Introduction to microelectronic fabrication:
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Reading, Mass.
Addison-Wesley
1988
|
| Series: | Modular series on solid state devices.
5. |
| Subjects: | |
| Item Description: | Literaturangaben |
| Physical Description: | XIII, 232 S. Ill., graph. Darst. |
| ISBN: | 0201146959 |
Staff View
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| 245 | 1 | 0 | |a Introduction to microelectronic fabrication |
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| 300 | |a XIII, 232 S. |b Ill., graph. Darst. | ||
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Record in the Search Index
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| author | Jaeger, Richard C. |
| author_facet | Jaeger, Richard C. |
| author_role | aut |
| author_sort | Jaeger, Richard C. |
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| dewey-full | 621.381/73 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
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| dewey-raw | 621.381/73 |
| dewey-search | 621.381/73 |
| dewey-sort | 3621.381 273 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV002209440 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:42:06Z |
| institution | BVB |
| isbn | 0201146959 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001451346 |
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| physical | XIII, 232 S. Ill., graph. Darst. |
| publishDate | 1988 |
| publishDateSearch | 1988 |
| publishDateSort | 1988 |
| publisher | Addison-Wesley |
| record_format | marc |
| series | Modular series on solid state devices. |
| series2 | Modular series on solid state devices. |
| spelling | Jaeger, Richard C. Verfasser aut Introduction to microelectronic fabrication Reading, Mass. Addison-Wesley 1988 XIII, 232 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Modular series on solid state devices. 5. Literaturangaben Integrated circuits Very large scale integration Design and construction Textbooks Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Integrierte Schaltung (DE-588)4027242-4 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf 1\p (DE-588)1071861417 Konferenzschrift gnd-content Mikroelektronik (DE-588)4039207-7 s Halbleitertechnologie (DE-588)4158814-9 s 2\p DE-604 Integrierte Schaltung (DE-588)4027242-4 s 3\p DE-604 Modular series on solid state devices. 5. (DE-604)BV001896679 5. 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 3\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Jaeger, Richard C. Introduction to microelectronic fabrication Modular series on solid state devices. Integrated circuits Very large scale integration Design and construction Textbooks Halbleitertechnologie (DE-588)4158814-9 gnd Integrierte Schaltung (DE-588)4027242-4 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| subject_GND | (DE-588)4158814-9 (DE-588)4027242-4 (DE-588)4039207-7 (DE-588)1071861417 |
| title | Introduction to microelectronic fabrication |
| title_auth | Introduction to microelectronic fabrication |
| title_exact_search | Introduction to microelectronic fabrication |
| title_full | Introduction to microelectronic fabrication |
| title_fullStr | Introduction to microelectronic fabrication |
| title_full_unstemmed | Introduction to microelectronic fabrication |
| title_short | Introduction to microelectronic fabrication |
| title_sort | introduction to microelectronic fabrication |
| topic | Integrated circuits Very large scale integration Design and construction Textbooks Halbleitertechnologie (DE-588)4158814-9 gnd Integrierte Schaltung (DE-588)4027242-4 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| topic_facet | Integrated circuits Very large scale integration Design and construction Textbooks Halbleitertechnologie Integrierte Schaltung Mikroelektronik Konferenzschrift |
| volume_link | (DE-604)BV001896679 |
| work_keys_str_mv | AT jaegerrichardc introductiontomicroelectronicfabrication |