A hollow cathode sputtering flow system:
Gespeichert in:
Hauptverfasser: | , , |
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Format: | Buch |
Sprache: | Undetermined |
Veröffentlicht: |
Stockholm
1984
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Schriftenreihe: | Fysiska Institutionen <Stockholm>: USIP-Report
1984,10 |
Schlagworte: | |
Beschreibung: | 11 Bl. Ill. |
Internformat
MARC
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008 | 870612s1984 a||| |||| 00||| und d | ||
035 | |a (OCoLC)165829072 | ||
035 | |a (DE-599)BVBBV000247191 | ||
040 | |a DE-604 |b ger |e rakddb | ||
041 | |a und | ||
049 | |a DE-12 | ||
100 | 1 | |a Appelblad, O. |e Verfasser |4 aut | |
245 | 1 | 0 | |a A hollow cathode sputtering flow system |c O. Appelblad, S. Fredin and K. Schmidt |
264 | 1 | |a Stockholm |c 1984 | |
300 | |a 11 Bl. |b Ill. | ||
336 | |b txt |2 rdacontent | ||
337 | |b n |2 rdamedia | ||
338 | |b nc |2 rdacarrier | ||
490 | 1 | |a Fysiska Institutionen <Stockholm>: USIP-Report |v 1984,10 | |
650 | 0 | 7 | |a Zweiatomiges Molekül |0 (DE-588)4191214-7 |2 gnd |9 rswk-swf |
655 | 7 | |a Kathodenstreuung |2 gnd |9 rswk-swf | |
689 | 0 | 0 | |a Zweiatomiges Molekül |0 (DE-588)4191214-7 |D s |
689 | 0 | 1 | |a Kathodenstreuung |A f |
689 | 0 | |5 DE-604 | |
700 | 1 | |a Fredin, S. |e Verfasser |4 aut | |
700 | 1 | |a Schmidt, K. |e Verfasser |4 aut | |
830 | 0 | |a Fysiska Institutionen <Stockholm>: USIP-Report |v 1984,10 |w (DE-604)BV000005191 |9 1984,10 | |
999 | |a oai:aleph.bib-bvb.de:BVB01-000148809 |
Datensatz im Suchindex
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any_adam_object | |
author | Appelblad, O. Fredin, S. Schmidt, K. |
author_facet | Appelblad, O. Fredin, S. Schmidt, K. |
author_role | aut aut aut |
author_sort | Appelblad, O. |
author_variant | o a oa s f sf k s ks |
building | Verbundindex |
bvnumber | BV000247191 |
ctrlnum | (OCoLC)165829072 (DE-599)BVBBV000247191 |
format | Book |
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genre | Kathodenstreuung gnd |
genre_facet | Kathodenstreuung |
id | DE-604.BV000247191 |
illustrated | Illustrated |
indexdate | 2024-07-09T15:11:03Z |
institution | BVB |
language | Undetermined |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-000148809 |
oclc_num | 165829072 |
open_access_boolean | |
owner | DE-12 |
owner_facet | DE-12 |
physical | 11 Bl. Ill. |
publishDate | 1984 |
publishDateSearch | 1984 |
publishDateSort | 1984 |
record_format | marc |
series | Fysiska Institutionen <Stockholm>: USIP-Report |
series2 | Fysiska Institutionen <Stockholm>: USIP-Report |
spelling | Appelblad, O. Verfasser aut A hollow cathode sputtering flow system O. Appelblad, S. Fredin and K. Schmidt Stockholm 1984 11 Bl. Ill. txt rdacontent n rdamedia nc rdacarrier Fysiska Institutionen <Stockholm>: USIP-Report 1984,10 Zweiatomiges Molekül (DE-588)4191214-7 gnd rswk-swf Kathodenstreuung gnd rswk-swf Zweiatomiges Molekül (DE-588)4191214-7 s Kathodenstreuung f DE-604 Fredin, S. Verfasser aut Schmidt, K. Verfasser aut Fysiska Institutionen <Stockholm>: USIP-Report 1984,10 (DE-604)BV000005191 1984,10 |
spellingShingle | Appelblad, O. Fredin, S. Schmidt, K. A hollow cathode sputtering flow system Fysiska Institutionen <Stockholm>: USIP-Report Zweiatomiges Molekül (DE-588)4191214-7 gnd |
subject_GND | (DE-588)4191214-7 |
title | A hollow cathode sputtering flow system |
title_auth | A hollow cathode sputtering flow system |
title_exact_search | A hollow cathode sputtering flow system |
title_full | A hollow cathode sputtering flow system O. Appelblad, S. Fredin and K. Schmidt |
title_fullStr | A hollow cathode sputtering flow system O. Appelblad, S. Fredin and K. Schmidt |
title_full_unstemmed | A hollow cathode sputtering flow system O. Appelblad, S. Fredin and K. Schmidt |
title_short | A hollow cathode sputtering flow system |
title_sort | a hollow cathode sputtering flow system |
topic | Zweiatomiges Molekül (DE-588)4191214-7 gnd |
topic_facet | Zweiatomiges Molekül Kathodenstreuung |
volume_link | (DE-604)BV000005191 |
work_keys_str_mv | AT appelblado ahollowcathodesputteringflowsystem AT fredins ahollowcathodesputteringflowsystem AT schmidtk ahollowcathodesputteringflowsystem |