Mayer, J. W., Eriksson, L., & Davies, J. A. (1983). Ion implantation in semiconductors: Silicon and germanium. Acad. Pr.
Chicago Style (17th ed.) CitationMayer, James W., Lennart Eriksson, and John A. Davies. Ion Implantation in Semiconductors: Silicon and Germanium. New York u.a: Acad. Pr, 1983.
MLA (9th ed.) CitationMayer, James W., et al. Ion Implantation in Semiconductors: Silicon and Germanium. Acad. Pr, 1983.
Warning: These citations may not always be 100% accurate.