Some semiconductor processes and modelling with emphasis on sputtering and its applications:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Buch |
| Sprache: | English |
| Veröffentlicht: |
Uppsala
1982
|
| Schriftenreihe: | Uppsala Universitet: Acta Universitatis Upsaliensis / Abstracts of Uppsala dissertations from the Faculty of Science
644 |
| Schlagworte: | |
| ISBN: | 9155413064 |
Internformat
MARC
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| 100 | 1 | |a Hesselbom, Hjalmar |e Verfasser |4 aut | |
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Datensatz im Suchindex
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| author | Hesselbom, Hjalmar |
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| indexdate | 2024-07-09T15:09:37Z |
| institution | BVB |
| isbn | 9155413064 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-000091232 |
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| publishDate | 1982 |
| publishDateSearch | 1982 |
| publishDateSort | 1982 |
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| series2 | Uppsala Universitet: Acta Universitatis Upsaliensis / Abstracts of Uppsala dissertations from the Faculty of Science |
| spelling | Hesselbom, Hjalmar Verfasser aut Some semiconductor processes and modelling with emphasis on sputtering and its applications Uppsala 1982 txt rdacontent n rdamedia nc rdacarrier Uppsala Universitet: Acta Universitatis Upsaliensis / Abstracts of Uppsala dissertations from the Faculty of Science 644 Vollst. zugl.: Uppsala, Univ., Diss., 1982 Sputtern (DE-588)4182614-0 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Sputtern (DE-588)4182614-0 s Halbleiter (DE-588)4022993-2 s DE-604 Abstracts of Uppsala dissertations from the Faculty of Science Uppsala Universitet: Acta Universitatis Upsaliensis 644 (DE-604)BV008006378 644 |
| spellingShingle | Hesselbom, Hjalmar Some semiconductor processes and modelling with emphasis on sputtering and its applications Sputtern (DE-588)4182614-0 gnd Halbleiter (DE-588)4022993-2 gnd |
| subject_GND | (DE-588)4182614-0 (DE-588)4022993-2 (DE-588)4113937-9 |
| title | Some semiconductor processes and modelling with emphasis on sputtering and its applications |
| title_auth | Some semiconductor processes and modelling with emphasis on sputtering and its applications |
| title_exact_search | Some semiconductor processes and modelling with emphasis on sputtering and its applications |
| title_full | Some semiconductor processes and modelling with emphasis on sputtering and its applications |
| title_fullStr | Some semiconductor processes and modelling with emphasis on sputtering and its applications |
| title_full_unstemmed | Some semiconductor processes and modelling with emphasis on sputtering and its applications |
| title_short | Some semiconductor processes and modelling with emphasis on sputtering and its applications |
| title_sort | some semiconductor processes and modelling with emphasis on sputtering and its applications |
| topic | Sputtern (DE-588)4182614-0 gnd Halbleiter (DE-588)4022993-2 gnd |
| topic_facet | Sputtern Halbleiter Hochschulschrift |
| volume_link | (DE-604)BV008006378 |
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