APA (7th ed.) Citation

Theirich, D. (1991). Ionenstrahlsputterdeposition mehrphasiger, mehrkomponentiger Metalltargets.

Chicago Style (17th ed.) Citation

Theirich, Detlef. Ionenstrahlsputterdeposition Mehrphasiger, Mehrkomponentiger Metalltargets. 1991.

MLA (9th ed.) Citation

Theirich, Detlef. Ionenstrahlsputterdeposition Mehrphasiger, Mehrkomponentiger Metalltargets. 1991.

Warning: These citations may not always be 100% accurate.