Ion implantation: equipement and techniques ; proceedings of the fourth international conference Berchtesgaden, Fed. Rep. of Germany, September 13 - 17, 1982
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Berlin u.a.
Springer
1983
|
| Series: | Springer series in electrophysics
11 |
| Subjects: | |
| Physical Description: | X, 556 S. Ill., graph. Darst. |
| ISBN: | 3540124918 0387124918 |
Staff View
MARC
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| genre_facet | Konferenzschrift 1982 Berchtesgaden |
| id | DE-604.BV004282283 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:10:53Z |
| institution | BVB |
| isbn | 3540124918 0387124918 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-002663173 |
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| physical | X, 556 S. Ill., graph. Darst. |
| publishDate | 1983 |
| publishDateSearch | 1983 |
| publishDateSort | 1983 |
| publisher | Springer |
| record_format | marc |
| series2 | Springer series in electrophysics |
| spelling | Ion implantation equipement and techniques ; proceedings of the fourth international conference Berchtesgaden, Fed. Rep. of Germany, September 13 - 17, 1982 ed.: H. Ryssel ... Berlin u.a. Springer 1983 X, 556 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Springer series in electrophysics 11 Ions - Implantation - Congrès Semiconducteurs - Dopage - Congrès Ion implantation Congresses Semiconductor doping Congresses Ionenimplantation (DE-588)4027606-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1982 Berchtesgaden gnd-content Ionenimplantation (DE-588)4027606-5 s DE-604 Ryssel, Heiner 1941- Sonstige (DE-588)108187802 oth |
| spellingShingle | Ion implantation equipement and techniques ; proceedings of the fourth international conference Berchtesgaden, Fed. Rep. of Germany, September 13 - 17, 1982 Ions - Implantation - Congrès Semiconducteurs - Dopage - Congrès Ion implantation Congresses Semiconductor doping Congresses Ionenimplantation (DE-588)4027606-5 gnd |
| subject_GND | (DE-588)4027606-5 (DE-588)1071861417 |
| title | Ion implantation equipement and techniques ; proceedings of the fourth international conference Berchtesgaden, Fed. Rep. of Germany, September 13 - 17, 1982 |
| title_auth | Ion implantation equipement and techniques ; proceedings of the fourth international conference Berchtesgaden, Fed. Rep. of Germany, September 13 - 17, 1982 |
| title_exact_search | Ion implantation equipement and techniques ; proceedings of the fourth international conference Berchtesgaden, Fed. Rep. of Germany, September 13 - 17, 1982 |
| title_full | Ion implantation equipement and techniques ; proceedings of the fourth international conference Berchtesgaden, Fed. Rep. of Germany, September 13 - 17, 1982 ed.: H. Ryssel ... |
| title_fullStr | Ion implantation equipement and techniques ; proceedings of the fourth international conference Berchtesgaden, Fed. Rep. of Germany, September 13 - 17, 1982 ed.: H. Ryssel ... |
| title_full_unstemmed | Ion implantation equipement and techniques ; proceedings of the fourth international conference Berchtesgaden, Fed. Rep. of Germany, September 13 - 17, 1982 ed.: H. Ryssel ... |
| title_short | Ion implantation |
| title_sort | ion implantation equipement and techniques proceedings of the fourth international conference berchtesgaden fed rep of germany september 13 17 1982 |
| title_sub | equipement and techniques ; proceedings of the fourth international conference Berchtesgaden, Fed. Rep. of Germany, September 13 - 17, 1982 |
| topic | Ions - Implantation - Congrès Semiconducteurs - Dopage - Congrès Ion implantation Congresses Semiconductor doping Congresses Ionenimplantation (DE-588)4027606-5 gnd |
| topic_facet | Ions - Implantation - Congrès Semiconducteurs - Dopage - Congrès Ion implantation Congresses Semiconductor doping Congresses Ionenimplantation Konferenzschrift 1982 Berchtesgaden |
| work_keys_str_mv | AT rysselheiner ionimplantationequipementandtechniquesproceedingsofthefourthinternationalconferenceberchtesgadenfedrepofgermanyseptember13171982 |