Handbook of ion beam processing technology: principles, deposition, film modification and synthesis
Gespeichert in:
Format: | Buch |
---|---|
Sprache: | English |
Veröffentlicht: |
Park Ridge, NJ
Noyes Publ.
1989
|
Schriftenreihe: | Materials science and process technology series
|
Schlagworte: | |
Beschreibung: | XVIII, 438 S. Ill., graph. Darst. |
ISBN: | 081551199X |
Internformat
MARC
LEADER | 00000nam a2200000 c 4500 | ||
---|---|---|---|
001 | BV004290512 | ||
003 | DE-604 | ||
005 | 00000000000000.0 | ||
007 | t | ||
008 | 910313s1989 ad|| |||| 00||| eng d | ||
020 | |a 081551199X |9 0-8155-1199-X | ||
035 | |a (OCoLC)18907337 | ||
035 | |a (DE-599)BVBBV004290512 | ||
040 | |a DE-604 |b ger |e rakddb | ||
041 | 0 | |a eng | |
049 | |a DE-384 |a DE-355 |a DE-29T |a DE-83 |a DE-11 | ||
050 | 0 | |a QC702.7.I55 | |
082 | 0 | |a 621.381/7 |2 19 | |
084 | |a UP 9350 |0 (DE-625)146462: |2 rvk | ||
245 | 1 | 0 | |a Handbook of ion beam processing technology |b principles, deposition, film modification and synthesis |c ed. by Jerome J. Cuomo ... |
264 | 1 | |a Park Ridge, NJ |b Noyes Publ. |c 1989 | |
300 | |a XVIII, 438 S. |b Ill., graph. Darst. | ||
336 | |b txt |2 rdacontent | ||
337 | |b n |2 rdamedia | ||
338 | |b nc |2 rdacarrier | ||
490 | 0 | |a Materials science and process technology series | |
650 | 4 | |a Bombardement ionique - Applications industrielles | |
650 | 7 | |a Bombardement ionique - Applications industrielles |2 ram | |
650 | 4 | |a Ions - Implantation | |
650 | 7 | |a Ions - Implantation |2 ram | |
650 | 4 | |a Ion bombardment |x Industrial applications | |
650 | 4 | |a Ion implantation | |
650 | 0 | 7 | |a Ionenimplantation |0 (DE-588)4027606-5 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Ionenstrahl |0 (DE-588)4162347-2 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Materialbearbeitung |0 (DE-588)4139082-9 |2 gnd |9 rswk-swf |
655 | 7 | |0 (DE-588)4143413-4 |a Aufsatzsammlung |2 gnd-content | |
689 | 0 | 0 | |a Materialbearbeitung |0 (DE-588)4139082-9 |D s |
689 | 0 | 1 | |a Ionenstrahl |0 (DE-588)4162347-2 |D s |
689 | 0 | |5 DE-604 | |
689 | 1 | 0 | |a Ionenimplantation |0 (DE-588)4027606-5 |D s |
689 | 1 | |5 DE-604 | |
689 | 2 | 0 | |a Ionenstrahl |0 (DE-588)4162347-2 |D s |
689 | 2 | |5 DE-604 | |
700 | 1 | |a Cuomo, Jerome J. |e Sonstige |4 oth | |
999 | |a oai:aleph.bib-bvb.de:BVB01-002668856 |
Datensatz im Suchindex
_version_ | 1804118483357663232 |
---|---|
any_adam_object | |
building | Verbundindex |
bvnumber | BV004290512 |
callnumber-first | Q - Science |
callnumber-label | QC702 |
callnumber-raw | QC702.7.I55 |
callnumber-search | QC702.7.I55 |
callnumber-sort | QC 3702.7 I55 |
callnumber-subject | QC - Physics |
classification_rvk | UP 9350 |
ctrlnum | (OCoLC)18907337 (DE-599)BVBBV004290512 |
dewey-full | 621.381/7 |
dewey-hundreds | 600 - Technology (Applied sciences) |
dewey-ones | 621 - Applied physics |
dewey-raw | 621.381/7 |
dewey-search | 621.381/7 |
dewey-sort | 3621.381 17 |
dewey-tens | 620 - Engineering and allied operations |
discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
format | Book |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01843nam a2200505 c 4500</leader><controlfield tag="001">BV004290512</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">910313s1989 ad|| |||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">081551199X</subfield><subfield code="9">0-8155-1199-X</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)18907337</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV004290512</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-384</subfield><subfield code="a">DE-355</subfield><subfield code="a">DE-29T</subfield><subfield code="a">DE-83</subfield><subfield code="a">DE-11</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">QC702.7.I55</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.381/7</subfield><subfield code="2">19</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 9350</subfield><subfield code="0">(DE-625)146462:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Handbook of ion beam processing technology</subfield><subfield code="b">principles, deposition, film modification and synthesis</subfield><subfield code="c">ed. by Jerome J. Cuomo ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Park Ridge, NJ</subfield><subfield code="b">Noyes Publ.</subfield><subfield code="c">1989</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XVIII, 438 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Materials science and process technology series</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Bombardement ionique - Applications industrielles</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Bombardement ionique - Applications industrielles</subfield><subfield code="2">ram</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Ions - Implantation</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Ions - Implantation</subfield><subfield code="2">ram</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Ion bombardment</subfield><subfield code="x">Industrial applications</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Ion implantation</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ionenimplantation</subfield><subfield code="0">(DE-588)4027606-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ionenstrahl</subfield><subfield code="0">(DE-588)4162347-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Materialbearbeitung</subfield><subfield code="0">(DE-588)4139082-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4143413-4</subfield><subfield code="a">Aufsatzsammlung</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Materialbearbeitung</subfield><subfield code="0">(DE-588)4139082-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Ionenstrahl</subfield><subfield code="0">(DE-588)4162347-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Ionenimplantation</subfield><subfield code="0">(DE-588)4027606-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="2" ind2="0"><subfield code="a">Ionenstrahl</subfield><subfield code="0">(DE-588)4162347-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Cuomo, Jerome J.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-002668856</subfield></datafield></record></collection> |
genre | (DE-588)4143413-4 Aufsatzsammlung gnd-content |
genre_facet | Aufsatzsammlung |
id | DE-604.BV004290512 |
illustrated | Illustrated |
indexdate | 2024-07-09T16:11:01Z |
institution | BVB |
isbn | 081551199X |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-002668856 |
oclc_num | 18907337 |
open_access_boolean | |
owner | DE-384 DE-355 DE-BY-UBR DE-29T DE-83 DE-11 |
owner_facet | DE-384 DE-355 DE-BY-UBR DE-29T DE-83 DE-11 |
physical | XVIII, 438 S. Ill., graph. Darst. |
publishDate | 1989 |
publishDateSearch | 1989 |
publishDateSort | 1989 |
publisher | Noyes Publ. |
record_format | marc |
series2 | Materials science and process technology series |
spelling | Handbook of ion beam processing technology principles, deposition, film modification and synthesis ed. by Jerome J. Cuomo ... Park Ridge, NJ Noyes Publ. 1989 XVIII, 438 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials science and process technology series Bombardement ionique - Applications industrielles Bombardement ionique - Applications industrielles ram Ions - Implantation Ions - Implantation ram Ion bombardment Industrial applications Ion implantation Ionenimplantation (DE-588)4027606-5 gnd rswk-swf Ionenstrahl (DE-588)4162347-2 gnd rswk-swf Materialbearbeitung (DE-588)4139082-9 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Materialbearbeitung (DE-588)4139082-9 s Ionenstrahl (DE-588)4162347-2 s DE-604 Ionenimplantation (DE-588)4027606-5 s Cuomo, Jerome J. Sonstige oth |
spellingShingle | Handbook of ion beam processing technology principles, deposition, film modification and synthesis Bombardement ionique - Applications industrielles Bombardement ionique - Applications industrielles ram Ions - Implantation Ions - Implantation ram Ion bombardment Industrial applications Ion implantation Ionenimplantation (DE-588)4027606-5 gnd Ionenstrahl (DE-588)4162347-2 gnd Materialbearbeitung (DE-588)4139082-9 gnd |
subject_GND | (DE-588)4027606-5 (DE-588)4162347-2 (DE-588)4139082-9 (DE-588)4143413-4 |
title | Handbook of ion beam processing technology principles, deposition, film modification and synthesis |
title_auth | Handbook of ion beam processing technology principles, deposition, film modification and synthesis |
title_exact_search | Handbook of ion beam processing technology principles, deposition, film modification and synthesis |
title_full | Handbook of ion beam processing technology principles, deposition, film modification and synthesis ed. by Jerome J. Cuomo ... |
title_fullStr | Handbook of ion beam processing technology principles, deposition, film modification and synthesis ed. by Jerome J. Cuomo ... |
title_full_unstemmed | Handbook of ion beam processing technology principles, deposition, film modification and synthesis ed. by Jerome J. Cuomo ... |
title_short | Handbook of ion beam processing technology |
title_sort | handbook of ion beam processing technology principles deposition film modification and synthesis |
title_sub | principles, deposition, film modification and synthesis |
topic | Bombardement ionique - Applications industrielles Bombardement ionique - Applications industrielles ram Ions - Implantation Ions - Implantation ram Ion bombardment Industrial applications Ion implantation Ionenimplantation (DE-588)4027606-5 gnd Ionenstrahl (DE-588)4162347-2 gnd Materialbearbeitung (DE-588)4139082-9 gnd |
topic_facet | Bombardement ionique - Applications industrielles Ions - Implantation Ion bombardment Industrial applications Ion implantation Ionenimplantation Ionenstrahl Materialbearbeitung Aufsatzsammlung |
work_keys_str_mv | AT cuomojeromej handbookofionbeamprocessingtechnologyprinciplesdepositionfilmmodificationandsynthesis |