Research opportunities for plasma processing: proceedings of a workshop, Electric Power Research Institute, Palo Alto, California, USA, December 1 - 3, 1987
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Bibliographic Details
Format: Book
Language:Undetermined
Published: New York u.a. Plenum Press 1989
Series:Plasma chemistry and plasma processing 9,1,Suppl.
Subjects:
Item Description:NT: Research opportunities in plasma processing. - Einzelaufnahme eines Zs.-Heftes
Physical Description:206 S. Ill., graph. Darst.

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