Particle control for semiconductor manufacturing:
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
New York [u.a.]
Dekker
1990
|
| Subjects: | |
| Item Description: | Literaturangaben |
| Physical Description: | XIII, 464 S. graph. Darst. |
| ISBN: | 0824782429 |
Staff View
MARC
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| 245 | 1 | 0 | |a Particle control for semiconductor manufacturing |c R. P. Donovan |
| 264 | 1 | |a New York [u.a.] |b Dekker |c 1990 | |
| 300 | |a XIII, 464 S. |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
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| 500 | |a Literaturangaben | ||
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| 650 | 4 | |a Semiconductors |x Defects | |
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| 700 | 1 | |a Donovan, Robert P. |e Sonstige |4 oth | |
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Record in the Search Index
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|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV004324911 |
| callnumber-first | T - Technology |
| callnumber-label | TK7871 |
| callnumber-raw | TK7871.85 |
| callnumber-search | TK7871.85 |
| callnumber-sort | TK 47871.85 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 4100 |
| classification_tum | ELT 299f |
| ctrlnum | (OCoLC)20800515 (DE-599)BVBBV004324911 |
| dewey-full | 621.381/52 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381/52 |
| dewey-search | 621.381/52 |
| dewey-sort | 3621.381 252 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV004324911 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:11:30Z |
| institution | BVB |
| isbn | 0824782429 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-002689495 |
| oclc_num | 20800515 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-29T DE-11 |
| owner_facet | DE-91 DE-BY-TUM DE-29T DE-11 |
| physical | XIII, 464 S. graph. Darst. |
| publishDate | 1990 |
| publishDateSearch | 1990 |
| publishDateSort | 1990 |
| publisher | Dekker |
| record_format | marc |
| spelling | Particle control for semiconductor manufacturing R. P. Donovan New York [u.a.] Dekker 1990 XIII, 464 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben Particles Semiconductors Defects Semiconductors Design and construction Halbleiter (DE-588)4022993-2 gnd rswk-swf Fertigung (DE-588)4016899-2 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Verunreinigung (DE-588)4188107-2 gnd rswk-swf Reinraumtechnik (DE-588)4177592-2 gnd rswk-swf Fertigungskontrolle (DE-588)4016901-7 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 s Fertigung (DE-588)4016899-2 s Verunreinigung (DE-588)4188107-2 s DE-604 Reinraumtechnik (DE-588)4177592-2 s Halbleiter (DE-588)4022993-2 s Fertigungskontrolle (DE-588)4016901-7 s Donovan, Robert P. Sonstige oth |
| spellingShingle | Particle control for semiconductor manufacturing Particles Semiconductors Defects Semiconductors Design and construction Halbleiter (DE-588)4022993-2 gnd Fertigung (DE-588)4016899-2 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Verunreinigung (DE-588)4188107-2 gnd Reinraumtechnik (DE-588)4177592-2 gnd Fertigungskontrolle (DE-588)4016901-7 gnd |
| subject_GND | (DE-588)4022993-2 (DE-588)4016899-2 (DE-588)4158814-9 (DE-588)4188107-2 (DE-588)4177592-2 (DE-588)4016901-7 |
| title | Particle control for semiconductor manufacturing |
| title_auth | Particle control for semiconductor manufacturing |
| title_exact_search | Particle control for semiconductor manufacturing |
| title_full | Particle control for semiconductor manufacturing R. P. Donovan |
| title_fullStr | Particle control for semiconductor manufacturing R. P. Donovan |
| title_full_unstemmed | Particle control for semiconductor manufacturing R. P. Donovan |
| title_short | Particle control for semiconductor manufacturing |
| title_sort | particle control for semiconductor manufacturing |
| topic | Particles Semiconductors Defects Semiconductors Design and construction Halbleiter (DE-588)4022993-2 gnd Fertigung (DE-588)4016899-2 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Verunreinigung (DE-588)4188107-2 gnd Reinraumtechnik (DE-588)4177592-2 gnd Fertigungskontrolle (DE-588)4016901-7 gnd |
| topic_facet | Particles Semiconductors Defects Semiconductors Design and construction Halbleiter Fertigung Halbleitertechnologie Verunreinigung Reinraumtechnik Fertigungskontrolle |
| work_keys_str_mv | AT donovanrobertp particlecontrolforsemiconductormanufacturing |