Fundamentals of microelectronics processing:
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Bibliographic Details
Main Author: Lee, Hong H. (Author)
Format: Book
Language:English
Published: New York u.a. McGraw-Hill 1990
Series:McGraw-Hill chemical engineering series
Subjects:
Item Description:Literaturangaben
Physical Description:XVI, 514 S. Ill., graph. Darst.
ISBN:0070370567

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