APA (7th ed.) Citation

Jain, K. (1990). Excimer laser lithography. SPIE Optical Engineering Press.

Chicago Style (17th ed.) Citation

Jain, Kanti. Excimer Laser Lithography. Bellingham, Wash: SPIE Optical Engineering Press, 1990.

MLA (9th ed.) Citation

Jain, Kanti. Excimer Laser Lithography. SPIE Optical Engineering Press, 1990.

Warning: These citations may not always be 100% accurate.