Excimer laser lithography:
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash.
SPIE Optical Engineering Press
1990
|
| Subjects: | |
| Physical Description: | X, 212 S. Ill., graph. Darst. |
| ISBN: | 0819402729 0819402710 |
Staff View
MARC
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Record in the Search Index
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| author | Jain, Kanti |
| author_facet | Jain, Kanti |
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| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
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| id | DE-604.BV004608260 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:14:54Z |
| institution | BVB |
| isbn | 0819402729 0819402710 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-002830922 |
| oclc_num | 20492182 |
| open_access_boolean | |
| owner | DE-384 DE-355 DE-BY-UBR |
| owner_facet | DE-384 DE-355 DE-BY-UBR |
| physical | X, 212 S. Ill., graph. Darst. |
| publishDate | 1990 |
| publishDateSearch | 1990 |
| publishDateSort | 1990 |
| publisher | SPIE Optical Engineering Press |
| record_format | marc |
| spelling | Jain, Kanti Verfasser aut Excimer laser lithography Kanti Jain Bellingham, Wash. SPIE Optical Engineering Press 1990 X, 212 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Excimer lasers Industrial applications Microlithography Excimerlaser (DE-588)4153300-8 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf Excimerlaser (DE-588)4153300-8 s Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 |
| spellingShingle | Jain, Kanti Excimer laser lithography Excimer lasers Industrial applications Microlithography Excimerlaser (DE-588)4153300-8 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4153300-8 (DE-588)4191584-7 |
| title | Excimer laser lithography |
| title_auth | Excimer laser lithography |
| title_exact_search | Excimer laser lithography |
| title_full | Excimer laser lithography Kanti Jain |
| title_fullStr | Excimer laser lithography Kanti Jain |
| title_full_unstemmed | Excimer laser lithography Kanti Jain |
| title_short | Excimer laser lithography |
| title_sort | excimer laser lithography |
| topic | Excimer lasers Industrial applications Microlithography Excimerlaser (DE-588)4153300-8 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Excimer lasers Industrial applications Microlithography Excimerlaser Lithografie Halbleitertechnologie |
| work_keys_str_mv | AT jainkanti excimerlaserlithography |