APA-Zitierstil (7. Ausg.)

Moreau, W. M. (1988). Semiconductor lithography: Principles, practices, and materials. Plenum Press.

Chicago-Zitierstil (17. Ausg.)

Moreau, Wayne M. Semiconductor Lithography: Principles, Practices, and Materials. New York [u.a.]: Plenum Press, 1988.

MLA-Zitierstil (9. Ausg.)

Moreau, Wayne M. Semiconductor Lithography: Principles, Practices, and Materials. Plenum Press, 1988.