Optimierung der Strahlungscharakteristik eines Pinchplasmas für die Röntgenlithographie:
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Bibliographic Details
Main Author: Eberle, Jürgen 1947- (Author)
Format: Book
Language:German
Published: 1990
Subjects:
Item Description:Aachen, Techn. Hochsch., Diss., 1990
Physical Description:117 S. graph. Darst.

There is no print copy available.

Interlibrary loan Place Request Caution: Not in THWS collection!