The physics of microfabrication:
Saved in:
| Main Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
New York (u.a.)
Plenum Pr.
1982
|
| Subjects: | |
| Item Description: | Literaturverz. S. 471 - 489 |
| Physical Description: | XIX, 503 S. Ill., graph. Darst. |
| ISBN: | 0306408635 |
Staff View
MARC
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Record in the Search Index
| _version_ | 1804116547428417536 |
|---|---|
| any_adam_object | |
| author | Brodie, Ivor Muray, Julius J. |
| author_GND | (DE-588)141138750 |
| author_facet | Brodie, Ivor Muray, Julius J. |
| author_role | aut aut |
| author_sort | Brodie, Ivor |
| author_variant | i b ib j j m jj jjm |
| building | Verbundindex |
| bvnumber | BV002094760 |
| callnumber-first | T - Technology |
| callnumber-label | TK7874 |
| callnumber-raw | TK7874 |
| callnumber-search | TK7874 |
| callnumber-sort | TK 47874 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 4900 |
| classification_tum | ELT 340f |
| ctrlnum | (OCoLC)8282885 (DE-599)BVBBV002094760 |
| dewey-full | 621.381/7 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381/7 |
| dewey-search | 621.381/7 |
| dewey-sort | 3621.381 17 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV002094760 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:40:15Z |
| institution | BVB |
| isbn | 0306408635 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001372721 |
| oclc_num | 8282885 |
| open_access_boolean | |
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| owner_facet | DE-91G DE-BY-TUM DE-706 DE-83 |
| physical | XIX, 503 S. Ill., graph. Darst. |
| psigel | TUB-nveb |
| publishDate | 1982 |
| publishDateSearch | 1982 |
| publishDateSort | 1982 |
| publisher | Plenum Pr. |
| record_format | marc |
| spelling | Brodie, Ivor Verfasser (DE-588)141138750 aut The physics of microfabrication Ivor Brodie ; Julius J. Muray* New York (u.a.) Plenum Pr. 1982 XIX, 503 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturverz. S. 471 - 489 Circuits hybrides à couches minces Microélectronique Microelectronics Microfabrication Thin-film circuits Physik (DE-588)4045956-1 gnd rswk-swf Integrierte Schaltung (DE-588)4027242-4 gnd rswk-swf Technik (DE-588)4059205-4 gnd rswk-swf Teilchenstrahl (DE-588)4165339-7 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Technologie (DE-588)4059276-5 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf Integrierte Schaltung (DE-588)4027242-4 s Technologie (DE-588)4059276-5 s DE-604 Mikroelektronik (DE-588)4039207-7 s Technik (DE-588)4059205-4 s 1\p DE-604 Dünnschichttechnik (DE-588)4136339-5 s 2\p DE-604 3\p DE-604 Teilchenstrahl (DE-588)4165339-7 s 4\p DE-604 Mikrosystemtechnik (DE-588)4221617-5 s 5\p DE-604 Physik (DE-588)4045956-1 s 6\p DE-604 Dünne Schicht (DE-588)4136925-7 s 7\p DE-604 Lithografie Halbleitertechnologie (DE-588)4191584-7 s 8\p DE-604 Muray, Julius J. Verfasser aut 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 3\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 4\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 5\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 6\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 7\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 8\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Brodie, Ivor Muray, Julius J. The physics of microfabrication Circuits hybrides à couches minces Microélectronique Microelectronics Microfabrication Thin-film circuits Physik (DE-588)4045956-1 gnd Integrierte Schaltung (DE-588)4027242-4 gnd Technik (DE-588)4059205-4 gnd Teilchenstrahl (DE-588)4165339-7 gnd Dünnschichttechnik (DE-588)4136339-5 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd Dünne Schicht (DE-588)4136925-7 gnd Technologie (DE-588)4059276-5 gnd Mikroelektronik (DE-588)4039207-7 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4045956-1 (DE-588)4027242-4 (DE-588)4059205-4 (DE-588)4165339-7 (DE-588)4136339-5 (DE-588)4221617-5 (DE-588)4136925-7 (DE-588)4059276-5 (DE-588)4039207-7 (DE-588)4191584-7 |
| title | The physics of microfabrication |
| title_auth | The physics of microfabrication |
| title_exact_search | The physics of microfabrication |
| title_full | The physics of microfabrication Ivor Brodie ; Julius J. Muray* |
| title_fullStr | The physics of microfabrication Ivor Brodie ; Julius J. Muray* |
| title_full_unstemmed | The physics of microfabrication Ivor Brodie ; Julius J. Muray* |
| title_short | The physics of microfabrication |
| title_sort | the physics of microfabrication |
| topic | Circuits hybrides à couches minces Microélectronique Microelectronics Microfabrication Thin-film circuits Physik (DE-588)4045956-1 gnd Integrierte Schaltung (DE-588)4027242-4 gnd Technik (DE-588)4059205-4 gnd Teilchenstrahl (DE-588)4165339-7 gnd Dünnschichttechnik (DE-588)4136339-5 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd Dünne Schicht (DE-588)4136925-7 gnd Technologie (DE-588)4059276-5 gnd Mikroelektronik (DE-588)4039207-7 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Circuits hybrides à couches minces Microélectronique Microelectronics Microfabrication Thin-film circuits Physik Integrierte Schaltung Technik Teilchenstrahl Dünnschichttechnik Mikrosystemtechnik Dünne Schicht Technologie Mikroelektronik Lithografie Halbleitertechnologie |
| work_keys_str_mv | AT brodieivor thephysicsofmicrofabrication AT murayjuliusj thephysicsofmicrofabrication |