Laser chemical processing for microelectronics:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Cambridge [u.a.]
Cambridge Univ. Press
1989
|
| Ausgabe: | 1. publ. |
| Schriftenreihe: | Cambridge studies in modern optics
7 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | 172 S. Ill., graph. Darst. |
| ISBN: | 0521322545 |
Internformat
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Datensatz im Suchindex
| _version_ | 1804116522958848000 |
|---|---|
| adam_text | IMAGE 1
LASER CHEMICAL
PROCESSING FOR MICROELECTRONICS
EDITED BY K. G. IBBS
COHERENT, INC., PALO ALTO, CALIFORNIA
R. M. O S G O OD
MICROELECTRONIC SCIENCES LABORATORIES COLUMBIA UNIVERSITY, NEW YORK
THE RIGHT OF THE UNIVERSITY OF CAMBRIDGE TO PRINT AND SELL ALL MANNER OF
HOOKS
WAS GRANTED BY HENRY VIII IN 1534. THE UNIVERSITY HAS PRINTED AND
PUBLISHED CONTINUOUSLY
SINCE 1584.
CAMBRIDGE UNIVERSITY PRESS
CAMBRIDGE NEW YORK NEW ROCHELLE MELBOURNE SYDNEY
IMAGE 2
CONTENTS
LIST OF CONTRIBUTORS V11
PREFACE IX
APPLICATIONS OF LASER CHEMICAL TECHNIQUES TO MICROELECTRONICS
FABRICATION 1
K. G. IBBS A ND R. M. O S G O OD
1.1 INTRODUCTION . 1
1.2 TYPES OF LASER PROCESSING 1
1.3 PROCESSING WITH OPTICALLY INDUCED CHEMISTRY 4
1.4 UNIQUE ASPECTS OF LASER PROCESSING 5
1.5 APPLICATIONS 11
1.6 CONCLUSIONS 22
1.7 REFERENCES 22
LASER DEPOSITION OF FILMS FROM ACETYLACETONATE COMPLEXES 25 F. A. H O U
L E, T. H. BAUM A ND * R. M O Y L AN
2.1 INTRODUCTION 25
2.2 PHYSICAL PROPERTIES OF THE 2,4-PENTANEDIONATES AND EXPERIMENTAL
CONSIDERATIONS 27
2.3 PHOTOCHEMISTRY OF THE METAL ACACS 31
2.4 PHOTOCHEMICAL DEPOSITION 37
2.5 LASER CHEMICAL YAPOUR DEPOSITION (LCVD) 45
2.6 THE ACAS AS METAL FILM PRECURSORS 56
2.7 ACKNOWLEDGEMENTS 58
2.8 REFERENCES 59
DIRECT-LASER WRITING 61
I. P. H E R M AN
3.1 INTRODUCTION 61
3.2 EXPERIMENTAL METHODS 65
3.3 SCOPE OF DIRECT-WRITING METHODS 68
3.4 MODELING DIRECT-LASER WRITING 75
3.5 INSTABILITIES, FINE STRUCTURE AND MATERIAL PROPERTIES IN LASER
DEPOSITION 91
3.6 IN SITU DIAGNOSIS OF LASER-WRITTEN MICROSTRUCTURES 95
IMAGE 3
CONTENTS
3.7 APPLICATIONS 100
3.8 CONCLUSIONS 101
3.9 ACKNOWLEDGEMENTS 102
3.10 REFERENCES 102
LASER-CONTROLLED ETCHING OF SEMICONDUCTORS IN SOLUTIONS 109 D. V.
PODLESNIK AND H. H. GILGEN 4.1 INTRODUCTION 109
4.2 SEMICONDUCTOR ETCHING IN SOLUTIONS 111
4.3 WAVELENGTH DEPENDENCE OF LIGHT-CONTROLLED ETCHING 117 4.4
ANISOTROPIC ETCHING 122
4.5 HIGH-RESOLUTION ETCHING 133
4.6 CONCLUSIONS 141
4.7 ACKNOWLEDGEMENTS 142
4.8 REFERENCES 142
DOPING OF SEMICONDUCTORS USING LASER-INDUCED CHEMISTRY 146 R. M. OSGOOD,
JR AND T. F. DEUTSCH 5.1 INTRODUCTION 146
5.2 CW LASER DOPING 147
5.3 PULSED LASER DOPING 151
5.4 CONCLUSIONS 166
5.5 REFERENCES 166
INDEX 169
|
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| id | DE-604.BV002072683 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:39:51Z |
| institution | BVB |
| isbn | 0521322545 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001355616 |
| oclc_num | 17383921 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-29T DE-703 DE-83 |
| owner_facet | DE-91 DE-BY-TUM DE-29T DE-703 DE-83 |
| physical | 172 S. Ill., graph. Darst. |
| publishDate | 1989 |
| publishDateSearch | 1989 |
| publishDateSort | 1989 |
| publisher | Cambridge Univ. Press |
| record_format | marc |
| series | Cambridge studies in modern optics |
| series2 | Cambridge studies in modern optics |
| spelling | Laser chemical processing for microelectronics ed. by K. G. Ibbs ... 1. publ. Cambridge [u.a.] Cambridge Univ. Press 1989 172 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Cambridge studies in modern optics 7 Circuits intégrés - Conception et construction ram Lasers - Applications industrielles ram Integrated circuits Design and construction Lasers Industrial applications Laserchemie (DE-588)4034613-4 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Laser (DE-588)4034610-9 gnd rswk-swf Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd rswk-swf Laserchemie (DE-588)4034613-4 s Mikroelektronik (DE-588)4039207-7 s DE-604 Fotolithografie Halbleitertechnologie (DE-588)4174516-4 s Laser (DE-588)4034610-9 s Ibbs, K. G. Sonstige oth Cambridge studies in modern optics 7 (DE-604)BV004081392 7 GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=001355616&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Laser chemical processing for microelectronics Cambridge studies in modern optics Circuits intégrés - Conception et construction ram Lasers - Applications industrielles ram Integrated circuits Design and construction Lasers Industrial applications Laserchemie (DE-588)4034613-4 gnd Mikroelektronik (DE-588)4039207-7 gnd Laser (DE-588)4034610-9 gnd Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd |
| subject_GND | (DE-588)4034613-4 (DE-588)4039207-7 (DE-588)4034610-9 (DE-588)4174516-4 |
| title | Laser chemical processing for microelectronics |
| title_auth | Laser chemical processing for microelectronics |
| title_exact_search | Laser chemical processing for microelectronics |
| title_full | Laser chemical processing for microelectronics ed. by K. G. Ibbs ... |
| title_fullStr | Laser chemical processing for microelectronics ed. by K. G. Ibbs ... |
| title_full_unstemmed | Laser chemical processing for microelectronics ed. by K. G. Ibbs ... |
| title_short | Laser chemical processing for microelectronics |
| title_sort | laser chemical processing for microelectronics |
| topic | Circuits intégrés - Conception et construction ram Lasers - Applications industrielles ram Integrated circuits Design and construction Lasers Industrial applications Laserchemie (DE-588)4034613-4 gnd Mikroelektronik (DE-588)4039207-7 gnd Laser (DE-588)4034610-9 gnd Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd |
| topic_facet | Circuits intégrés - Conception et construction Lasers - Applications industrielles Integrated circuits Design and construction Lasers Industrial applications Laserchemie Mikroelektronik Laser Fotolithografie Halbleitertechnologie |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=001355616&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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