417 |
| title | Leading edge of VLSI manufacturing technology proceedings ; June 25 - 26, Intex Osaka, Osaka, Japan = VLSI-no-sentan-seizō-gijutsu |
| title_alt | VLSI-no-sentan-seizō-gijutsu |
| title_auth | Leading edge of VLSI manufacturing technology proceedings ; June 25 - 26, Intex Osaka, Osaka, Japan = VLSI-no-sentan-seizō-gijutsu |
| title_exact_search | Leading edge of VLSI manufacturing technology proceedings ; June 25 - 26, Intex Osaka, Osaka, Japan = VLSI-no-sentan-seizō-gijutsu |
| title_full | Leading edge of VLSI manufacturing technology proceedings ; June 25 - 26, Intex Osaka, Osaka, Japan = VLSI-no-sentan-seizō-gijutsu Semicon Osaka Technology Seminar '87 |
| title_fullStr | Leading edge of VLSI manufacturing technology proceedings ; June 25 - 26, Intex Osaka, Osaka, Japan = VLSI-no-sentan-seizō-gijutsu Semicon Osaka Technology Seminar '87 |
| title_full_unstemmed | Leading edge of VLSI manufacturing technology proceedings ; June 25 - 26, Intex Osaka, Osaka, Japan = VLSI-no-sentan-seizō-gijutsu Semicon Osaka Technology Seminar '87 |
| title_short | Leading edge of VLSI manufacturing technology |
| title_sort | leading edge of vlsi manufacturing technology proceedings june 25 26 intex osaka osaka japan vlsi no sentan seizo gijutsu |
| title_sub | proceedings ; June 25 - 26, Intex Osaka, Osaka, Japan = VLSI-no-sentan-seizō-gijutsu |
| topic | Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Halbleitertechnologie Konferenzschrift 1987 Osaka |
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