Polycrystalline silicon for integrated circuit applications:
Saved in:
Bibliographic Details
Main Author: Kamins, Theodore I. (Author)
Format: Book
Language:English
Published: Boston [u.a.] Kluwer Acad. Publ. 1988
Series:The Kluwer international series in engineering and computer science 45
Subjects:
Item Description:Später u.d.T.: Kamins, Theodore I.: Polycrystalline silicon for integrated circuits and displays
Physical Description:XII, 290 S. Ill., graph. Darst.
ISBN:0898382599

There is no print copy available.

Interlibrary loan Place Request Caution: Not in THWS collection!