Plasma surface engineering: Proceedings of the 2nd International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany, September 10 - 14, 1990
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| Format: | Conference Proceeding Book |
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| Language: | English |
| Published: |
Amsterdam u.a.
Elsevier
1991
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| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Item Description: | Literaturangaben |
| Physical Description: | XIV, 853 S. Ill., graph. Darst. |
| ISBN: | 0444892796 |
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| 245 | 1 | 0 | |a Plasma surface engineering |b Proceedings of the 2nd International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany, September 10 - 14, 1990 |c E. Broszeit ... (eds.) |
| 246 | 1 | 3 | |a PSE '90 |
| 264 | 1 | |a Amsterdam u.a. |b Elsevier |c 1991 | |
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| 650 | 4 | |a Surfaces (Technology) |x Congresses | |
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| adam_text | VII
CONTENTS
Preface
........................................................
v
PLASMA
DIAGNOSTICS
In-situ diagnostics/spectroscopy
.......................................... 1
H. R.
Griem
(College
Park, MD,
U.S.A.)
Plasma diagnostics of an ECR ¡on beam system
................................. 6
W.
Möhl (Kirchheim bei München, F.R.G.)
Nitrogen atoms in Ar-Nj flowing microwave discharges for steel surface nitriding
.............. 9
A.
Ricard,
J.
Deschamps,
J. L.
Godard (Orsay, France), L.
Falk and
H.
Michel
(Nancy, France)
Low frequency
d.c.
pulsed plasma for iron
nitriding............................... 15
J.
Bougdira,
G.
Henrion,
M.
Fabry,
M.
Remy
and
J. R.
Cussenot (Vandoeuvre-lès-Nancy, France)
Measurement of temperature distribution and cooling speed in metal on
IR
radiation
............ 20
T. Ariyasu, T. Yamauchi and A. Kuzuguchi (Osaka, Japan)
Mechanism of controlling the self-bias voltage in a flat-bed reactor
....................... 24
T.
Onte
and M. Sugawara (Gunma, Japan)
Influence of the phase transformation of a metal on hollow cathode discharge characteristics
........ 29
С
Simon, S. Heuraux
(Vandoeuvre-lès-Nancy,
France), H. Michel (Nancy, France), M. Belmahi,
B. Petat
and M.
Remy
(Vandoeuvre-lès-Nancy,
France)
The parameters of a discharge in an AT-1 biased activated reactive evaporation system for TiN deposition
33
J. Markowski, A. Prajzner and J. Zdanowski (Warsaw, Poland)
Spectroscopic investigation of Nj-Hj-Ar-TiC^-assisted chemical vapour deposition discharge for plasma
of TiN
......................................................... 37
K.-T.
Rie
and J.
Wohle
(Braunschweig, F.R.G.)
Langmuir probe plasma diagnostics during
TiN„
deposition
........................... 41
A. Lunk
and R.
Basner (Griefswald, F.R.G.)
BIOCOMPA TIBLE MA TERIALS
Production of
biocompatible
coatings by atmospheric plasma spraying
.................... 45
E. Lugscheider, Th. Weber, M. Knepper (Aachen, F.R.G.) and F. Vizethum (Mannheim, F.R.G.)
Biocompatibility and corrosion resistance in biological media of hard ceramic coatings sputter deposited
on metal implants
...........................·....................... 49
С
Sella,
J. C. Martin, J.
Lecoeur, A. Le Chanu (Meudon,
France),
M. F.
Harmand,
A. Naji (Bordeaux,
France) and J. P. Davidas (Paris, France)
Biocompatibility of TiN preclinical and clinical investigations..........................
58
Η.
Behmdt
and A. Lunk
{Greifswald, F.R.G.)
PLASMA ASSISTED CHEMICAL
VAPOUR DEPOSITION
Plasma-assisted chemical vapour deposition of hard coatings with metallo-organic compounds
....... 61
K.-T.
Rie
and A.
Gebauer
(Braunschweig, F.R.G.)
Structure and properties of TiC, layers prepared by plasma-assisted chemical vapour deposition methods
67
Ch.
Täschner,
A. Leonhardt, M.
Schönherr,
E.
Wolf and J. Henke (Dresden, F.R.G.)
The influence of titanium interlayers on the adhesion of titanium nitride coatings obtained by plasma-
assisted chemical vapour deposition
........................................ 71
S. J. Bull, P. R. Chalker,
С
F.
Ayres and D. S. Rickerby (Didcot, U.K.)
Development of the quadrupole plasma chemical vapour deposition method for low temperature, high
speed coating on an optical fibre
.......................................... 79
T.
Kasnima,
Y.
Matsuda and H. Fujiyama (Nagasaki, Japan)
VIII
On the adhesion of plasma-deposited TiN on M2 steel
.............................. 85
F. H. M. Sanders (Eindhoven, The Netherlands)
EROSION AND CORROSION
Corrosion-resistant silica coatings obtained by plasma-assisted chemical vapour deposition
......... 91
M. J. Bennett,
С
F.
Knights,
С.
F.
Ayres,
А. Т.
Tuson,
J. A.
Desport, D.
S. Rickerby (Didcot, U.K.),
S. R. J. Saunders and K. S. Coley (Teddington, U.K.)
POLYMERS
Surface
treatment of polypropylene by oxygen microwave discharge.....................
103
F. Normand,
J. Marec,
Ph.
Leprince and
A. Granier (Orsay, France)
A reactor for
plasma
polymerization on polymer films
.............................. 110
K. W.
Gerstenberg
(Hamburg, F.R.G.)
High-thermal-resistant dielectric coating deposited by plasma polymerization
................. 120
J. Tyczkowski and H.
Szymanowski (Łódź,
Poland)
PROCESS CONTROL
D.c. magnetron sputtering of oxidation-resistant chromium and CrN films monitored by optical emission
spectrometry
..................................................... 126
H. Benien, J.
Maushart,
M.
Meyer and R. Suchentrunk (Munich, F.R.G.)
Effect of process parameters on the atomic nitrogen concentration as measured by chemiluminescence
in a post-discharge
n
itriding reactor
........................................ 132
L.
Falk,
J.
Oseguera, A. Ricard, H.
Michel and
M. Gantois
(Nancy, France)
Correlation of particle flux parameters with the properties of thin tungsten carbide films
........... 137
G, Keller, I. Barzen, W.
Dotter,
R.
Erz,
S. Ulrich,
К.
Jung and H. Ehrhardt
(Kaiserslautern,
F.R.G.)
Experimental study of a glow discharge electron source for soft X-ray spectroscopy
............. 144
P. B.
Legrand,
J. P. Dauchot and M. Hecq (Mons, Belgium)
ION BEAM TECHNOLOGY—MODIFICATION AND MIXING
Wear-resistant steel surfaces obtained by high dose implantation of carbon
.................. 150
C. A. Straede, J. R. Poulsen, B. M. Lung and G. Sorensen (Aarhus, Denmark)
Modification of Cr2N coatings on AI-3wt.%Mg substrates by xenon irradiation
................ 159
W. Boise,
T. Kacsich (Göttingen,
F.R.G.) and F. J.
Bergmeister (Frankfurt/Main,
F.R.G.)
Xenon and argon irradiation of TiN films on AI-3wt.%Mg
............................ 165
W,
Müller,
W.
Bolse
and
К. Р.
Lieb
(Göttingen, F.R.G.)
Plasma
immersion ion implantation of steels
.......,........................... 171
G.
A. Collins,
R.
Hutchings and J. Tendys
(Menai, N.S.W.,
Australia)
Influence of temperature on nitrogen ion implantation of Incoloy alloys
908
and
909............. 179
L. Xie, F. J. Worzala, J. R. Conrad, R. A. Dodd and K. Sridharan (Madison, Wl, U.S.A.)
Modification of alumina powders by nickel and platinum coating
........................ 185
H. W. Schils (Schwbisch
Gmünd,
F.R.G.), M. Heuberger (Stuttgart, F.R.G.), H.
Frey
(Aichwald/
Esslingen, F.R.G.), H. A.
Jehn (Schwäblisch Gmünd,
F.R.G.),
R.
Telle
(Stuttgart, F.R.G.) and
Ch. J.
Raub (Schwäbisch Gmünd,
F.R.G.)
Stitching TiN films on high speed steel substrates by ion beams
........................ 193
L.
Xíang, T,
С. Ш
and
Y. C.
Zhu (Dalian, China)
ION BEAM ASSISTED DEPOSITION
Applications of ion-beam-assisted deposition
................................... 199
J. S. Colligon (Salford, U.K.)
The economics of ion implantation
......................................... 207
B. L. Garside (Cambridge, U.K.)
Formation of intrinsic oxide layers by ion implantation of silicon and titanium in the low kiloelectrovolt
regime
........................................................ 214
H. Oechsner and J.
Waidorf (Kaiserslautern, F.
R.G.)
Synthesis of gradient thin films by ion beam enhanced deposition
....................... 220
X.-H. Liu (Shanghai, China), J.-K. Zhou (Berlin, F.R.G.), S.-C.
Zou
(Shanghai, China), S. Tamguchi
(Osaka, Japan), A. Schroer and G. K. Wolf (Heidelberg, F.R.G.)
Characterization of TiN coatings prepared by ion-beam-enhanced deposition
................. 225
X. Y. Li, F. J. Wang,
Т. С
Ma and
Υ. Κ.
Wang (Dalian, China)
THIN FILM CHARACTERIZE
TION
Investigation and modification of free and adsorbate-covered surfaces by scanning tunnelling microscopy
230
L. M.
Eng
and H.
Fuchs (Ludwigshafen,
F.R.G.)
X-ray studies of A /k 2O3 multilayered films
.................................... 239
Y. Wang
and
N.
Zhang (Changchun, China)
Texture analysis of martensitic hot-worked tool steel H13 coated with TiN by physical vapour deposition
. 242
С
Quaeyhaegens, L. M.
Stals
and M. van
Stappen (Diepenbeek,
Belgium)
interface problems in metallurgical coatings
................................... 249
B. Navinšek, S.
Novak and A. Zalar (Ljubljana, Yugoslavia)
Analysis of r.f.-sputtered TiB2 hard coatings by means of X-ray diffractometry and Auger electron
spectroscopy
..................................................... 259
R.
Lehmann,
E.
Österschulze,
К.
Thoma, H.
Gärtner (Kassel, F.R.G.),
W.
Herr,
В.
Matthes,
E. Broszeit
and K.-H. Kloos (Darmstadt, F.R.G.)
Study of
AI2O3 and NiAI-AiA
coatings with acoustic emission analysis
.................... 264
R. Novák, F.
Čermák
and L. Kalivoda
(Prague, Czechoslovakia)
Characterization of
microstructure
and interfaces in TiC-TiBj coatings
..................... 268
G. Hilz and H. Holleck (Karlsruhe, F.R.G.)
Structural study of titanium nitride coating interfaces related to plasma diagnostics
............. 276
T.
Czerwiec,
К.
Anoun (Nancy, France), M.
Remy
(Vandoeuvre-lès-Nancy,
France) and H. Michel
(Nancy, France)
SPUTTERING
Evidence for mixed-phase nanocrystalline boron nitride films
.......................... 284
W. Gissler, J,
Haupt,
T. A. Crabb, P.
N.
Gibson and D. G. Rickerby
(Ispra,
Italy)
A new sputter process for hard coating of large machine parts at low temperatures
............. 290
D.
Hofmann,
A. Rost
and H.
Schüssler (Hanau,
F.R.G.)
ELECTRON CYCLOTRON RESONANCE
Characterization of electron cyclotron resonance process plasma and film deposition
............ 294
S. Miyake and W. Chen (Osaka, Japan)
An electron cyclotron resonance plasma source
................................. 302
G.
Lorenz,
P.
Baumann,
G. Castrischer,
I.
Kessler
and K.-H. Kretschmer (Alzenau, F.R.G.) and
B. Dumbacher (Frankfurt, F.R.G.)
Characteristics of ECR plasmas for weakly resonant conditions
......................... 307
M. Saigoh,
N.
Ohno and H. Fujiyama (Nagasaki, Japan)
Development of coaxial ECR plasma source for tube inner coating
....................... 312
T. Shigemizu,
N.
Ohno and H. Fujiyama (Nagasaki, Japan)
AMORPHOUS SEMICONDUCTING FILMS
Thin film technology based on hydrogenated amorphous silicon
........................ 319
B.
Schröder (Kaiserslautern, F.R.G.)
Electrical characterization of plasma-deposited hydrogenated amorphous carbon films
........... 334
P. Hammer, A.
Helmbold,
К. С.
Rohwer and
D.
Meissner (Hannover, F.R.G.)
SUBSTRA
TE TREA
TMENT
Sputter cleaning of iron substrates and contamination of TiN coatings studied by in situ Auger electron
spectroscopy measurements in an ultrahigh vacuum physical vapour deposition apparatus
......... 339
N.
Eguchi, V. Grajewski, H. H. Uchida and E.
Fromm
(Stuttgart, F.R.G.)
Effect of contamination on mechanical properties and adhesion of magnetron-sputtered TiN coatings on
high speed steel substrates
.............................................. 345
S. Berg, S. W. Kim, V. Grajewski and E.
Fromm
(Stuttgart, F.R.G.)
ELECTRICAL
APPLICA TIONS
Plasma deposition of superconducting films
................................... 352
E. Pfender, H. Zhu and Y.
С
Lau
(Minneapolis,
MN,
U.S.A.)
Thin conductive films made by plasma polymerization of 2-chloroacrylonitrile in the presence of iodine
. . 356
H.
Grünwald
and H. S. Munro (Durham, U.K.) and T.
Wilhelm (Oberderdingen,
F.R.G.)
Improved magnetic behaviour of cobalt-based alloy sputter-target material
.................. 359
M.
Weigert,
St. U.
Schittny (Hanau,
F.R.G.) and B. L. Gehman (Morgan Hill, CA, U.S.A.)
XPS investigation of polymer residues in reactive ion etching of SiO2 over poly-silicon
............ 364
W. Pamler, F. Bell, L.
Mühlhoff
and H. J.
Barth
(Munich, F.R.G.)
Production of thin metallic and dielectric coatings by a plasma technique and their investigation
...... 372
P. M. Rasulov, Kh. R. Tulyaganov, Z. A. Iskanderova, T. D. Radjabov, M. A. Alimova, L. P. Kovarski
and V. A. Krakhmalyov (Tashkent, U.S.S.R.)
MICROELECTRONIC
APPLICA
TIONS
Growth kinetics and step coverage in plasma deposition of silicon dioxide from organosilicon compounds
376
С
Bourreau, Y.
Catherine and P. Garcia (Nantes, France)
Insulation and passivation of three-dimensional substrates by plasma-CVD thin films using silicon-organic
compounds
..................................................... 380
D. Peters, J.
Müller
and T. Sperling (Hamburg, F.R.G.)
An XPS study of photoresist surfaces in SFe~O2 r.f. plasmas
.......................... 385
J. F. Coulon and G. Turban ¡Nantes, France)
Low temperature remote plasma-enhanced deposition of thin metal oxide films by decomposition of
metal alkoxides
................................................... 394
H. J. Frenck, E. Oesterschulze, R.
Beckmann,
W.
Kulisch and R. Kassing
(Kassel,
F.R.G.)
Hydrogen in plasma-enhanced chemical vapour deposition insulating films
.................. 401
G.
Keim
and G. Jungnickel (Dresden, F.R.G.)
Microwave etching device for reactive ion etching
................................ 408
H.
Schmid
(Munich, F.R.G.)
Simulation of reactive ion-etching processes considering sheath dynamics
.................. 412
A. Fichelscher, I. W. Rangelow and R. Kassing
(Kassel,
F.R.G.)
PLASMA DIFFUSION
TREA
TMENT
Piasma surface engineering of low alloy steel
................................... 419
Y. Sun and T. Bell (Birmingham, U.K.)
Plasma nitriding in industry
—
problems, new solutions and limits
........................ 435
R.
Grün
and H.-J.
Günther (Siegen,
F.R.G.)
XI
Sputtering, deposition, and diffusion in ion-nitriding of an austenitic stainless steel
.............. 442
K.
lenii,
K. Fujimura
and
T.
Takase (Osaka, Japan)
Influence of pulsed d.c.-glow-discharge on the phase constitution of nitride layers during plasma nitro-
carburizing of sintered materials
.......................................... 448
K.-T.
Rie
and F. Schnatbaum (Brawnschweig, F.R.G.)
Plasma overcarburizing of chromium steels for hot working and wear applications
.............. 454
J, P. Souchard (La Verpilliere, France), P. Jacquot and M. Buvron (Chassieu, France)
Plasma carburization of wear-resistant high chromium iron
........................... 461
I.
Asano,
T.
Araki
and
Y.
Ikawa (Ehime-Ken, Japan)
Plasma nitriding improvements of fatigue properties of nodular cast iron crankshafts
............ 469
M. M.
Tošić
and R.
Gligorijević
(Belgrade, Yugoslavia)
Plasma heat treatment of steel:
microstructure,
properties and applications
.................. 474
Z. Nitkiewicz and L. Jeziorski
(Częstochowa,
Poland)
Formation of TiAI3 layer on titanium alloys
.................................... 479
J.
Král,
M.
Ferdinandy,
D.
Liška
and P.
Diko
(Košice,
Czechoslovakia)
Application of ion nitriding to wire-electrical-discharge-machined blanking dies
................ 486
T. Sone
and K. Masui (Osaka, Japan)
Nitrogen microwave discharge as a source of excited neutral species for possible surface treatment.
. . . 494
C.
Chave,
С.
Boisse-Laporte,
J. Marec and Ph. Leprince
(Orsay, France)
Formation
of TiN layers by plasma-assisted chemical vapour deposition at temperatures greater than
823
К
......................................................... 499
J. Michalskí
and T.
Wierzchoń
(Warsaw, Poland)
Properties of composite layers produced on stainless steel under glow discharge conditions
........ 505
T.
Wierzchoń,
J. Michalskí
and J.
Rudnički
(Warsaw, Poland)
PLASMA TECHNOLOGY
Dynamic interactions in the physical properties of magnetron deposition systems
.............. 510
S. M.
Rossnagel (Yorktown
Heights, NY, U.S.A.)
An investigation into the effects of plasma bombardment anisotropy in low frequency r.f. glow
discharges
...................................................... 517
A. S. James,
K. S.
Fancey and A. Matthews (Hull, U.K.)
Ion-assisted deposition with a new plasma source
................................ 523
K. Matl, W.
Klug
and A.
Zöller {Alzenau,
F.R.G.)
Zirconia thin film deposition on silicon by reactive gas flow sputtering: the influence of low energy par¬
ticle bombardment
................................................. 528
T. Jung and A. Westphal (Berlin, F.R.G.)
TiN plasma CVD coatings deposited by different excitation methods for the gas discharge
......... 534
H. Freller and H. P.
Lorenz (Erlangen,
F.R.G.)
Plasma synthesis of disperse oxide materials from disintegrated solutions
.................. 539
Y.
N.
Tumanov and A. V. Sigailo (Kashira Highway, U.S.S.R.)
Properties and performance of plasma-assisted physically vapor-deposited TiC coatings
........... 549
K. Upadhya {Milwaukee, Wl, U.S.A.)
Characterization of
Тт
coatings deposited on plasma nitrided toot steel surfaces
............... 554
M. Van
Stappen,
В.
Maliiét,
L
Stals,
L. De
Schepper (Diepenbeek,
Belgium),
J. R.
Roos
and J. P.
Celis
{Leuven,
Belgium)
Development of large area sputter-coating method using magnetized a.c. plasmas with inclined
electrodes
...................................................... 563
Y. Matsuda, K. Kuwahara and H. Fujiyama (Nagasaki, Japan)
Averaging effect of radical particle profile by the scanning plasma method in SiHz-Ar plasmas
....... 569
H. Fujiyama, H. Kawasaki, Y. Matsuda and
N.
Ohno (Nagasaki, Japan)
XII
A coating thickness uniformity model for physical vapour deposition systems—further validity tests
.... 576
K. S. Fancey, P. A. Robinson, A. Leyland, A. S. James and A. Matthews (Hull, U.K.)
HARD
COA
TINGS
A review of the methods for the evaluation of coating-substrate adhesion
.................. 583
P. R. Chalker, S. J. Bull and D. S. Rickerby (Didcot, U.K.)
Tribologicai properties and wear behaviour of sputtered titanium-based hard coatings under sheet-metal-
forming conditions
................ .................................. 593
B. Matthes, W.
Herr,
E.
Broszeit,
K. H. Kloos, G.
Nürnberger,
D. Schmoeckel
(Darmstadt, F.R.G.),
F. Höhl, H.-R. Stock and P. Mayr (Bremen, F.R.G.)
Evaluation
of some new titanium-based ceramic coatings in tribologicai model wear and metal-cutting
tests
......................................................... 602
H.
Ronkamen,
I.
Nieminen,
K. Holmberg
(Espoo,
Finland), A. Leyland, K.
S. Fancey, A.
Matthews
(Hull,
U.K.),
В.
Matthes and
E.
Broszeit (Darmstadt, F.R.G.)
Two-phase TiC/TiB2 hard coatings
......................................... 609
H. Holleck and M. Lahres (Karlsruhe, F.R.G.)
Fundamental properties and wear resistance of r.f.-sputtered TiB2 and
Ti (B, N)
coatings
........... 616
W.
Herr,
В.
Matthes,
E.
Broszeit
and K. H.
Kloos (Darmstadt, F.R.G.)
A comparison of the corrosion behaviour and hardness of steel samples
(ЮОСгб)
coated with titanium
nitride and chromium nitride by different institutions using different deposition techniques
......... 625
A. Schröer,
W.
Ensinger and
G. K. Wolf
(Heidelberg, F.R.G.)
influence of deposition conditions on the adhesion of sputter-deposited W-C-fCo) films
........... 631
A. Cavaleiro
and
M. T.
Vieira (Coimbra,
Portugal)
Physical vapour deposition of TiN hard coatings with additional electron beam heat treatment
....... 639
A.
Schulz,
H.-R. Stock and P. Mayr (Bremen, F.R.G.)
Tribologicai properties of r.f.-sputtered titanium-based hard coatings and their behaviour under plastics-
processing conditions
................................................ 647
G. Palier,
В.
Matthes,
W.
Herr
and
E.
Broszeit (Darmstadt, F.R.G.)
Amorphous and crystalline phases in PVD coatings after laser treatment
................... 655
O. Knotek
and F.
Lőffler
(Aachen, F.R.G.)
Ti-N films created in close vicinity of transition from
α
-Ti
(N) to
ő-TiN^
phase
................. 660
V. Poulek, J.
Musil,
V. Valvoda and L.
Dobiášova
(Prague, Czechoslovakia)
Deposition of hard coatings by a hollow-cathode arc evaporation device
................... 666
A. Lunk
{Greifswald,
F.R.G.)
Sputter deposition of wear-resistant coatings within the system Zr-B-N
.................... 670
C. Mitterer,
A. Übieis
and R.
Ebner (Leoben,
Austria)
Preparation and properties of metastable TiC/SiC PVD coatings for wear protection
............. 676
R. Fella and H. Holteck (Karlsruhe, F.R.G.)
High speed pipe inner coating using magnetron hollow-cathode discharge in a magnetic field
....... 682
H. Kawasaki, T. Nakashima and H. Fujiyama (Nagasaki, Japan)
Structure and properties of ion-plated aluminium bronze films
......................... 687
Z.-M. Gu, L. Wang and L.-Y Yang (Dalian, China)
Development of a large area sputter-coating method using a new magnetron discharge
........... 691
K. Kuwahara, Y. Matsuda and H. Fujiyama (Nagasaki, Japan)
The influence of the reactive gas flow on the properties of
AIN
sputter-deposited films
........... 696
Є.
Jarsczak-Bienk, H. Jensen and G. S0rensen (Aarhus, Denmark)
Properties of sputtered stainless steel-nitrogen coatings and structural analogy with low temperature
plasma nitrided layers of austenitic steels
..................................... 702
A. Saker,
Ch.
Leroy,
H.
Michel
and
C. Frantz
(Nancy, France)
Formation
of metallic coatings on non-heated substrates by the impulse plasma method
.......... 709
K. Zdunek (Warsaw, Poland)
Characterization of remote plasma-enhanced chemical vapour deposition processes
............. 715
W. Kulisch, M. Witt, H. J. Frenck and R. Kassing
(Kassel, F.R.G.)
A comparative study of the corrosion performance of TiN, Ti(B,N) and
(Τί,ΑΙ)Ν
coatings produced by
physical vapour deposition methods
........................................ 722
J. Aromaa, H. Ronkainen, A. Mahiout, S.-P. Hannula
(Espoo,
Finland), A, Leyland, A. Matthews (Hull,
U.K.), B. Matthes and E. Broszeit (Darmstadt, F.R.G.)
Characterization of surface chromium and molybdenum alloying on gray cast iron obtained by the
plasma-transferred arc technique
......................................... 727
L. Giordano, A. Tiziani,
A. Zambón
(Padova,
Italy) and
N.
Antolotti (Parma, Italy)
Plasma impulse chemical vapour deposition
—
a novel technique for the production of high power laser
mirrors
........................................................ 733
J. Segner (Mainz, F.R.G.)
SUPERHARD
COA
TINGS
Deposition and properties of diamond thin films
................................. 741
C.-P. Klages (Hamburg, F.R.G.)
Microstructure
of diamond films near the interface with WC substrate
..................... 747
S. Takatsu, K. Saijo, M. Yagi, K. Shibuki (Kawasaki, Japan) and J. Echigoya (Sendai, Japan)
Manufacture of c-BN films with improved adhesion
............................... 753
M. Murakawa, S. Watanabe and S. Miyake (Saitama-Prefecture, Japan)
Forming of a grinding wheel using a dresser with brazed diamond film
.................... 759
M. Murakawa and S. Takeuchi (Saitama-Prefecture, Japan)
C:H
COATINGS
The deposition of
Ag
-С:
H
films: a tool to understand the role of carbide-forming metals in the Me-C:
H
deposition process
................................................. 764
J. T. Harnack and
С
Benndorf (Hamburg, F.R.G.)
Deposition of diamond-like carbon films by the anodic arc technique
...................... 770
V. Buck, M.
Mausbach
and J. Bur am
Orde (Essen,
F.R.G.)
Investigations of the structure of a-C
:
H
films
................................... 775
R.
Kleber,
W.
Dworschak,
J. Gerber, A.
Krüger,
K.
Jung, H.
Ehrhardt (Kaiserslautern, F.R.G.),
S.
Schulze,
I.
Mühling,
S.
Deutschmann,
W.
Scharff (Chemnitz, F.R.G.), F. Engelke and M. Metz
(Leipzig, F.R.G.)
Cathodic arc deposition of diamond-like carbon: effect of bias voltage and deposition angle
........ 780
B.
Rother,
J.
Siegel,
I.
Mühling
and H. Fritzsch (Chemnitz, F.R.G.)
Microwave plasma apparatus for deposition of hydrogenated amorphous carbon layers
........... 784
K. Hammer, S. Roth, B. Mainz, O. Stenzel, W. Scharff (Chemnitz, F.R.G.), W. Dworschak, R.
Kleber,
Α.
Krüger,
К.
Jung and
H.
Ehrhardt
(Kaiserslautern,
F.R.G.)
Plasma and particle flux characterization of the
а
-C
:
H
deposition process by ion-assisted methods
..... 788
G. Schaarschmidt, F. Scholze, S. Porsch, F. Wolf, T.
Wallendorf,
W.
Scharff
¡Chemnitz, F.R.G.),
J.
Gerber,
R.
Kleber,
W. Dworschak, A.
Krüger,
К.
Jung
and H.
Ehrhardt
(Kaiserslautern,
F.R.G.)
Structural and mechanical properties of niobium-containing amorphous hydrogenated carbon films
(Nb~C:H)
.......................................................
795
С
Benndorf, M. Fryda, C.-P. Klages,
K. Taube
(Hamburg, F.R.G.) and H.-G.
Haubold (JQlich,
F.R.G.)
Sputtered stainless steel-carbon coatings as a substitute for hard electrolytic chromium for potential
applications in mechanics
.............................................. 802
A.
Billard
(Nancy, France), J.
Steinmetz
(Vandoeuvre, France) and
С
Frantz (Nancy, France)
Interaction of graphite with an energetic hydrogen isotope beam
........................ 809
M. Yamawaki, K. Yamaguehi, T. iwai and S. Tanaka (Ibaraki-ken, Japan)
XIV
GENERAL
ASPECTS AND ARC TECHNIQUES
(Ti-AI)N
advanced films prepared by arc process
................................ 816
B. F. Coll, R.
Fontana,
A. Gates and P. Sathrum (Rockaway, NJ, U.S.A.)
Relations between plasma properties of thin copper films produced by an anodic vacuum arc
....... 825
M.
Mausbach,
H.
Ehrich
and
K. G.
Müller (Essen, F.R.G.)
Cathodic arc deposition of TiN and Zr(C,N) at low substrate temperatures using a pulsed bias voltage
. . . 830
J.
Fessmann,
W.
Olbrich,
G.
Kampschulte
(Stuttgart, F.R.G.) and J. Ebberink (Sigmaringen-Laiz, F.R.G.)
TiCjN,^ coatings by using the arc evaporation technique
............................ 838
E. Damond, P. Jacquot (Chassieu, France) and J. Pagny (Neuilly en Thelle, France)
AUTHOR INDEX
................................................... 842
SUBJECT INDEX
................................................... 845
842
Author Index
Alimova,
Μ. Α.,
372
Anoun,
К.,
276
Antolotti, N.,
727
Araki,
T.,
461
Ariyasu,
T.,
20
Aromaa,
J.,
722
Asano.
L,
461
Ayres.C. F.,71,91
Barth,
H. J.,
364
Barzen, L,
137
Basner, R.,
41
Baumann,
P.,
302
Beckmann, R„ 394
Behrndt.H., 58
Bell, F., 364
Bell,T.,419
Belmahi, M.,
29
Benien, H.,
126
Benndorf, C,
764.795
Bennett,
M. J.,
91
Berg,
S.,
345
Bergmeister,
F. J.,
159
Biliard,
Α.,
802
Boisse-Laporte, C,
494
Bolse, W.,
159,165
Bougdira, J.,
15
Bourreau,
C,
376
Brosze«,
E.,
259, 593,602,616,
647, 722
Buck,
V.,
770
Bull,
S. J.,
71,583
Bur am
Orde,
J-,
770
Buvron, M.,
454
Castrischer, G.,
302
Catherine,
Y.,
376
Cavaleiro,
Α.,
631
Cełis.J.R,
554
Cěrmák,
F., 264
Chalker,
P. R.,
71,583
Chave,
С,
494
Chen, W.,
294
Coie^K.
S.,
91
Coll,
В.
F., 816
CoHigon.J.S., 199
Collins,
G.
Α.,
171
Conrad.
J. R.,
179
CouionJ. F.,385
Crabb, T.
Α.,
284
Cussenot,
J. R.,
15
Czerwiec,
T.,
276
Damond,
E.,
838
Dauchot.J.P.,
144
Davidas.J.P.,
49
De
Schepper, L.,
554
Deschamps, J.,
9
Desport,
J.
Α.,
91
Deutschmann,
S.,
775
Diko,
P.,
479
Dobiášova, L.,
660
Dodđ^.A.,
179
Dotter,
W.,
137
Dumbacher,
В.,
302
Dworschak, W.,
775, 784, 788
Ebberink, J.,
830
Ebner, R., 670
Echígoya, J.,
747
Eguchi,N.,339
Ehrhardt, H.,
137, 775,784,788
Ehrich,
H.,
825
Eng,
L. M.,
230
Engelke, F., 775
Ensinger, W.,
625
Erz,
R.,
137
Fabry,M,
15
Falk,
L.,
9, 132
Fancey.K.S.,
517, 576,602
Fella,
R.,
676
Ferdinandy,
M.,
479
Fessmann,
J.,
830
Fichelscher.A.^^
Fontana,
R.,
816
Frantz, C,
702,802
Freller, H„
534
Frenck, H. J.,
394, 715
Frey,
H.,
185
Fromm,
E.,
339, 345
Fryda,
M.,
795
Fuchs,
H.,
230
Fujimura, K.,
442
Fujiyama,
H.,
79,307,312, 563,
569,682,691
Gantois, M.,
132
Garcia, P.,
376
Garside,
B. L.,
207
Gartner, H.,
259
Gates,
Α.,
816
Gebauer,
Α.,
61
Gehman,
B. L.,
359
Gerber, J.,
775,788
Gerstenberg,
K. W.,
П0
Gibson, P.
N.,
284
Giordano,
L.,
727
Gissler, W.,
284
Gligorijević,
R.,
469
Godard,
J. L.,
9
Grajewski, V.,
339,345
Granier.A.,
103
Griem, H. R.,
1
Grün,
R.,
435
Grünwald,
H.,
356
Gu, Z.-M.,
687
Günther, H.-J., 435
Hammer,
K.,
784
Hammer,
P.,
334
Hannula, S.-P.,
722
Harmand, M.
F., 49
Harnack,J.T.,764
Haubold, H.-G., 795
Haupt,
J.,
284
Hecq.M,
144
Helmbold,
Α.,
334
Henke,
J.,
67
Henrion, G.,
15
Herr,
W.,
259,593,616,647
Heuberger, M.,
185
Heuraux, S.,
29
Hilz, G.,
268
Hofmann, D.,
290
Höhl, F., 593
Holleck,
H.,
268,609,676
Holmberg, K.,
602
Hutchings, R.,
171
Icnii,
К.,
442
Ikawa,Y.,461
Iskanderova, Z.
Α.,
372
Iwai.T.,
809
Jacquot, P.,
454, 838
James,
A. S.,
517, 576
Janczak-Bienk, E.,
696
Jehn,H.A.,
185
Jensen,
H.,
696
Jeziorski, L.,
474
Jung,
К.,
137,775,784, 789
Jung,
T.,
528
Jungnickel,
G.,
401
Kacsich.T., 159
Kalivoda,
L.,
264
Kampschulte,
G.,
830
Kashima,
T.,
79
Kassing,
R.,
394,412, 715
Kawasaki, H.,
569,682
Keller,
G.,
137
Keim,
G.,
401
Kessler,
I.,
302
©
Elsevier Sequoia/Printed in The Netherlands
843
Kim.
S W.
345
Kinghts.
С
F..
vi
Klages.C-P.
•41.-95
Kleber. R.. ^5. 84. -88
Kloos. K H..
25v.5v3.6l6
Klug.
W.
523
Knepper.
M..
45
Knotek. O.
655
Kovarski.
LR.
3 2
Krakhmaìyov.
Y.
A
.
? 2
Kral.J. 4-v
Kretschmer. K
-H
.
3o2
Kruger.
Α.,
5. 784. 88
Kuhsch.
U.
ЗМ4.
15
Kuwahara. K
. 563. 641
Kuzuguchi. A
.
2n
Lahres.
M.
6óv
Lau.
VC.
352
LeChanu.
А.4У
Lecoeur.
J
.
4v
Legrand.
Ρ
В..
144
Leonhardt.
Α..
б7
Lepnnce.
Ph..
ІоЗ.
4V4
Lerpv.Ch
. 1)2
Leyland.
Α. 5Τ6.
602.722
Li.
X.
Y.
225
Lieb.
К Р.
165
Liska. D
.
47y
Liu.X.-H.
220
Löffler.F.655
Lohmann.R. 259
Lorenz.
G
.. 302
Lorenz.
H P..
534
Lugscheider.
E..
45
Lund,
B M.
150
Lunk.
Α..
41.
5N.666
Ma, T.C..
193.225
Mahiout. A
,
722
Mainz.
В..
784
Maibet.
В.
554
Marec, J..
103.494
Markowski.J.,33
Martin. J. C.
49
Masui, K..
486
MatL K..
523
Matsuda, Y..
79. 563. 569.691
Marthe»,
В..
259. 593.602.616.
647.722
Matthews.
Α..
517, 576, 602. 722
Mausbach.
M..
770. 825
Mausłłart.J..
126
Mayr,
Р.,
593,639
Metssner.
D.,
334
Metz. M.,
775
Meyer,
M..
126
Mknabkí.J.,499,
505
Michel. H..
9. 29. 132.276. 702
Mmerer. C,
670
Miyaké. S..
294. 753
Mohl.
W..
6
Miihilioff,
L
, 364
Mühling. !.. 755.780
Müller. J.. 380
Müller.
K. G..
825
Müller.
W..
165
Munro,
H. S..
356
Murakawa. M..
753. 759
Musil.
J..
660
Naji.
Α..
49
Nakashima. T..
682
Navinšek.
В..
249
Nieminen.
I..
602
Nitkiewicz.
Z.,
474
Normand.
F.. 103
Novák. R..
264
Novak.
S..
249
Nürnberger.
G..
593
Oecrisner.H.,214
Öesterschulze, E..
394
Ohno.N..307,312,569
Ohte. T..
24
Olbrich.W..831
Oseguera.J..
132
Osîerschulze. E.,
259
Pagny.
!.. 838
Palier. G..
647
Pamler. W,.
364
Petat.
В..
29
Peters.
D..
380
Prender. E..
352
Porsch.
S..
788
Poulek.
V..
660
Poulsen.J.
R..
150
Prajzner,
Α..
33
Ouaeyhaegens, C,
242
Radjabov. T. D..
372
Rangelow,
I. W..4Í2
Rasulov,
P. M..
372
Raub.Ch.J..
185
Remy.
M..
15,29,276
Ricard.
Α.,
9.132
Rickerby,
D. G..
284
Ríckerby, D.
S-,
71,91,583
Rie,
К.-Т.,
37,61.448
Robinson,
Р.
Α..
576
Rohwer.
К. С,
334
Ronkainen. H.,
602. 722
Roos.
J R..
554
Rossnagel.
S. M,
510
Rost,
Α..
290
Roth, S„ 784
Rother.
В.,
780
Rudnicki.J.. 505
Saigoh. M..
307
Saijo,
К..
747
Saker.
Α..
702
Sanders,
F H. M..
85
Sathrum, P.,
816
Saunders.S.
R
J,
91
Schaarschmidt, G..
788
Scharff.W.,775.784.788
Schils.H.W..
185
Schittny. St.
U.,
359
Schmid.
H.,
408
Schmoeckel.D..593
Schnatbaum. F.. 448
Scholze. F.. 788
Schönherr,
M.,
67
Schröder.
В..
319
Schröer,
Α.,
220.625
Schulz,
Α..
639
Schulze.
S..
775
Schüssler,
H..
290
Segner.
J..
733
Sella,
С.
49
Shibuki,
К.,
747
Shigemizu,
T.,
312
Siegel.
J..
780
Sigailo.A.V..539
Simon, C.
29
Sone,
T.,
486
Serensen.
G..
150.696
Souchard-J. P..
454
Sperling,
T..
380
Sridharan. K.,
179
Stals. L.,
242.554
van Stappen,
M.,
242,554
Steinmetz, J„ 802
Stenzel,
О.,
784
Stock,
H.-R..
593.639
Straede.CA.. 150
Suchentrunk.
R.. 1
26
Sugawara,
M.,
24
Sun, Y..
419
Szymanowski, H.,
120
Takase.T.,442
Takatsu, S.,
747
Takeuchi, S.,
759
Tanaka.S.,810
Taniguchi,S.,22O
Taschner,
Ch.,
67
Taube, K.,
795
Telle, R..
185
Tendys.J.,
171
Thoma, K.,
259
Tiziani,
Α.,
727
Tošić,M.M.,469
Tulyaganov, Kh. R.,
372
Tumanov, Y.
N.. 539
Turban. G.,
385
Tuson,
A. T.,
91
Tyczkowski, J.,
120
Obléis,
Α.,
670
Uchida. H. H.,
339
Ulrich,
S..
137
Upadnya, K.,
549
Valvoda, V.,
660
Vieira.
M. T.,
631
Vizethum, F., 45
844
Waldorf,
J.,
214 Wohle,
J.,
37 Yamawaki,
M.,
809
Wailendorf.
T.,
788 Wolf,
E.,
67 Yang, L-Y., 687
Wang,
F.
J-,
225 Wolf, F., 788
Wang. L.,
687 Wolf,
G. K,
220,625 Zalar,A.,249
Wang. Y.,
239 Worzala, F.
J.,
179
Zambón,
Α.,
727
Wang. Y.
К..
225
Zdanowski,
J.,
33
Watanabe.S..753 v.
.
1n, Zdunek, K.,
709
Weber.Th..45
ЙТ
,79
Zhang,
N.,
239
Weigert,
M.,
359
Zhou, J.-K.,
220
Westphal.
Α.,
528
Zhu, H.,
352
Wierzchori.
T..
499. 505
Yagi, M.,
747
Zhu, Y. C,
193
Wilhelm.
T.,
356
Yamaguchi, K.,
809 Zöller,
Α.,
523
Witt,
M.,
7
1
5
Yamauchi, T.,
20
Zou, S.-C,
220
|
| any_adam_object | 1 |
| building | Verbundindex |
| bvnumber | BV005593517 |
| classification_rvk | UP 7550 ZM 7680 |
| classification_tum | FER 786f FER 882f |
| ctrlnum | (OCoLC)187462146 (DE-599)BVBBV005593517 |
| discipline | Physik Fertigungstechnik Werkstoffwissenschaften / Fertigungstechnik |
| format | Conference Proceeding Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1990 Garmisch-Partenkirchen gnd-content |
| genre_facet | Konferenzschrift 1990 Garmisch-Partenkirchen |
| id | DE-604.BV005593517 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:32:03Z |
| institution | BVB |
| institution_GND | (DE-588)3008801-X |
| isbn | 0444892796 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-003503571 |
| oclc_num | 187462146 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-92 DE-703 |
| owner_facet | DE-91 DE-BY-TUM DE-92 DE-703 |
| physical | XIV, 853 S. Ill., graph. Darst. |
| publishDate | 1991 |
| publishDateSearch | 1991 |
| publishDateSort | 1991 |
| publisher | Elsevier |
| record_format | marc |
| spelling | Plasma surface engineering Proceedings of the 2nd International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany, September 10 - 14, 1990 E. Broszeit ... (eds.) PSE '90 Amsterdam u.a. Elsevier 1991 XIV, 853 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben Plasma engineering Congresses Surfaces (Technology) Congresses Plasmatechnik (DE-588)4140353-8 gnd rswk-swf Oberflächenbehandlung (DE-588)4042908-8 gnd rswk-swf Plasmastrahlbearbeitung (DE-588)4136199-4 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1990 Garmisch-Partenkirchen gnd-content Plasmatechnik (DE-588)4140353-8 s Oberflächenbehandlung (DE-588)4042908-8 s DE-604 Plasmastrahlbearbeitung (DE-588)4136199-4 s Broszeit, Erhard Sonstige oth International Conference on Plasma Surface Engineering 2 1990 Garmisch-Partenkirchen Sonstige (DE-588)3008801-X oth Digitalisierung TU Muenchen application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=003503571&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Plasma surface engineering Proceedings of the 2nd International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany, September 10 - 14, 1990 Plasma engineering Congresses Surfaces (Technology) Congresses Plasmatechnik (DE-588)4140353-8 gnd Oberflächenbehandlung (DE-588)4042908-8 gnd Plasmastrahlbearbeitung (DE-588)4136199-4 gnd |
| subject_GND | (DE-588)4140353-8 (DE-588)4042908-8 (DE-588)4136199-4 (DE-588)1071861417 |
| title | Plasma surface engineering Proceedings of the 2nd International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany, September 10 - 14, 1990 |
| title_alt | PSE '90 |
| title_auth | Plasma surface engineering Proceedings of the 2nd International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany, September 10 - 14, 1990 |
| title_exact_search | Plasma surface engineering Proceedings of the 2nd International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany, September 10 - 14, 1990 |
| title_full | Plasma surface engineering Proceedings of the 2nd International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany, September 10 - 14, 1990 E. Broszeit ... (eds.) |
| title_fullStr | Plasma surface engineering Proceedings of the 2nd International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany, September 10 - 14, 1990 E. Broszeit ... (eds.) |
| title_full_unstemmed | Plasma surface engineering Proceedings of the 2nd International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany, September 10 - 14, 1990 E. Broszeit ... (eds.) |
| title_short | Plasma surface engineering |
| title_sort | plasma surface engineering proceedings of the 2nd international conference on plasma surface engineering garmisch partenkirchen germany september 10 14 1990 |
| title_sub | Proceedings of the 2nd International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany, September 10 - 14, 1990 |
| topic | Plasma engineering Congresses Surfaces (Technology) Congresses Plasmatechnik (DE-588)4140353-8 gnd Oberflächenbehandlung (DE-588)4042908-8 gnd Plasmastrahlbearbeitung (DE-588)4136199-4 gnd |
| topic_facet | Plasma engineering Congresses Surfaces (Technology) Congresses Plasmatechnik Oberflächenbehandlung Plasmastrahlbearbeitung Konferenzschrift 1990 Garmisch-Partenkirchen |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=003503571&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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