Optical characterization techniques for semiconductor technology: April 1 - 2, 1981, San Jose, Calif.
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Bellingham, Washington, USA
1981
|
| Edition: | 2. print. |
| Series: | Society of Photo-Optical Instrumentation Engineers: Proceedings of the ... .
276. |
| Subjects: | |
| Physical Description: | X, 262 S. graph. Darst. |
| ISBN: | 0892523093 |
Staff View
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV002150654 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | t | ||
| 008 | 890928s1981 d||| |||| 10||| eng d | ||
| 020 | |a 0892523093 |9 0-89252-309-3 | ||
| 035 | |a (OCoLC)7472758 | ||
| 035 | |a (DE-599)BVBBV002150654 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-91 | ||
| 050 | 0 | |a TK7871.85 | |
| 082 | 0 | |a 621.3815/2/0287 |2 19 | |
| 245 | 1 | 0 | |a Optical characterization techniques for semiconductor technology |b April 1 - 2, 1981, San Jose, Calif. |c Hrsg. von D. E. Aspnes* |
| 250 | |a 2. print. | ||
| 264 | 1 | |a Bellingham, Washington, USA |c 1981 | |
| 300 | |a X, 262 S. |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Society of Photo-Optical Instrumentation Engineers: Proceedings of the ... . |v 276. | |
| 650 | 4 | |a Semiconductors |x Testing |x Optical methods |v Congresses | |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 700 | 1 | |a Aspnes, David E. |e Sonstige |4 oth | |
| 830 | 0 | |a Society of Photo-Optical Instrumentation Engineers: Proceedings of the ... . |v 276. |w (DE-604)BV000010887 |9 276. | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-001410925 | ||
Record in the Search Index
| _version_ | 1804116605395795968 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV002150654 |
| callnumber-first | T - Technology |
| callnumber-label | TK7871 |
| callnumber-raw | TK7871.85 |
| callnumber-search | TK7871.85 |
| callnumber-sort | TK 47871.85 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| ctrlnum | (OCoLC)7472758 (DE-599)BVBBV002150654 |
| dewey-full | 621.3815/2/0287 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2/0287 |
| dewey-search | 621.3815/2/0287 |
| dewey-sort | 3621.3815 12 3287 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 2. print. |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01229nam a2200337 cb4500</leader><controlfield tag="001">BV002150654</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">890928s1981 d||| |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0892523093</subfield><subfield code="9">0-89252-309-3</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)7472758</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV002150654</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7871.85</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3815/2/0287</subfield><subfield code="2">19</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Optical characterization techniques for semiconductor technology</subfield><subfield code="b">April 1 - 2, 1981, San Jose, Calif.</subfield><subfield code="c">Hrsg. von D. E. Aspnes*</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">2. print.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Bellingham, Washington, USA</subfield><subfield code="c">1981</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">X, 262 S.</subfield><subfield code="b">graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Society of Photo-Optical Instrumentation Engineers: Proceedings of the ... .</subfield><subfield code="v">276.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors</subfield><subfield code="x">Testing</subfield><subfield code="x">Optical methods</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Aspnes, David E.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Society of Photo-Optical Instrumentation Engineers: Proceedings of the ... .</subfield><subfield code="v">276.</subfield><subfield code="w">(DE-604)BV000010887</subfield><subfield code="9">276.</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-001410925</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV002150654 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:41:10Z |
| institution | BVB |
| isbn | 0892523093 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001410925 |
| oclc_num | 7472758 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM |
| owner_facet | DE-91 DE-BY-TUM |
| physical | X, 262 S. graph. Darst. |
| publishDate | 1981 |
| publishDateSearch | 1981 |
| publishDateSort | 1981 |
| record_format | marc |
| series | Society of Photo-Optical Instrumentation Engineers: Proceedings of the ... . |
| series2 | Society of Photo-Optical Instrumentation Engineers: Proceedings of the ... . |
| spelling | Optical characterization techniques for semiconductor technology April 1 - 2, 1981, San Jose, Calif. Hrsg. von D. E. Aspnes* 2. print. Bellingham, Washington, USA 1981 X, 262 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Society of Photo-Optical Instrumentation Engineers: Proceedings of the ... . 276. Semiconductors Testing Optical methods Congresses (DE-588)1071861417 Konferenzschrift gnd-content Aspnes, David E. Sonstige oth Society of Photo-Optical Instrumentation Engineers: Proceedings of the ... . 276. (DE-604)BV000010887 276. |
| spellingShingle | Optical characterization techniques for semiconductor technology April 1 - 2, 1981, San Jose, Calif. Society of Photo-Optical Instrumentation Engineers: Proceedings of the ... . Semiconductors Testing Optical methods Congresses |
| subject_GND | (DE-588)1071861417 |
| title | Optical characterization techniques for semiconductor technology April 1 - 2, 1981, San Jose, Calif. |
| title_auth | Optical characterization techniques for semiconductor technology April 1 - 2, 1981, San Jose, Calif. |
| title_exact_search | Optical characterization techniques for semiconductor technology April 1 - 2, 1981, San Jose, Calif. |
| title_full | Optical characterization techniques for semiconductor technology April 1 - 2, 1981, San Jose, Calif. Hrsg. von D. E. Aspnes* |
| title_fullStr | Optical characterization techniques for semiconductor technology April 1 - 2, 1981, San Jose, Calif. Hrsg. von D. E. Aspnes* |
| title_full_unstemmed | Optical characterization techniques for semiconductor technology April 1 - 2, 1981, San Jose, Calif. Hrsg. von D. E. Aspnes* |
| title_short | Optical characterization techniques for semiconductor technology |
| title_sort | optical characterization techniques for semiconductor technology april 1 2 1981 san jose calif |
| title_sub | April 1 - 2, 1981, San Jose, Calif. |
| topic | Semiconductors Testing Optical methods Congresses |
| topic_facet | Semiconductors Testing Optical methods Congresses Konferenzschrift |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT aspnesdavide opticalcharacterizationtechniquesforsemiconductortechnologyapril121981sanjosecalif |