Novel silicon based technologies: [proceedings of the NATO Advanced Study Institute on Novel Silicon Based Technologies Boca Raton, Florida, USA 17 - 28 July, 1989]
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Dordrecht u.a.
Kluwer Acad. Publ.
1991
|
| Schriftenreihe: | NATO: [Nato ASI series / E]
193 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XII, 277 S. Ill., graph. Darst. |
| ISBN: | 0792311124 |
Internformat
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| 245 | 1 | 0 | |a Novel silicon based technologies |b [proceedings of the NATO Advanced Study Institute on Novel Silicon Based Technologies Boca Raton, Florida, USA 17 - 28 July, 1989] |c ed. by R. A. Levy |
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Datensatz im Suchindex
| _version_ | 1804118610501697536 |
|---|---|
| adam_text | CONTENTS
List of Contributors
ix
Preface
xi
GaAs on Si: Device Applications
M. van Rossum, J.
De
Boeck,
M.
De
Potter, and G. Borghs
Introduction
1
Substrate Considerations
2
Majority-Carrier Devices
7
Minority-Carrier Devices
11
Conclusions
18
Ion Beam Synthesis in Silicon
A. H. van
Ommen
Introduction
25
The Ion Implantation Process
27
Buried
SÍO2
Layers in Si
28
Buried Monocrystalline C0S12 Layers in Si
44
Conclusions
66
Ion Beam Processing of Chemical Vapor Deposited Silicon Layers
5.
U. Campisano, C.
Spinella,
and F. Priolo
Introduction
71
Ion Beam Effects
71
Epitaxy of Deposited Layers
77
Polycrystal Formation
81
Technology and Devices for Silicon Based Three-Dimensional Circuits
J.
Götzlich
Introduction
87
SD-Technology
89
Device Characteristics
103
Features of SD-Circuits
109
Demonstrators
115
Conclusions
117
Integrated Fabrication of Micromechanical Structures on Silicon
J. C. Greenwood
Introduction
123
Mechanical Properties of Silicon
124
Thermal Properties
126
Fabrication Techniques
126
Etching
127
Anisotropie
Etching
129
Boron Doped Etch Stop
132
Electrochemical Etch Stop
133
Embedded Layers
133
Surface
Microstructures
134
Bonding of Layers
137
Electrostatic Bonding
139
Oxide Bonding
139
Bonding to Metals
140
Conclusion
140
Micromachining of Silicon for Sensors
R. M. Langdon
Introduction
143
Physical Properties of Silicon
144
Transduction Techniques
144
Fabrication Techniques
146
Pressure Sensors
150
Acceleroraeters
153
Microresonator
Sensors
158
Optical
Microresonator
Sensors
166
Conclusions
169
Integrated Photonic Circuits on Silicon
S. Valette,
J.
P. Jadot, P. Gidon,
S. Renard, G.
Grand,
A. Fournier, A. M. Grouillet, P. Phillippe, H. Denis,
E.
Desgranges,
L.
Mulatier, and C. Erbeia
Introduction
173
Hybrid or Monolithic Approach for optoelectronics:
That is the question
174
About the Hybrid Approach Material Competitors
176
Silicon Based Technologies developed at
LETI
179
Planar
and Channel waveguide Properties of
IOS
Technologies
190
Field of Activities
198
Integrated Optical Spectrum Analyser
(IOSA)
199
Integrated Optical Sensors
217
Optical Communication Applications
227
Optical Memories
231
Conclusion
234
Principles and Implementation of Artificial Neural Networks
R. C. Frye and
ЕЛ.
Rietman
Introduction
241
Binary Networks
244
Analog Networks
253
Miscellaneous Networks
260
Future VLSI Networks
261
Conclusions
263
List of Participants
269
Index
273
|
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| id | DE-604.BV004437152 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:13:02Z |
| institution | BVB |
| institution_GND | (DE-588)5034162-5 |
| isbn | 0792311124 |
| language | English |
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| publishDate | 1991 |
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| spelling | Novel silicon based technologies [proceedings of the NATO Advanced Study Institute on Novel Silicon Based Technologies Boca Raton, Florida, USA 17 - 28 July, 1989] ed. by R. A. Levy Dordrecht u.a. Kluwer Acad. Publ. 1991 XII, 277 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier NATO: [Nato ASI series / E] 193 Mikromechanik (DE-588)4205811-9 gnd rswk-swf Siliciumbauelement (DE-588)4181368-6 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content (DE-588)1071861417 Konferenzschrift 1989 Boca Raton Fla. gnd-content Siliciumbauelement (DE-588)4181368-6 s DE-604 Mikroelektronik (DE-588)4039207-7 s Silicium (DE-588)4077445-4 s Mikromechanik (DE-588)4205811-9 s Levy, Roland A. Sonstige oth Advanced Study Institute on Novel Silicon Based Technologies 1989 Boca Raton, Fla. Sonstige (DE-588)5034162-5 oth E] NATO: [Nato ASI series 193 (DE-604)BV000007015 193 Digitalisierung TU Muenchen application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=002752618&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Novel silicon based technologies [proceedings of the NATO Advanced Study Institute on Novel Silicon Based Technologies Boca Raton, Florida, USA 17 - 28 July, 1989] Mikromechanik (DE-588)4205811-9 gnd Siliciumbauelement (DE-588)4181368-6 gnd Silicium (DE-588)4077445-4 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| subject_GND | (DE-588)4205811-9 (DE-588)4181368-6 (DE-588)4077445-4 (DE-588)4039207-7 (DE-588)4143413-4 (DE-588)1071861417 |
| title | Novel silicon based technologies [proceedings of the NATO Advanced Study Institute on Novel Silicon Based Technologies Boca Raton, Florida, USA 17 - 28 July, 1989] |
| title_auth | Novel silicon based technologies [proceedings of the NATO Advanced Study Institute on Novel Silicon Based Technologies Boca Raton, Florida, USA 17 - 28 July, 1989] |
| title_exact_search | Novel silicon based technologies [proceedings of the NATO Advanced Study Institute on Novel Silicon Based Technologies Boca Raton, Florida, USA 17 - 28 July, 1989] |
| title_full | Novel silicon based technologies [proceedings of the NATO Advanced Study Institute on Novel Silicon Based Technologies Boca Raton, Florida, USA 17 - 28 July, 1989] ed. by R. A. Levy |
| title_fullStr | Novel silicon based technologies [proceedings of the NATO Advanced Study Institute on Novel Silicon Based Technologies Boca Raton, Florida, USA 17 - 28 July, 1989] ed. by R. A. Levy |
| title_full_unstemmed | Novel silicon based technologies [proceedings of the NATO Advanced Study Institute on Novel Silicon Based Technologies Boca Raton, Florida, USA 17 - 28 July, 1989] ed. by R. A. Levy |
| title_short | Novel silicon based technologies |
| title_sort | novel silicon based technologies proceedings of the nato advanced study institute on novel silicon based technologies boca raton florida usa 17 28 july 1989 |
| title_sub | [proceedings of the NATO Advanced Study Institute on Novel Silicon Based Technologies Boca Raton, Florida, USA 17 - 28 July, 1989] |
| topic | Mikromechanik (DE-588)4205811-9 gnd Siliciumbauelement (DE-588)4181368-6 gnd Silicium (DE-588)4077445-4 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| topic_facet | Mikromechanik Siliciumbauelement Silicium Mikroelektronik Aufsatzsammlung Konferenzschrift 1989 Boca Raton Fla. |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=002752618&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV000007015 |
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