Rf-glow discharges and sputtering:
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Bibliographic Details
Main Author: Larsson, P. G. (Author)
Format: Book
Language:Undetermined
Published: Stockholm 1983
Series:Fysiska Institutionen <Stockholm>: USIP report 1983,5
Subjects:
Physical Description:21, 4 Bl.

There is no print copy available.

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