Journal of vacuum science & technology: the official journal of the American Vacuum Society
Saved in:
| New Title: | Journal of vacuum science and technology / A. A, Vacuum, surfaces, & films Journal of vacuum science and technology / B. B, Nanotechnology & microelectronics |
|---|---|
| Format: | Journal |
| Language: | English |
| Published: |
New York, NY
Inst.
1964-1982
|
| Subjects: | |
| Published: | 1.1964 - 21.1982 |
| ISSN: | 0022-5355 2331-1754 0734-2101 2166-2746 |
Staff View
MARC
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| 210 | 1 | 0 | |a J. Vac. Sci. Technol. |2 din1502 |
| 210 | 1 | 0 | |a J of Vacuum Sci. Technol. |2 din1502 |
| 210 | 1 | 0 | |a J. Vac. Sci. & Technol. (USA) |2 din1502 |
| 245 | 1 | 0 | |a Journal of vacuum science & technology |b the official journal of the American Vacuum Society |c publ. by the American Institute of Physics |
| 246 | 1 | 3 | |a The journal of vacuum science and technology |
| 247 | 1 | 0 | |a The journal of vacuum science and technology |f Hauptsacht. bis 9.1972 |
| 264 | 3 | 1 | |a New York, NY |b Inst. |c 1964-1982 |
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
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| 362 | 0 | |a 1.1964 - 21.1982 | |
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| 710 | 2 | |a American Vacuum Society |0 (DE-588)867-9 |4 isb | |
| 776 | 0 | 8 | |i Erscheint auch als |n Online-Ausgabe |t Journal of vacuum science & technology |d New York, NY : Inst., 1964-1982 |h Online-Ressource |x 2331-1754 |w (DE-604)BV021251400 |
| 785 | 0 | 0 | |i Forts.: |t Journal of vacuum science and technology / A. A, Vacuum, surfaces, & films |d New York, NY : Inst., 1983- |x 0734-2101 |w (DE-604)BV002583288 |
| 785 | 0 | 0 | |i Forts.: |t Journal of vacuum science and technology / B. B, Nanotechnology & microelectronics |d New York, NY : Inst., 1983- |x 2166-2746 |w (DE-604)BV002583087 |
Record in the Search Index
| _version_ | 1805077372688400384 |
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| adam_text | |
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV002536507 |
| classification_tum | MAS 970z |
| ctrlnum | 219313-9 (OCoLC)631715014 (DE-599)ZDB219313-9 |
| dateSpan | 1.1964 - 21.1982 |
| discipline | Maschinenbau |
| format | Journal |
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| genre | (DE-588)4067488-5 Zeitschrift gnd-content |
| genre_facet | Zeitschrift |
| id | DE-604.BV002536507 |
| illustrated | Illustrated |
| indexdate | 2024-07-20T06:12:09Z |
| institution | BVB |
| institution_GND | (DE-588)867-9 |
| issn | 0022-5355 2331-1754 0734-2101 2166-2746 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001632150 |
| oclc_num | 631715014 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-19 DE-BY-UBM DE-20 DE-29T DE-706 DE-522 DE-83 DE-11 DE-188 DE-210 |
| owner_facet | DE-91 DE-BY-TUM DE-19 DE-BY-UBM DE-20 DE-29T DE-706 DE-522 DE-83 DE-11 DE-188 DE-210 |
| publishDate | 1964 |
| publishDateSearch | 1964 1965 1966 1967 1968 1969 1970 1971 1972 1973 1974 1975 1976 1977 1978 1979 1980 1981 1982 |
| publishDateSort | 1982 |
| publisher | Inst. |
| record_format | marc |
| spelling | J. Vac. Sci. Technol. din1502 J of Vacuum Sci. Technol. din1502 J. Vac. Sci. & Technol. (USA) din1502 Journal of vacuum science & technology the official journal of the American Vacuum Society publ. by the American Institute of Physics The journal of vacuum science and technology The journal of vacuum science and technology Hauptsacht. bis 9.1972 New York, NY Inst. 1964-1982 txt rdacontent n rdamedia nc rdacarrier 1.1964 - 21.1982 1.1\x 1 1964 1.2\x 21 1982 Vakuumtechnik (DE-588)4062270-8 gnd rswk-swf (DE-588)4067488-5 Zeitschrift gnd-content Vakuumtechnik (DE-588)4062270-8 s DE-604 American Vacuum Society (DE-588)867-9 isb Erscheint auch als Online-Ausgabe Journal of vacuum science & technology New York, NY : Inst., 1964-1982 Online-Ressource 2331-1754 (DE-604)BV021251400 Forts.: Journal of vacuum science and technology / A. A, Vacuum, surfaces, & films New York, NY : Inst., 1983- 0734-2101 (DE-604)BV002583288 Forts.: Journal of vacuum science and technology / B. B, Nanotechnology & microelectronics New York, NY : Inst., 1983- 2166-2746 (DE-604)BV002583087 |
| spellingShingle | Journal of vacuum science & technology the official journal of the American Vacuum Society Vakuumtechnik (DE-588)4062270-8 gnd |
| subject_GND | (DE-588)4062270-8 (DE-588)4067488-5 |
| title | Journal of vacuum science & technology the official journal of the American Vacuum Society |
| title_alt | The journal of vacuum science and technology |
| title_auth | Journal of vacuum science & technology the official journal of the American Vacuum Society |
| title_exact_search | Journal of vacuum science & technology the official journal of the American Vacuum Society |
| title_full | Journal of vacuum science & technology the official journal of the American Vacuum Society publ. by the American Institute of Physics |
| title_fullStr | Journal of vacuum science & technology the official journal of the American Vacuum Society publ. by the American Institute of Physics |
| title_full_unstemmed | Journal of vacuum science & technology the official journal of the American Vacuum Society publ. by the American Institute of Physics |
| title_new | Journal of vacuum science and technology / A. A, Vacuum, surfaces, & films Journal of vacuum science and technology / B. B, Nanotechnology & microelectronics |
| title_short | Journal of vacuum science & technology |
| title_sort | journal of vacuum science technology the official journal of the american vacuum society |
| title_sub | the official journal of the American Vacuum Society |
| topic | Vakuumtechnik (DE-588)4062270-8 gnd |
| topic_facet | Vakuumtechnik Zeitschrift |
| work_keys_str_mv | AT americanvacuumsociety journalofvacuumsciencetechnologytheofficialjournaloftheamericanvacuumsociety AT americanvacuumsociety thejournalofvacuumscienceandtechnology |
| zdb_num | 219313-9 (DE-599)ZDB219313-9 |