Phosphor-Diffusions-Gettern von Kobalt in Silizium:
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | German |
| Published: |
1990
|
| Subjects: | |
| Physical Description: | 100 S. Ill., graph. Darst. |
Staff View
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV004189823 | ||
| 003 | DE-604 | ||
| 005 | 19911023 | ||
| 007 | t | ||
| 008 | 901115s1990 gw ad|| m||| 00||| ger d | ||
| 035 | |a (OCoLC)613677240 | ||
| 035 | |a (DE-599)BVBBV004189823 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a ger | |
| 044 | |a gw |c DE | ||
| 049 | |a DE-19 |a DE-12 |a DE-384 |a DE-703 |a DE-91 |a DE-355 |a DE-83 |a DE-11 |a DE-188 | ||
| 084 | |a ELT 290d |2 stub | ||
| 084 | |a PHY 696d |2 stub | ||
| 100 | 1 | |a Kühnapfel, Reinhold |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Phosphor-Diffusions-Gettern von Kobalt in Silizium |c vorgelegt von Reinhold Kühnapfel |
| 264 | 1 | |c 1990 | |
| 300 | |a 100 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 502 | |a Göttingen, Univ., Diss., 1990 | ||
| 650 | 0 | 7 | |a Cobaltatom |0 (DE-588)4210180-3 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Silicium |0 (DE-588)4077445-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Getterung |0 (DE-588)4157223-3 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Cobalt |0 (DE-588)4070047-1 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 655 | 7 | |a Phosphordiffusion |2 gnd |9 rswk-swf | |
| 689 | 0 | 0 | |a Getterung |0 (DE-588)4157223-3 |D s |
| 689 | 0 | 1 | |a Cobalt |0 (DE-588)4070047-1 |D s |
| 689 | 0 | 2 | |a Silicium |0 (DE-588)4077445-4 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Cobaltatom |0 (DE-588)4210180-3 |D s |
| 689 | 1 | 1 | |a Getterung |0 (DE-588)4157223-3 |D s |
| 689 | 1 | 2 | |a Phosphordiffusion |A f |
| 689 | 1 | 3 | |a Silicium |0 (DE-588)4077445-4 |D s |
| 689 | 1 | |5 DE-604 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-002610204 | ||
Record in the Search Index
| _version_ | 1804118394290569216 |
|---|---|
| any_adam_object | |
| author | Kühnapfel, Reinhold |
| author_facet | Kühnapfel, Reinhold |
| author_role | aut |
| author_sort | Kühnapfel, Reinhold |
| author_variant | r k rk |
| building | Verbundindex |
| bvnumber | BV004189823 |
| classification_tum | ELT 290d PHY 696d |
| ctrlnum | (OCoLC)613677240 (DE-599)BVBBV004189823 |
| discipline | Physik Elektrotechnik |
| format | Thesis Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01589nam a2200469 c 4500</leader><controlfield tag="001">BV004189823</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">19911023 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">901115s1990 gw ad|| m||| 00||| ger d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)613677240</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV004189823</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">ger</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">gw</subfield><subfield code="c">DE</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-19</subfield><subfield code="a">DE-12</subfield><subfield code="a">DE-384</subfield><subfield code="a">DE-703</subfield><subfield code="a">DE-91</subfield><subfield code="a">DE-355</subfield><subfield code="a">DE-83</subfield><subfield code="a">DE-11</subfield><subfield code="a">DE-188</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 290d</subfield><subfield code="2">stub</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">PHY 696d</subfield><subfield code="2">stub</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Kühnapfel, Reinhold</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Phosphor-Diffusions-Gettern von Kobalt in Silizium</subfield><subfield code="c">vorgelegt von Reinhold Kühnapfel</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">1990</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">100 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="502" ind1=" " ind2=" "><subfield code="a">Göttingen, Univ., Diss., 1990</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Cobaltatom</subfield><subfield code="0">(DE-588)4210180-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Getterung</subfield><subfield code="0">(DE-588)4157223-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Cobalt</subfield><subfield code="0">(DE-588)4070047-1</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="a">Phosphordiffusion</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Getterung</subfield><subfield code="0">(DE-588)4157223-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Cobalt</subfield><subfield code="0">(DE-588)4070047-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Cobaltatom</subfield><subfield code="0">(DE-588)4210180-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="1"><subfield code="a">Getterung</subfield><subfield code="0">(DE-588)4157223-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="2"><subfield code="a">Phosphordiffusion</subfield><subfield code="A">f</subfield></datafield><datafield tag="689" ind1="1" ind2="3"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-002610204</subfield></datafield></record></collection> |
| genre | (DE-588)4113937-9 Hochschulschrift gnd-content Phosphordiffusion gnd |
| genre_facet | Hochschulschrift Phosphordiffusion |
| id | DE-604.BV004189823 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:09:36Z |
| institution | BVB |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-002610204 |
| oclc_num | 613677240 |
| open_access_boolean | |
| owner | DE-19 DE-BY-UBM DE-12 DE-384 DE-703 DE-91 DE-BY-TUM DE-355 DE-BY-UBR DE-83 DE-11 DE-188 |
| owner_facet | DE-19 DE-BY-UBM DE-12 DE-384 DE-703 DE-91 DE-BY-TUM DE-355 DE-BY-UBR DE-83 DE-11 DE-188 |
| physical | 100 S. Ill., graph. Darst. |
| publishDate | 1990 |
| publishDateSearch | 1990 |
| publishDateSort | 1990 |
| record_format | marc |
| spelling | Kühnapfel, Reinhold Verfasser aut Phosphor-Diffusions-Gettern von Kobalt in Silizium vorgelegt von Reinhold Kühnapfel 1990 100 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Göttingen, Univ., Diss., 1990 Cobaltatom (DE-588)4210180-3 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf Getterung (DE-588)4157223-3 gnd rswk-swf Cobalt (DE-588)4070047-1 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Phosphordiffusion gnd rswk-swf Getterung (DE-588)4157223-3 s Cobalt (DE-588)4070047-1 s Silicium (DE-588)4077445-4 s DE-604 Cobaltatom (DE-588)4210180-3 s Phosphordiffusion f |
| spellingShingle | Kühnapfel, Reinhold Phosphor-Diffusions-Gettern von Kobalt in Silizium Cobaltatom (DE-588)4210180-3 gnd Silicium (DE-588)4077445-4 gnd Getterung (DE-588)4157223-3 gnd Cobalt (DE-588)4070047-1 gnd |
| subject_GND | (DE-588)4210180-3 (DE-588)4077445-4 (DE-588)4157223-3 (DE-588)4070047-1 (DE-588)4113937-9 |
| title | Phosphor-Diffusions-Gettern von Kobalt in Silizium |
| title_auth | Phosphor-Diffusions-Gettern von Kobalt in Silizium |
| title_exact_search | Phosphor-Diffusions-Gettern von Kobalt in Silizium |
| title_full | Phosphor-Diffusions-Gettern von Kobalt in Silizium vorgelegt von Reinhold Kühnapfel |
| title_fullStr | Phosphor-Diffusions-Gettern von Kobalt in Silizium vorgelegt von Reinhold Kühnapfel |
| title_full_unstemmed | Phosphor-Diffusions-Gettern von Kobalt in Silizium vorgelegt von Reinhold Kühnapfel |
| title_short | Phosphor-Diffusions-Gettern von Kobalt in Silizium |
| title_sort | phosphor diffusions gettern von kobalt in silizium |
| topic | Cobaltatom (DE-588)4210180-3 gnd Silicium (DE-588)4077445-4 gnd Getterung (DE-588)4157223-3 gnd Cobalt (DE-588)4070047-1 gnd |
| topic_facet | Cobaltatom Silicium Getterung Cobalt Hochschulschrift Phosphordiffusion |
| work_keys_str_mv | AT kuhnapfelreinhold phosphordiffusionsgetternvonkobaltinsilizium |