APA (7th ed.) Citation

(1982). Semiconductor growth technology: Jan. 26 - 27, 1982 Los Angeles, Calif. SPIE.

Chicago Style (17th ed.) Citation

Semiconductor Growth Technology: Jan. 26 - 27, 1982 Los Angeles, Calif. Bellingham, Washington, USA: SPIE, 1982.

MLA (9th ed.) Citation

Semiconductor Growth Technology: Jan. 26 - 27, 1982 Los Angeles, Calif. SPIE, 1982.

Warning: These citations may not always be 100% accurate.