Mikromechanik: Mikrofertigung mit Methoden der Halbleitertechnologie
Saved in:
| Format: | Book |
|---|---|
| Language: | German |
| Published: |
Berlin [u.a.]
Springer
1991
|
| Edition: | Unveränd. Nachdr. der 1. Aufl. |
| Subjects: | |
| Item Description: | Literaturangaben |
| Physical Description: | XVII, 501 S. Ill., graph. Darst. |
| ISBN: | 3540187219 0387187219 |
Staff View
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| 245 | 1 | 0 | |a Mikromechanik |b Mikrofertigung mit Methoden der Halbleitertechnologie |c Anton Heuberger (Hrsg.) |
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Record in the Search Index
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| dewey-full | 621.381/52 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381/52 |
| dewey-search | 621.381/52 |
| dewey-sort | 3621.381 252 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Handwerk und Gewerbe / Verschiedene Technologien Fertigungstechnik Elektrotechnik / Elektronik / Nachrichtentechnik Maschinenbau |
| edition | Unveränd. Nachdr. der 1. Aufl. |
| format | Book |
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| id | DE-604.BV004191421 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:09:37Z |
| institution | BVB |
| isbn | 3540187219 0387187219 |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-002611297 |
| oclc_num | 60019937 832739597 |
| open_access_boolean | |
| owner | DE-384 DE-91G DE-BY-TUM DE-91 DE-BY-TUM DE-Aug4 DE-1046 DE-1102 DE-83 DE-634 DE-11 DE-188 |
| owner_facet | DE-384 DE-91G DE-BY-TUM DE-91 DE-BY-TUM DE-Aug4 DE-1046 DE-1102 DE-83 DE-634 DE-11 DE-188 |
| physical | XVII, 501 S. Ill., graph. Darst. |
| publishDate | 1991 |
| publishDateSearch | 1991 |
| publishDateSort | 1991 |
| publisher | Springer |
| record_format | marc |
| spelling | Mikromechanik Mikrofertigung mit Methoden der Halbleitertechnologie Anton Heuberger (Hrsg.) Unveränd. Nachdr. der 1. Aufl. Berlin [u.a.] Springer 1991 XVII, 501 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben Mikromechanik (DE-588)4205811-9 gnd rswk-swf Mikromechanik (DE-588)4205811-9 s DE-604 Heuberger, Anton Sonstige oth |
| spellingShingle | Mikromechanik Mikrofertigung mit Methoden der Halbleitertechnologie Mikromechanik (DE-588)4205811-9 gnd |
| subject_GND | (DE-588)4205811-9 |
| title | Mikromechanik Mikrofertigung mit Methoden der Halbleitertechnologie |
| title_auth | Mikromechanik Mikrofertigung mit Methoden der Halbleitertechnologie |
| title_exact_search | Mikromechanik Mikrofertigung mit Methoden der Halbleitertechnologie |
| title_full | Mikromechanik Mikrofertigung mit Methoden der Halbleitertechnologie Anton Heuberger (Hrsg.) |
| title_fullStr | Mikromechanik Mikrofertigung mit Methoden der Halbleitertechnologie Anton Heuberger (Hrsg.) |
| title_full_unstemmed | Mikromechanik Mikrofertigung mit Methoden der Halbleitertechnologie Anton Heuberger (Hrsg.) |
| title_short | Mikromechanik |
| title_sort | mikromechanik mikrofertigung mit methoden der halbleitertechnologie |
| title_sub | Mikrofertigung mit Methoden der Halbleitertechnologie |
| topic | Mikromechanik (DE-588)4205811-9 gnd |
| topic_facet | Mikromechanik |
| work_keys_str_mv | AT heubergeranton mikromechanikmikrofertigungmitmethodenderhalbleitertechnologie |