Advanced applications of ion implantation: Jan. 23 - 25, 1985, Los Angeles, Calif.
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Bellingham, Wash.
Internat. Soc. for Optical Engineering
1985
|
| Series: | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE
530 |
| Subjects: | |
| Item Description: | Literaturangaben |
| Physical Description: | VI, 263 S. Ill., graph. Darst. |
| ISBN: | 0892525657 |
Staff View
MARC
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Record in the Search Index
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| discipline | Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1985 Los Angeles, Calif. gnd-content |
| genre_facet | Konferenzschrift 1985 Los Angeles, Calif. |
| id | DE-604.BV002125316 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:40:44Z |
| institution | BVB |
| isbn | 0892525657 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001393590 |
| oclc_num | 11998560 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-83 DE-11 |
| owner_facet | DE-91 DE-BY-TUM DE-83 DE-11 |
| physical | VI, 263 S. Ill., graph. Darst. |
| publishDate | 1985 |
| publishDateSearch | 1985 |
| publishDateSort | 1985 |
| publisher | Internat. Soc. for Optical Engineering |
| record_format | marc |
| series | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE |
| series2 | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE |
| spelling | Advanced applications of ion implantation Jan. 23 - 25, 1985, Los Angeles, Calif. Michael I. Current ... ed. Bellingham, Wash. Internat. Soc. for Optical Engineering 1985 VI, 263 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE 530 Literaturangaben Ion implantation Congresses Semiconductor doping Congresses Ionenimplantation (DE-588)4027606-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1985 Los Angeles, Calif. gnd-content Ionenimplantation (DE-588)4027606-5 s DE-604 Current, Michael I. Sonstige oth Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE 530 (DE-604)BV000010887 530 |
| spellingShingle | Advanced applications of ion implantation Jan. 23 - 25, 1985, Los Angeles, Calif. Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE Ion implantation Congresses Semiconductor doping Congresses Ionenimplantation (DE-588)4027606-5 gnd |
| subject_GND | (DE-588)4027606-5 (DE-588)1071861417 |
| title | Advanced applications of ion implantation Jan. 23 - 25, 1985, Los Angeles, Calif. |
| title_auth | Advanced applications of ion implantation Jan. 23 - 25, 1985, Los Angeles, Calif. |
| title_exact_search | Advanced applications of ion implantation Jan. 23 - 25, 1985, Los Angeles, Calif. |
| title_full | Advanced applications of ion implantation Jan. 23 - 25, 1985, Los Angeles, Calif. Michael I. Current ... ed. |
| title_fullStr | Advanced applications of ion implantation Jan. 23 - 25, 1985, Los Angeles, Calif. Michael I. Current ... ed. |
| title_full_unstemmed | Advanced applications of ion implantation Jan. 23 - 25, 1985, Los Angeles, Calif. Michael I. Current ... ed. |
| title_short | Advanced applications of ion implantation |
| title_sort | advanced applications of ion implantation jan 23 25 1985 los angeles calif |
| title_sub | Jan. 23 - 25, 1985, Los Angeles, Calif. |
| topic | Ion implantation Congresses Semiconductor doping Congresses Ionenimplantation (DE-588)4027606-5 gnd |
| topic_facet | Ion implantation Congresses Semiconductor doping Congresses Ionenimplantation Konferenzschrift 1985 Los Angeles, Calif. |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT currentmichaeli advancedapplicationsofionimplantationjan23251985losangelescalif |