Integrated circuit fabrication technology:
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Bibliographic Details
Main Author: Elliott, David J. (Author)
Format: Book
Language:English
Published: New York u.a. McGraw-Hill 1989
Edition:2. ed.
Subjects:
Item Description:Literaturangaben
Physical Description:XVI, 540 S. Ill., graph. Darst.
ISBN:0070193398

There is no print copy available.

Interlibrary loan Place Request Caution: Not in THWS collection!