Ionenimplantation in der Halbleitertechnik:
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Buch |
| Sprache: | German |
| Veröffentlicht: |
München
Hanser
1981
|
| Schlagworte: | |
| Beschreibung: | EST: Ion implantation of semiconductors (dt.) |
| Beschreibung: | 265 S.: graph.Darst. |
| ISBN: | 3446125531 |
Internformat
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| 700 | 1 | |a Grant, William A. |e Verfasser |4 aut | |
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Datensatz im Suchindex
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| author | Carter, George Grant, William A. |
| author_facet | Carter, George Grant, William A. |
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| author_sort | Carter, George |
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| building | Verbundindex |
| bvnumber | BV002080941 |
| classification_rvk | UP 3000 |
| ctrlnum | (OCoLC)163447342 (DE-599)BVBBV002080941 |
| discipline | Physik |
| format | Book |
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| id | DE-604.BV002080941 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T15:40:00Z |
| institution | BVB |
| isbn | 3446125531 |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001362428 |
| oclc_num | 163447342 |
| open_access_boolean | |
| owner | DE-12 DE-91 DE-BY-TUM DE-Aug4 DE-29T DE-210 DE-706 DE-B1550 |
| owner_facet | DE-12 DE-91 DE-BY-TUM DE-Aug4 DE-29T DE-210 DE-706 DE-B1550 |
| physical | 265 S.: graph.Darst. |
| publishDate | 1981 |
| publishDateSearch | 1981 |
| publishDateSort | 1981 |
| publisher | Hanser |
| record_format | marc |
| spelling | Carter, George Verfasser aut Ionenimplantation in der Halbleitertechnik G. Carter ; W. A. Grant München Hanser 1981 265 S.: graph.Darst. txt rdacontent n rdamedia nc rdacarrier EST: Ion implantation of semiconductors (dt.) Ionenimplantation (DE-588)4027606-5 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf Halbleiter (DE-588)4022993-2 s Ionenimplantation (DE-588)4027606-5 s DE-604 Grant, William A. Verfasser aut |
| spellingShingle | Carter, George Grant, William A. Ionenimplantation in der Halbleitertechnik Ionenimplantation (DE-588)4027606-5 gnd Halbleiter (DE-588)4022993-2 gnd |
| subject_GND | (DE-588)4027606-5 (DE-588)4022993-2 |
| title | Ionenimplantation in der Halbleitertechnik |
| title_auth | Ionenimplantation in der Halbleitertechnik |
| title_exact_search | Ionenimplantation in der Halbleitertechnik |
| title_full | Ionenimplantation in der Halbleitertechnik G. Carter ; W. A. Grant |
| title_fullStr | Ionenimplantation in der Halbleitertechnik G. Carter ; W. A. Grant |
| title_full_unstemmed | Ionenimplantation in der Halbleitertechnik G. Carter ; W. A. Grant |
| title_short | Ionenimplantation in der Halbleitertechnik |
| title_sort | ionenimplantation in der halbleitertechnik |
| topic | Ionenimplantation (DE-588)4027606-5 gnd Halbleiter (DE-588)4022993-2 gnd |
| topic_facet | Ionenimplantation Halbleiter |
| work_keys_str_mv | AT cartergeorge ionenimplantationinderhalbleitertechnik AT grantwilliama ionenimplantationinderhalbleitertechnik |