Investigations on an RF-plasma related to plasma etching:
Saved in:
| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
1987
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| Subjects: | |
| Item Description: | Zsfassung in niederländ. Sprache. - Eindhoven, Techn. Univ., Diss. |
| Physical Description: | 116 S. graph. Darst. |
Staff View
MARC
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Record in the Search Index
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| any_adam_object | |
| author | Bisschops, Theodorus H. |
| author_facet | Bisschops, Theodorus H. |
| author_role | aut |
| author_sort | Bisschops, Theodorus H. |
| author_variant | t h b th thb |
| building | Verbundindex |
| bvnumber | BV002273491 |
| classification_tum | PHY 571d ELT 299d |
| ctrlnum | (OCoLC)612195957 (DE-599)BVBBV002273491 |
| discipline | Physik Elektrotechnik |
| format | Book |
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| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV002273491 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:43:10Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001493658 |
| oclc_num | 612195957 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-355 DE-BY-UBR |
| owner_facet | DE-91 DE-BY-TUM DE-355 DE-BY-UBR |
| physical | 116 S. graph. Darst. |
| publishDate | 1987 |
| publishDateSearch | 1987 |
| publishDateSort | 1987 |
| record_format | marc |
| spelling | Bisschops, Theodorus H. Verfasser aut Investigations on an RF-plasma related to plasma etching door Theodorus Hubertus Josephus Bisschops 1987 116 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Zsfassung in niederländ. Sprache. - Eindhoven, Techn. Univ., Diss. Mikrowellenplasmabrenner (DE-588)4169889-7 gnd rswk-swf Tetrafluormethan (DE-588)4184884-6 gnd rswk-swf Plasmaätzen (DE-588)4174821-9 gnd rswk-swf Integrierte Schaltung (DE-588)4027242-4 gnd rswk-swf Plasma (DE-588)4046249-3 gnd rswk-swf Radiowelle (DE-588)4176841-3 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Tetrafluormethan (DE-588)4184884-6 s Plasma (DE-588)4046249-3 s Radiowelle (DE-588)4176841-3 s Plasmaätzen (DE-588)4174821-9 s DE-604 Mikrowellenplasmabrenner (DE-588)4169889-7 s Integrierte Schaltung (DE-588)4027242-4 s |
| spellingShingle | Bisschops, Theodorus H. Investigations on an RF-plasma related to plasma etching Mikrowellenplasmabrenner (DE-588)4169889-7 gnd Tetrafluormethan (DE-588)4184884-6 gnd Plasmaätzen (DE-588)4174821-9 gnd Integrierte Schaltung (DE-588)4027242-4 gnd Plasma (DE-588)4046249-3 gnd Radiowelle (DE-588)4176841-3 gnd |
| subject_GND | (DE-588)4169889-7 (DE-588)4184884-6 (DE-588)4174821-9 (DE-588)4027242-4 (DE-588)4046249-3 (DE-588)4176841-3 (DE-588)4113937-9 |
| title | Investigations on an RF-plasma related to plasma etching |
| title_auth | Investigations on an RF-plasma related to plasma etching |
| title_exact_search | Investigations on an RF-plasma related to plasma etching |
| title_full | Investigations on an RF-plasma related to plasma etching door Theodorus Hubertus Josephus Bisschops |
| title_fullStr | Investigations on an RF-plasma related to plasma etching door Theodorus Hubertus Josephus Bisschops |
| title_full_unstemmed | Investigations on an RF-plasma related to plasma etching door Theodorus Hubertus Josephus Bisschops |
| title_short | Investigations on an RF-plasma related to plasma etching |
| title_sort | investigations on an rf plasma related to plasma etching |
| topic | Mikrowellenplasmabrenner (DE-588)4169889-7 gnd Tetrafluormethan (DE-588)4184884-6 gnd Plasmaätzen (DE-588)4174821-9 gnd Integrierte Schaltung (DE-588)4027242-4 gnd Plasma (DE-588)4046249-3 gnd Radiowelle (DE-588)4176841-3 gnd |
| topic_facet | Mikrowellenplasmabrenner Tetrafluormethan Plasmaätzen Integrierte Schaltung Plasma Radiowelle Hochschulschrift |
| work_keys_str_mv | AT bisschopstheodorush investigationsonanrfplasmarelatedtoplasmaetching |