Amorphous and crystalline silicon carbide and related materials: proceedings of the First International Conference, Washington DC, December 10 amd 11, 1987
Saved in:
| Other Authors: | |
|---|---|
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Berlin [u.a.]
Springer
1989
|
| Series: | Springer proceedings in physics
34 |
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Item Description: | Forts. u. d. T.: Amorphous and crystalline silicon carbide. 2 |
| Physical Description: | IX, 199 S. Ill., graph. Darst. |
| ISBN: | 354050706X 038750706X |
Staff View
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV001788757 | ||
| 003 | DE-604 | ||
| 005 | 20230119 | ||
| 007 | t | ||
| 008 | 890817s1989 ad|| |||| 10||| eng d | ||
| 020 | |a 354050706X |9 3-540-50706-X | ||
| 020 | |a 038750706X |9 0-387-50706-X | ||
| 035 | |a (OCoLC)643999810 | ||
| 035 | |a (DE-599)BVBBV001788757 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-12 |a DE-384 |a DE-91G |a DE-355 |a DE-706 |a DE-83 | ||
| 084 | |a UP 3100 |0 (DE-625)146372: |2 rvk | ||
| 084 | |a PHY 694f |2 stub | ||
| 245 | 1 | 0 | |a Amorphous and crystalline silicon carbide and related materials |b proceedings of the First International Conference, Washington DC, December 10 amd 11, 1987 |c ed. G. L. Harris ... |
| 264 | 1 | |a Berlin [u.a.] |b Springer |c 1989 | |
| 300 | |a IX, 199 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Springer proceedings in physics |v 34 | |
| 500 | |a Forts. u. d. T.: Amorphous and crystalline silicon carbide. 2 | ||
| 650 | 0 | 7 | |a Siliciumcarbid |0 (DE-588)4055009-6 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1987 |z Washington DC |2 gnd-content | |
| 689 | 0 | 0 | |a Siliciumcarbid |0 (DE-588)4055009-6 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Harris, Gary Lynn |d 1953- |0 (DE-588)1056095121 |4 edt | |
| 711 | 2 | |a International Conference on Amorphous and Crystalline Silicon Carbide and Related Materials |n 1 |d 1987 |c Washington, DC |j Sonstige |0 (DE-588)5043373-8 |4 oth | |
| 830 | 0 | |a Springer proceedings in physics |v 34 |w (DE-604)BV000018744 |9 34 | |
| 856 | 4 | 2 | |m GBV Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=001205420&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-001205420 | ||
Record in the Search Index
| _version_ | 1804116282182729728 |
|---|---|
| adam_text | AMORPHOUS AND CRYSTALLINE SILICON CARBIDE AND RELATED MATERIALS
PROCEEDINGS OF THE FIRST INTERNATIONAL CONFERENCE WASHINGTON DC,
DECEMBER 10 AND 11,1987 EDITORS: G.L.HARRIS AND C.Y.-W.YANG WITH 156
FIGURES SPRINGER-VERLAG BERLIN HEIDELBERG NEWYORK LONDON PARIS TOKYO
CONTENTS PART I GROWTH OF CRYSTALLINE SILICON CARBIDE RECENT
DEVELOPMENTS IN SIC (USA) BY J.A. POWELL AND L.G. MATUS (WITH 3 FIGURES)
2 6H-SIC STUDIES AND DEVELOPMENTS AT THE CORPORATE RESEARCH LABORATORY
OF SIEMENS AG AND THE INSTITUTE FOR APPLIED PHYSICS OF THE UNIVERSITY IN
ERLANGEN (FRG) BY P.A. GLASOW (WITH 20 FIGURES) 13 VPE GROWTH OF SIC ON
STEP-CONTROLLED SUBSTRATES BY H. MATSUNAMI, K. SHIBAHARA, N. KURODA, W.
YOO, AND S. NISHINO (WITH 4 FIGURES) 34 GROWTH OF SS-SIC HETEROEPITAXIAL
FILMS ON VICINAL (001) SI SUBSTRATES BY L.G. MATUS AND J.A. POWELL (WITH
4 FIGURES) 40 EPITAXIAL GROWTH OF 3C-SIC ON A SI SUBSTRATE USING
METHYLTRICHLOROSILANE BY S. NISHINO AND J. SARAIE (WITH 5 FIGURES) 45 A
MECHANISM AND KINETICS FOR SILICON CARBIDE GROWTH BY M.E. ALUKO (WITH 1
FIGURE) 51 MECHANISMS OF EPITAXIAL GROWTH OF SS-SIC ON SILICON SUBSTRATE
BY CHEMICAL VAPOR DEPOSITION AND NUCLEATION OF DEFECTS BY P. PIROUZ,
T.T. CHENG, AND J.A. POWELL 56 PART * GROWTH OF AMORPHOUS SILICON
CARBIDE PRESENT AND FUTURE APPLICATIONS OF AMORPHOUS SILICON CARBIDE BY
S. FURUKAWA (WITH 6 FIGURES) 58 FABRICATION OF A-SI:H/A-SIC:H
MULTILAYERS BY A GLOW DISCHARGE METHOD AND CARRIER TRANSPORT PROPERTIES
BY H. MATSUNAMI, M. YOSHIMOTO, AND T. FUYUKI (WITH 8 FIGURES) 66 HIGHLY
PHOTOSENSITIVE A-SIC:H FILMS PREPARED AT HIGH DEPOSITION RATE BY GLOW
DISCHARGE IN SIH 4 -C 2 H 2 MIXTURE GAS BY S. AKITA, K. WAKITA, Y.
NAKAYAMA, AND T. KAWAMURA (WITH 8 FIGURES) 77 VII A NOVEL L-COUPLED RF
PECVD SYSTEM FOR LARGE-AREA DEPOSITION OF A- SIC:H FOR DEVICE
APPLICATIONS BY A. TRAN, D. FUNG, M.M. RAHMAN, AND C.Y. YANG (WITH 5
FIGURES) . . 83 PART * CHARACTERIZATION OF SILICON CARBIDE DONOR
IDENTIFICATION IN THIN FILM CUBIC SIC BY S.G. BISHOP, J.A. FREITAS, JR.,
T.A. KENNEDY, W.E. CARLOS, W.J. MOORE, P.E.R. NORDQUIST, JR., AND M.L.
GIPE (WITH 5 FIGURES) 90 SIC PRODUCTION CHEMISTRY FROM OLEFINIC
HYDROCARBONS ON SI(100) BY W.J. CHOYKE, R. WALLACE, L. HENDERSON, P.
TAYLOR, M.J. DRESSER, AND J.T. YATES, JR 99 SURFACE STRUCTURES OF SS-SIC,
6H-SIC AND PSEUDOMORPHIC SI ADLAYERS BY R. KAPLAN (WITH 5 FIGURES) 100
STUDY OF THE ORIGIN OF RESIDUAL CARRIERS IN CVD-GROWN 3C-SIC BY
PHOTOLUMINESCENCE AND ELECTRON SPIN RESONANCE BY H. OKUMURA, M.
YAMANAKA, M. SHINOHARA, E. MUNEYAMA, S. KURODA, K. ENDO, I. NASHIYAMA,
H. DAIMON, E. SAKUMA, S. MISAWA, AND S. YOSHIDA (WITH 4 FIGURES) 107
PHASE MATCHED SECOND HARMONIC CONVERSION IN SS-SIC BY K.H. JACKSON, E.W.
JONES, AND G.L. HARRIS (WITH 3 FIGURES) 114 GAMMA-RAY IRRADIATION
EFFECTS ON 3C-SIC DEVICES BY I. NASHIYAMA, M. SHINOHARA, T. MATSUMOTO,
K. ENDO, E. SAKUMA, S. MISAWA, H. OKUMURA, AND S. YOSHIDA (WITH 6
FIGURES) 123 THE MEASUREMENT OF STRESS IN SILICON CARBIDE USING THE
PHOTOELASTIC EFFECT BY K.H. JACKSON, P. ZHOU, E. JONES, G.L. HARRIS, AND
M.G. SPENCER (WITH 2 FIGURES) 129 EFFECT OF SURFACE MODIFICATIONS OF
CUBIC SIC ON METALLIZATION INTERACTIONS BY M.V. ZELLER AND J.J. BELLINA,
JR 133 AMORPHOUS SILICON CARBIDE THIN FILMS PRODUCED IN THE GLOW
DISCHARGE DEPOSITION SYSTEM BY N.T. TRAN (WITH 11 FIGURES) 134
PREPARATION AND PROPERTIES OF POLYCRYSTALLINE SILICON CARBIDE FILMS
PRODUCED BY PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION, AND THEIR
APPLICATIONS BY Y. ONUMA, F. NAGAUNE, AND K. KAMIMURA (WITH 7 FIGURES)
142 PART TV SILICON CARBIDE PROCESSING AND DEVICE APPLICATIONS STUDY ON
CURRENT GAIN DEGRADATION IN AMORPHOUS SIC EMITTER HBT BY K. SASAKI, T.
FUKAZAWA, AND S. FURUKAWA (WITH 6 FIGURES) 150 VIII INVESTIGATIONS OF
STABILITY OF A-SIC UNDER HEAT TREATMENT DURING DEVICE FABRICATION BY T.
FUKAZAWA, K. SASAKI, AND S. FURUKAWA (WITH 7 FIGURES) 156 HETEROJUNCTION
BAND DISCONTINUITIES IN CRYSTALLINE SILICON/AMORPHOUS COMPOUND
HETEROJUNCTIONS BY S.G. MEIKLE, Y. HATANAKA, Y. SUZUKI, AND G. SHIMAOKA
(WITH 6 FIGURES) 161 AMORPHOUS SILICON SOLAR CELLS USING A-SIC MATERIALS
BY Y. KUWANO AND S. TSUDA (WITH 13 FIGURES) 167 AU-NI CONTACTS ON SS-SIC
FILMS BY V.H. WATT AND K.H. JACKSON 179 EPITAXIAL GROWTH, HIGH
TEMPERATURE ION IMPLANTATION AND MOSFET FABRICATION IN MONOCRYSTALLINE
SS-SIC THIN FILMS BY H.S. KONG, J.A. EDMOND, J.W. PALMOUR, J.T. GLASS,
AND R.F. DAVIS (WITH 4 FIGURES) 180 PLASMA-ASSISTED CHEMICAL VAPOR
DEPOSITION OF CUBIC SILICON CARBIDE ON SILICON SUBSTRATE BY S. NISHINO
AND J. SARAIE (WITH 6 FIGURES) 186 REACTIVE ION ETCHING FOR SIC DEVICE
FABRICATION BY W.-S. PAN AND A.J. STECKL (WITH 7 FIGURES) 192 INDEX OF
CONTRIBUTORS 199 IX
|
| any_adam_object | 1 |
| author2 | Harris, Gary Lynn 1953- |
| author2_role | edt |
| author2_variant | g l h gl glh |
| author_GND | (DE-588)1056095121 |
| author_facet | Harris, Gary Lynn 1953- |
| building | Verbundindex |
| bvnumber | BV001788757 |
| classification_rvk | UP 3100 |
| classification_tum | PHY 694f |
| ctrlnum | (OCoLC)643999810 (DE-599)BVBBV001788757 |
| discipline | Physik |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01860nam a2200397 cb4500</leader><controlfield tag="001">BV001788757</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20230119 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">890817s1989 ad|| |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">354050706X</subfield><subfield code="9">3-540-50706-X</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">038750706X</subfield><subfield code="9">0-387-50706-X</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)643999810</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV001788757</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-12</subfield><subfield code="a">DE-384</subfield><subfield code="a">DE-91G</subfield><subfield code="a">DE-355</subfield><subfield code="a">DE-706</subfield><subfield code="a">DE-83</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 3100</subfield><subfield code="0">(DE-625)146372:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">PHY 694f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Amorphous and crystalline silicon carbide and related materials</subfield><subfield code="b">proceedings of the First International Conference, Washington DC, December 10 amd 11, 1987</subfield><subfield code="c">ed. G. L. Harris ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Berlin [u.a.]</subfield><subfield code="b">Springer</subfield><subfield code="c">1989</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">IX, 199 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Springer proceedings in physics</subfield><subfield code="v">34</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Forts. u. d. T.: Amorphous and crystalline silicon carbide. 2</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Siliciumcarbid</subfield><subfield code="0">(DE-588)4055009-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1987</subfield><subfield code="z">Washington DC</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Siliciumcarbid</subfield><subfield code="0">(DE-588)4055009-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Harris, Gary Lynn</subfield><subfield code="d">1953-</subfield><subfield code="0">(DE-588)1056095121</subfield><subfield code="4">edt</subfield></datafield><datafield tag="711" ind1="2" ind2=" "><subfield code="a">International Conference on Amorphous and Crystalline Silicon Carbide and Related Materials</subfield><subfield code="n">1</subfield><subfield code="d">1987</subfield><subfield code="c">Washington, DC</subfield><subfield code="j">Sonstige</subfield><subfield code="0">(DE-588)5043373-8</subfield><subfield code="4">oth</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Springer proceedings in physics</subfield><subfield code="v">34</subfield><subfield code="w">(DE-604)BV000018744</subfield><subfield code="9">34</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">GBV Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=001205420&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-001205420</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 1987 Washington DC gnd-content |
| genre_facet | Konferenzschrift 1987 Washington DC |
| id | DE-604.BV001788757 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:36:02Z |
| institution | BVB |
| institution_GND | (DE-588)5043373-8 |
| isbn | 354050706X 038750706X |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001205420 |
| oclc_num | 643999810 |
| open_access_boolean | |
| owner | DE-12 DE-384 DE-91G DE-BY-TUM DE-355 DE-BY-UBR DE-706 DE-83 |
| owner_facet | DE-12 DE-384 DE-91G DE-BY-TUM DE-355 DE-BY-UBR DE-706 DE-83 |
| physical | IX, 199 S. Ill., graph. Darst. |
| publishDate | 1989 |
| publishDateSearch | 1989 |
| publishDateSort | 1989 |
| publisher | Springer |
| record_format | marc |
| series | Springer proceedings in physics |
| series2 | Springer proceedings in physics |
| spelling | Amorphous and crystalline silicon carbide and related materials proceedings of the First International Conference, Washington DC, December 10 amd 11, 1987 ed. G. L. Harris ... Berlin [u.a.] Springer 1989 IX, 199 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Springer proceedings in physics 34 Forts. u. d. T.: Amorphous and crystalline silicon carbide. 2 Siliciumcarbid (DE-588)4055009-6 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1987 Washington DC gnd-content Siliciumcarbid (DE-588)4055009-6 s DE-604 Harris, Gary Lynn 1953- (DE-588)1056095121 edt International Conference on Amorphous and Crystalline Silicon Carbide and Related Materials 1 1987 Washington, DC Sonstige (DE-588)5043373-8 oth Springer proceedings in physics 34 (DE-604)BV000018744 34 GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=001205420&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Amorphous and crystalline silicon carbide and related materials proceedings of the First International Conference, Washington DC, December 10 amd 11, 1987 Springer proceedings in physics Siliciumcarbid (DE-588)4055009-6 gnd |
| subject_GND | (DE-588)4055009-6 (DE-588)1071861417 |
| title | Amorphous and crystalline silicon carbide and related materials proceedings of the First International Conference, Washington DC, December 10 amd 11, 1987 |
| title_auth | Amorphous and crystalline silicon carbide and related materials proceedings of the First International Conference, Washington DC, December 10 amd 11, 1987 |
| title_exact_search | Amorphous and crystalline silicon carbide and related materials proceedings of the First International Conference, Washington DC, December 10 amd 11, 1987 |
| title_full | Amorphous and crystalline silicon carbide and related materials proceedings of the First International Conference, Washington DC, December 10 amd 11, 1987 ed. G. L. Harris ... |
| title_fullStr | Amorphous and crystalline silicon carbide and related materials proceedings of the First International Conference, Washington DC, December 10 amd 11, 1987 ed. G. L. Harris ... |
| title_full_unstemmed | Amorphous and crystalline silicon carbide and related materials proceedings of the First International Conference, Washington DC, December 10 amd 11, 1987 ed. G. L. Harris ... |
| title_short | Amorphous and crystalline silicon carbide and related materials |
| title_sort | amorphous and crystalline silicon carbide and related materials proceedings of the first international conference washington dc december 10 amd 11 1987 |
| title_sub | proceedings of the First International Conference, Washington DC, December 10 amd 11, 1987 |
| topic | Siliciumcarbid (DE-588)4055009-6 gnd |
| topic_facet | Siliciumcarbid Konferenzschrift 1987 Washington DC |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=001205420&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV000018744 |
| work_keys_str_mv | AT harrisgarylynn amorphousandcrystallinesiliconcarbideandrelatedmaterialsproceedingsofthefirstinternationalconferencewashingtondcdecember10amd111987 AT internationalconferenceonamorphousandcrystallinesiliconcarbideandrelatedmaterialswashingtondc amorphousandcrystallinesiliconcarbideandrelatedmaterialsproceedingsofthefirstinternationalconferencewashingtondcdecember10amd111987 |