Verfügbarkeit: Ion sources :: THWS Bibkatalog

Ion sources:

Gespeichert in:

Bibliographische Detailangaben
1. Verfasser:	Zhang, Huashun (VerfasserIn)
Format:	Buch
Sprache:	English
Veröffentlicht:	Beijing [u.a.] Science Press [u.a.] 1999
Schlagworte:	Ionenquelle
Online-Zugang:	Inhaltsverzeichnis
Beschreibung:	XVIII, 476 S. Ill., graph. Darst.
ISBN:	3540657479 7030073517

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MARC


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Datensatz im Suchindex

_version_	1804127392866762752
adam_text	V PREFACE ION SOURCE IS A RAPIDLY EVOLVING APPLIED SCIENCE AND TECHNOLOGY WITH WIDE APPLICATIONS. ITS DEVELOPMENT RELIES ON MANY SCIENTIC ELDS AND INDUSTRIAL TECHNOLOGIES. ION SOURCES ARE IMPORTANT IN MANY FUNDAMENTAL SCIENCES, SUCH AS ATOMIC PHYSICS, PLASMA PHYSICS, PLASMA CHEMISTRY, NUCLEAR PHYSICS. THEIR PIONEER- ING DEVELOPMENTS AND APPLICATIONS INCLUDE THE SCIENTIC AND TECHNOLOGICAL FRONTIERS OF MASS SPECTROSCOPY, ACCELERATORS, ISOTOPE SEPARATION, ION PROPUL- SION, CONTROLLED THERMONUCLEAR FUSION AND RADIATION THERAPY ETC. THEY ARE ALSO IMPORTANT TO MANY INDUSTRIAL PROCESSES OF ION IMPLANTATION, ION ETCHING, MICROANALYSIS, MICROFABRICATION AND OTHERS. THE DEVELOPMENT OF ION SOURCES DEPENDS NOT ONLY ON VARIOUS SCIENTIC KNOWLEDGE, INCLUDING GAS DISCHARGE, ATOMIC PHYSICS, PLASMA PHYSICS, SURFACE PHYSICS, INTENSE ION OPTICS AND COMPUTATIONAL MATHEMATICS, BUT ALSO ON MANY NEWLY DEVELOPING TECHNOLOGIES, WHICH INCLUDE PLASMA AND BEAM DIAGNOSTICS, SOPHISTICATED HIGH VOLTAGE EQUIPMENT, MODERN VACUUM SYSTEMS, INTENSE AND QUALITY MAGNETIC ELDS, HIGH-INTENSITY ELECTRON GUNS, MICROCOMPUTERS AND SPECIAL MATERIALS. ACCORDING TO LIMITED STATISTICS, THE NUMBER OF PRINCIPAL TYPES OF SOURCES EXCEEDS ONE HUNDRED. THEIR DEVELOPMENTS ARE DRIVEN BY MANY AREAS OF AP- PLICATIONS WHICH PROPOSE NEW DIERENT REQUIREMENTS AND ANTICIPATE FURTHER DEVELOPMENTS. ION SOURCE IS AN OLD SCIENCE, BUT STILL A RAPIDLY DEVELOPING SCIENCE. AL- THOUGH IT HAS BEEN STUDIED FOR MORE THAN EIGHTY YEARS, IT IS STILL A SEMI- EMPIRICAL SCIENCE AND TECHNIQUE. NUMEROUS PAPERS\|APPROXIMATELY 400 PA- PERS PER YEAR DURING THE PAST DECADE\|HAVE BEEN PRESENTED IN A WIDE VARIETY OF JOURNALS AND CONFERENCE PROCEEDINGS. AS A RESULT OF THE EMERGENCE OF NEW APPLICATIONS FOR ION SOURCES, MORE SCIENTISTS AND ENGINEERS HAVE THE NEED TO SYSTEMATICALLY STUDY AND USE ION SOURCES. THIS BOOK IS INTENDED TO SERVE A THREEFOLD PURPOSE, IN A MANNER IT IS USEFUL TO THOSE WHO ARE NEW TO THIS ELD AS WELL AS TO THE EXPERTS. FIRST, TO PROVIDE COMPREHENSIVE INFORMATION THAT IS EASILY UNDERSTOOD AND PROVIDE FUNDAMENTAL AND TECHNICAL KNOWLEDGE ASSOCIATED WITH ION SOURCES IN SUCIENT DEPTH TO BE USEFUL TO THE NEW OR LABORATORY WORKERS. SECOND, TO BRIEFLY REVIEW THE ESSENTIAL PRINCIPLES AND MAJOR RESEARCH ACHIEVEMENTS TO DATE OF VARIOUS SOURCES GIVING AVAILABLE RECENT INFORMATION ON THE DESIGN AND OPERATION OF THE SOURCE. THIRD, TO PRESENT A GREAT QUANTITY OF COMMONLY USED SOURCE VI DIAGRAMS, DRAWINGS, CURVES, PHYSICAL CONSTANTS, USEFUL FORMULAS, REFERENCES, ETC., THUS MAKING THE BOOK A USEFUL PRACTICAL REFERENCE. FUNDAMENTAL KNOWLEDGE REGARDING SOURCE PERFORMANCE, GAS DISCHARGE, EX- TRACTION SYSTEM AND SPACE-CHARGE NEUTRALIZATION IS PRESENTED IN CHAPTERS 1, 2, 3 AND 9. POSITIVE ION SOURCES ARE INTRODUCED IN CHAPTER 4. THE PRINCIPLES FOR PRODUCING NEGATIVE AND MULTI-CHARGED IONS ARE DISCUSSED IN CHAPTERS 6 AND 8. THE PROCESSES DETERMINING THE MASS AND ENERGY SPECTRA OF SOURCES ARE DISCUSSED IN CHAPTER 7. THE GIANT ION SOURCES, MULTI-CHARGED SOURCES AND NEGATIVE SOURCES, WHICH HAVE DEVELOPED FASTEST DURING THE PAST THIRTY YEARS, ARE DISCUSSED IN DETAIL IN CHAPTERS 5, 6 AND 8. FINALLY, BEAM DIAGNOSTIC IS IN- TRODUCED IN CHAPTER 10. MANY USEFUL PHYSICAL CONSTANTS AND DATA ARE GIVEN IN THE APPENDIX. THIS BOOK HAS EXTRACTED ITS CONTENTS FROM MORE THAN 4000 ARTICLES PUBLISHED IN DIERENT JOURNALS AND OTHER PUBLICATIONS, TO AVOID TOO MUCH CONSUMPTION OF SPACE ONLY ABOUT ONE THOUSAND FOREMOST REFERENCES, WHICH ARE SUCIENT TO GUIDE THE READERS TO FURTHER INFORMATION ON TOPICS OF PARTICULAR INTEREST, ARE GIVEN. THE ORIGINAL MANUSCRIPT OF THIS BOOK WAS WRITTEN BY ZHANG HUASHUN BASED ON HIS BOOK, IN CHINESE, ION SOURCES AND POWERFUL NEUTRAL BEAM INJECTORS . PARTS OF CHAPTERS 2, 4 AND 9 OF THE CHINESE BOOK WERE WRITTEN BY WAN CHUNHOU, LIKEWISE PARTS OF CHAPTER 5 WERE WRITTEN BY WANG GENGJIE. THE AUTHOR THANKS DR. P. ALLISON AND K. PRELEC FOR THEIR ENCOURAGEMENT FOR THIS ENGLISH VERSION. THE ENGLISH MANUSCRIPT WAS EXTENSIVELY REVIEWED AND REEDITED BY MR. C. W. SCHMIDT, WHO MADE A GREAT CONTRIBUTION TO THE BOOK QUALITY. THANKS ARE DUE TO MANY PUBLISHERS, ORGANIZATIONS AND PERSONS FOR PER- MISSION TO REPRODUCE MATERIALS AND GURES FROM VARIOUS BOOKS AND JOURNALS. XI CONTENTS 1 INTRODUCTION 1 1.1 MAJOR APPLICATIONS AND REQUIREMENTS . . . . . . . . . . . . . . . 1 1.2 PERFORMANCES AND RESEARCH SUBJECTS . . . . . . . . . . . . . . . . 1 1.3 HISTORICAL DEVELOPMENT . . . . . . . . . . . . . . . . . . . . . . . . . 8 2 GAS DISCHARGE FUNDAMENTALS 11 2.1 THERMIONIC EMISSION . . . . . . . . . . . . . . . . . . . . . . . . . . . 11 2.2 SECONDARY ELECTRON EMISSION . . . . . . . . . . . . . . . . . . . . . 12 2.3 SURFACE IONIZATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13 2.4 ELASTIC AND INELASTIC COLLISIONS . . . . . . . . . . . . . . . . . . . . 16 2.4.1 COLLISION AND PROBABILITY OF COLLISION . . . . . . . . . . . 16 2.4.2 ELASTIC COLLISION AND ITS CROSS SECTION . . . . . . . . . . 18 2.4.3 INELASTIC COLLISION . . . . . . . . . . . . . . . . . . . . . . . . 20 2.5 IONIZATION CROSS SECTION . . . . . . . . . . . . . . . . . . . . . . . . . 21 2.6 RECOMBINATION OF CHARGED PARTICLES . . . . . . . . . . . . . . . . . 22 2.7 MOBILITY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23 2.8 DIUSION COECIENT . . . . . . . . . . . . . . . . . . . . . . . . . . . 25 2.9 PARTICLE DISTRIBUTION IN A RETARDATION REGION . . . . . . . . . . 26 2.10 AMBIPOLAR DIUSION . . . . . . . . . . . . . . . . . . . . . . . . . . . 26 2.11 MAGNETIC FIELD INFLUENCE ON PARTICLE MOTION . . . . . . . . . . . 28 2.12 FUNDAMENTALS OF A HOT-CATHODE ARC SOURCE . . . . . . . . . . . 29 2.12.1 STABLE THEORY OF THE CATHODE DOUBLE SHEATH . . . . . . 29 1. BIPOLAR FLOW . . . . . . . . . . . . . . . . . . . . . . . . . 30 2. CATHODE DOUBLE SHEATH . . . . . . . . . . . . . . . . . . 31 2.12.2 CATHODE DOUBLE SHEATH OSCILLATIONS AND NOISE . . . . . 34 2.12.3 SCATTERING OF PRIMARY ELECTRONS . . . . . . . . . . . . . . . 35 2.12.4 BEAM-PLASMA INTERACTION . . . . . . . . . . . . . . . . . . . 36 2.12.5 POSITIVE COLUMN PLASMA . . . . . . . . . . . . . . . . . . . . 38 2.12.6 ANODE REGION . . . . . . . . . . . . . . . . . . . . . . . . . . . 44 2.12.7 MINIMUM PRESSURE . . . . . . . . . . . . . . . . . . . . . . . 45 REFERENCES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46 3 EXTRACTION SYSTEMS FOR ION SOURCES 47 3.1 EXTRACTION SYSTEMS REQUIREMENTS . . . . . . . . . . . . . . . . . . 47 3.2 EXTRACTION SYSTEM WITH A SOLID EMITTER . . . . . . . . . . . . . . 48 3.2.1 SPACE-CHARGE-LIMITED FLOW FOR AN IDEAL DIODE . . . . . 48 1. PLANE DIODE . . . . . . . . . . . . . . . . . . . . . . . . . . 48 2. CYLINDRICAL DIODE . . . . . . . . . . . . . . . . . . . . . . 51 XII 3. SPHERICAL DIODE . . . . . . . . . . . . . . . . . . . . . . . 51 4. SOME UNIVERSAL RELATIONSHIPS . . . . . . . . . . . . . . 52 3.2.2 SPACE-CHARGE-LIMITED FLOW WITH MULTIPLE ION SPECIES 54 3.2.3 PIERCE-SHAPE EXTRACTION SYSTEM . . . . . . . . . . . . . . 56 3.2.4 HIGH-PERVEANCE ELECTRON GUN . . . . . . . . . . . . . . . . 57 3.3 EMITTANCE AND BRIGHTNESS . . . . . . . . . . . . . . . . . . . . . . . 58 3.3.1 EMITTANCE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58 3.3.2 BRIGHTNESS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60 3.3.3 RELATION BETWEEN BRIGHTNESS AND EMITTANCE . . . . . . 61 3.3.4 EECTIVE EMITTANCE . . . . . . . . . . . . . . . . . . . . . . . 62 3.3.5 EMITTANCE AND BRIGHTNESS OF AN ION SOURCE . . . . . . . 63 3.4 ION EXTRACTION FROM A PLASMA . . . . . . . . . . . . . . . . . . . . . 65 3.4.1 PLASMA-SHEATH EQUATION AND THE EMITTING CURRENT FROM A PLASMA . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65 3.4.2 THE EXTRACTABLE FLOW FROM AN EXTRACTION SYSTEM . 70 3.4.3 ADJUSTMENT OF ION EMISSIVE SURFACE . . . . . . . . . . . . 71 3.4.4 COMPARISON BETWEEN A PLASMA ION SOURCE AND AN ELECTRON GUN EXTRACTION SYSTEM . . . . . . . . . . . . . . 72 3.5 GEOMETRY OF EXTRACTION SYSTEMS . . . . . . . . . . . . . . . . . . . 73 3.5.1 TYPICAL TYPES AND GEOMETRIES . . . . . . . . . . . . . . . . 73 3.5.2 PROBE EXTRACTION SYSTEMS FOR LOW PLASMA DENSITY . . 76 1. PRINCIPLE AND ANALYTICAL MODEL . . . . . . . . . . . . . 76 2. EXPERIMENTAL RESULTS . . . . . . . . . . . . . . . . . . . . 79 3.5.3 APERTURE EXTRACTION SYSTEMS FOR MEDIUM PLASMA DENSITY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79 1. ANALYTICAL MODEL FOR A TWO-ELECTRODE SYSTEM . . . 80 2. CIRCULAR THREE ELECTRODE EXTRACTION SYSTEM . . . . 83 3. SLIT EXTRACTION SYSTEM . . . . . . . . . . . . . . . . . . . 86 4. FOUR ELECTRODE EXTRACTION SYSTEM . . . . . . . . . . . 89 3.5.4 EXPANSION CUP EXTRACTION SYSTEM FOR HIGH PLASMA DENSITY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90 1. SOME PROPERTIES OF A DIUSING PLASMA . . . . . . . . 90 2. EXTRACTION SYSTEM OF A DUOPLASMATRON SOURCE . . . 92 3.5.5 LARGE-AREA MULTI-APERTURE EXTRACTION SYSTEMS . . . . 95 1. MULTI-APERTURE BEAM FOCUSING BY APERTURE DISPLACEMENT . . . . . . . . . . . . . . . . . . . . . . . . . 96 2. POWER LOADING OF THE ELECTRODES . . . . . . . . . . . . 100 3.5.6 GRID-CONTROLLED EXTRACTION SYSTEM . . . . . . . . . . . . . 101 3.6 RESEARCH METHODS OF EXTRACTION SYSTEMS . . . . . . . . . . . . . 103 3.6.1 EXPERIMENTAL RESEARCH . . . . . . . . . . . . . . . . . . . . . 103 3.6.2 ANALYTICAL APPROACHES TO BEAM OPTICS . . . . . . . . . . 103 3.6.3 NUMERICAL SIMULATIONS . . . . . . . . . . . . . . . . . . . . . 104 1. PHYSICAL MODELS . . . . . . . . . . . . . . . . . . . . . . . 104 2. PHYSICAL EQUATIONS . . . . . . . . . . . . . . . . . . . . . 106 3. SOME RESULTS . . . . . . . . . . . . . . . . . . . . . . . . . 108 XIII 3.7 SOME OTHER PROBLEMS . . . . . . . . . . . . . . . . . . . . . . . . . . 110 3.7.1 TRANSVERSE MAGNETIC FIELD EECTS ON ION EXTRACTION . 110 3.7.2 TECHNOLOGICAL PROBLEMS OF EXTRACTION SYSTEMS . . . . . 111 1. SUPPRESSION OF BREAKDOWN IN THE LATERAL EXTRACTION ION SOURCE . . . . . . . . . . . . . . . . . . . 111 2. SOME TECHNOLOGICAL PROBLEMS . . . . . . . . . . . . . . 112 REFERENCES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 113 4 POSITIVE ION SOURCES 116 4.1 CLASSICATION OF ION SOURCES . . . . . . . . . . . . . . . . . . . . . . 116 4.2 HOT CATHODES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 118 4.2.1 REQUIREMENTS AND TYPES OF HOT CATHODES . . . . . . . . 118 4.2.2 CATHODE MATERIAL AND LIFETIME . . . . . . . . . . . . . . . 119 4.2.3 EECTS OF DISCHARGE CURRENT . . . . . . . . . . . . . . . . . 122 4.2.4 MAGNETIC FIELD EECTS OF THE FILAMENT CURRENT . . . . 122 4.2.5 PLASMA CATHODES . . . . . . . . . . . . . . . . . . . . . . . . 123 4.3 ARC SOURCE IN A UNIFORM MAGNETIC FIELD . . . . . . . . . . . . . . 125 4.4 HOT-CATHODE PENNING SOURCE . . . . . . . . . . . . . . . . . . . . . 131 4.4.1 SIMPLE PRINCIPLE . . . . . . . . . . . . . . . . . . . . . . . . . 131 4.4.2 TYPICAL STRUCTURES . . . . . . . . . . . . . . . . . . . . . . . . 134 4.5 DUOPLASMATRON ION SOURCE . . . . . . . . . . . . . . . . . . . . . . . 135 4.5.1 GENERAL PRINCIPLE . . . . . . . . . . . . . . . . . . . . . . . . 135 4.5.2 FORMATION OF THE CONSTRICTION DOUBLE SHEATH . . . . . . 137 4.5.3 PRIMARY PARAMETERS . . . . . . . . . . . . . . . . . . . . . . 138 4.5.4 HEAVY ION DUOPLASMATRON SOURCE . . . . . . . . . . . . . . 141 4.6 HOT-CATHODE FREEMAN SOURCE . . . . . . . . . . . . . . . . . . . . 142 4.7 BROAD BEAM ION SOURCES . . . . . . . . . . . . . . . . . . . . . . . . 144 4.8 COLD-CATHODE PIG SOURCE . . . . . . . . . . . . . . . . . . . . . . . 148 4.8.1 PRINCIPLES OF A COLD-CATHODE PENNING DISCHARGE . . . . 148 4.8.1 COLD-CATHODE PIG SOURCES . . . . . . . . . . . . . . . . . . 149 4.9 RADIO-FREQUENCY ION SOURCE . . . . . . . . . . . . . . . . . . . . . . 153 4.9.1 PRINCIPLE OF AN RF DISCHARGE . . . . . . . . . . . . . . . . . 153 4.9.2 MAGNETIC FIELD EECTS AND STRUCTURES . . . . . . . . . . . 157 4.9.3 HEAVY ION RF SOURCES . . . . . . . . . . . . . . . . . . . . . 159 1. METALLIC ION RF SOURCES . . . . . . . . . . . . . . . . . . 159 2. RF ION SOURCE FOR ION THRUSTERS . . . . . . . . . . . . 161 3. RF TRITIUM ION SOURCE . . . . . . . . . . . . . . . . . . . 162 4.9.4 BEAM CURRENT MODULATION FROM RF SOURCES . . . . . . . 162 4.10 TECHNOLOGY OF HEAVY ION SOURCES . . . . . . . . . . . . . . . . . . . 163 4.10.1 SPECIAL REQUIREMENTS FOR HEAVY ION SOURCES . . . . . . . 163 4.10.2 TYPES OF HEAVY ION SOURCES . . . . . . . . . . . . . . . . . 164 4.10.3 SURFACE IONIZATION AND THERMIONIC EMISSION SOURCE . 165 4.10.4 HIGH FIELD ION SOURCE . . . . . . . . . . . . . . . . . . . . . 168 1. GAS FIELD IONIZATION SOURCE . . . . . . . . . . . . . . . 169 2. LIQUID METAL ION SOURCE . . . . . . . . . . . . . . . . . . 170 XIV 4.10.5 FEED MATERIAL . . . . . . . . . . . . . . . . . . . . . . . . . . . 174 4.10.6 METHODS OF VAPOR TRANSPORT . . . . . . . . . . . . . . . . . 176 4.10.7 DESIGN AND OPERATION OF HEAVY ION SOURCES . . . . . . . 179 REFERENCES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 182 5 GIANT ION SOURCES 187 5.1 DUOPIGATRON ION SOURCE . . . . . . . . . . . . . . . . . . . . . . . . 188 5.1.1 ESSENTIAL PRINCIPLE . . . . . . . . . . . . . . . . . . . . . . . . 188 5.1.2 IMPROVEMENT OF THE PLASMA UNIFORMITY . . . . . . . . . . 190 5.1.3 TYPICAL RESULTS . . . . . . . . . . . . . . . . . . . . . . . . . . 193 5.2 PERIPLASMATRON ION SOURCE . . . . . . . . . . . . . . . . . . . . . . . 196 5.3 MULTILAMENT ION SOURCE . . . . . . . . . . . . . . . . . . . . . . . . 197 5.3.1 ESSENTIAL PRINCIPLE . . . . . . . . . . . . . . . . . . . . . . . . 197 5.3.2 MULTILAMENTS AND MULTISLOT EXTRACTION ELECTRODE . . 199 5.3.3 IONIZATION ECIENCY . . . . . . . . . . . . . . . . . . . . . . 200 5.3.4 TYPICAL RESULTS . . . . . . . . . . . . . . . . . . . . . . . . . . 201 5.4 MAGNETIC MULTIPOLE ION SOURCE . . . . . . . . . . . . . . . . . . . . 203 5.4.1 GENERAL DESCRIPTION . . . . . . . . . . . . . . . . . . . . . . . 203 5.4.2 MAGNETIC MULTIPOLE (MULTICUSP) FIELD . . . . . . . . . . . 204 1. CONNEMENT PRINCIPLE OF A CUSPED FIELD . . . . . . . 204 2. MAGNETIC FIELD CONGURATION . . . . . . . . . . . . . . 206 3. INFLUENCE OF OTHER PARAMETERS . . . . . . . . . . . . . . 209 5.4.3 TYPICAL RESULTS AND APPLICATIONS . . . . . . . . . . . . . . 212 5.5 HALL ACCELERATOR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 213 5.6 CLUSTER ION SOURCE . . . . . . . . . . . . . . . . . . . . . . . . . . . . 216 5.7 INTENSE PULSED ION SOURCE . . . . . . . . . . . . . . . . . . . . . . . . 218 5.7.1 REFLEX TRIODE . . . . . . . . . . . . . . . . . . . . . . . . . . . 219 5.7.2 MAGNETICALLY INSULATED ION DIODE . . . . . . . . . . . . . . 220 5.7.3 ANODE PLASMA AND STRUCTURE . . . . . . . . . . . . . . . . . 222 REFERENCES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 225 6 MULTIPLY CHARGED ION SOURCES 229 6.1 INTRODUCTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229 6.2 FORMATION OF MULTIPLY CHARGED IONS . . . . . . . . . . . . . . . . . 231 6.2.1 PHYSICAL DENITIONS FOR MULTIPLE IONIZATION . . . . . . . 231 1. IONIZATION POTENTIAL . . . . . . . . . . . . . . . . . . . . . 231 2. TOTAL AND PARTIAL IONIZATION CROSS SECTION . . . . . . 232 3. DISTRIBUTION OF CHARGE STATES AND AVERAGE CHARGE STATE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 233 6.2.2 FORMATION OF MULTIPLY CHARGED IONS . . . . . . . . . . . . 233 1. MULTIPLE IONIZATION BY SINGLE COLLISIONS . . . . . . . . 233 2. STEPWISE SINGLE IONIZATION OF IONS . . . . . . . . . . . 235 3. STEPWISE MULTIPLE IONIZATION OF IONS . . . . . . . . . . 238 4. IONIZATION OF METASTABLE ATOMS OR IONS . . . . . . . . 238 6.2.3 LOSS PROCESSES OF MULTIPLY CHARGED IONS . . . . . . . . . 239 XV 1. LOSS BY CHARGE TRANSFER . . . . . . . . . . . . . . . . . . 239 2. LOSS BY RECOMBINATION . . . . . . . . . . . . . . . . . . 240 3. LOSS BY DIUSION . . . . . . . . . . . . . . . . . . . . . . 241 6.2.4 BALANCE EQUATIONS FOR ION CHARGE STATES . . . . . . . . . 243 6.2.5 MULTIPLY CHARGED ION GENERATION BY STRIPPING OF FAST IONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 246 6.3 MAJOR RESEARCH OF MCIS . . . . . . . . . . . . . . . . . . . . . . . . 246 6.4 MULTIPLY CHARGED ELECTRON BEAM ION SOURCE . . . . . . . . . . . 249 6.4.1 ELECTRON BEAM ION SOURCE . . . . . . . . . . . . . . . . . . . 249 1. TYPICAL STRUCTURE . . . . . . . . . . . . . . . . . . . . . . 249 2. ESSENTIAL PRINCIPLE AND RESULTS . . . . . . . . . . . . . 251 6.4.2 ELECTRON BEAM ION TRAP . . . . . . . . . . . . . . . . . . . . 255 6.4.3 TIME-OF-FLIGHT EBIS (TOFEBIS) . . . . . . . . . . . . . . 256 6.5 CONVENTIONAL MULTIPLY CHARGED ION SOURCES . . . . . . . . . . . . 256 6.5.1 PENNING MULTICHARGED ION SOURCE . . . . . . . . . . . . . . 256 1. INTRODUCTION, TYPES, AND TYPICAL STRUCTURES . . . . 256 2. THE ESSENTIAL PRINCIPLE OF GENERATING MULTIPLY CHARGED IONS IN A PIG SOURCE . . . . . . . . . . . . . . 257 3. EXPERIMENTAL RESULTS . . . . . . . . . . . . . . . . . . . . 258 6.5.2 DUOPLASMATRON MCIS . . . . . . . . . . . . . . . . . . . . . 261 6.5.3 OTHER PLASMA DISCHARGE MCIS . . . . . . . . . . . . . . . 263 1. RADIO-FREQUENCY ION SOURCE . . . . . . . . . . . . . . . 263 2. ELECTROSTATIC OSCILLATING ELECTRON ION SOURCE . . . . 263 3. TRAPPED ION SOURCE . . . . . . . . . . . . . . . . . . . . . 264 6.6 MICROWAVE ION SOURCES . . . . . . . . . . . . . . . . . . . . . . . . . . 264 6.6.1 ELECTRON CYCLOTRON RESONANCE MULTIPLY CHARGED ION SOURCE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 264 1. DEVELOPMENT AND TYPICAL STRUCTURE . . . . . . . . . . 264 2. ESSENTIAL PRINCIPLES AND RESULTS . . . . . . . . . . . . . 268 6.6.2 HIGH INTENSITY MICROWAVE ION SOURCE . . . . . . . . . . . 277 1. CAVITY TYPE MICROWAVE ION SOURCE . . . . . . . . . . 277 2. ANTENNA TYPE MICROWAVE ION SOURCE . . . . . . . . . 281 3. HIGH-INTENSITY MICROWAVE PROTON SOURCE . . . . . . . 282 6.6.3 HOT ELECTRON LAYER ION SOURCE (HELIOS) . . . . . . . . 284 6.6.4 BEAM-PLASMA ION SOURCE . . . . . . . . . . . . . . . . . . . 285 6.7 HIGH DENSITY PLASMA SOURCES . . . . . . . . . . . . . . . . . . . . . 286 6.7.1 LASER MULTIPLY CHARGED ION SOURCE . . . . . . . . . . . . 286 6.7.2 METAL VAPOR VACUUM ARC ION SOURCES . . . . . . . . . . . 292 6.7.3 VACUUM SPARK ION SOURCE . . . . . . . . . . . . . . . . . . . 297 REFERENCES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 297 7 MASS AND ENERGY SPECTRA OF ION SOURCES 304 7.1 MASS SPECTRA OF A HYDROGEN ION SOURCE . . . . . . . . . . . . . . 304 7.1.1 PHYSICAL PROCESSES EECTING THE MASS SPECTRA . . . . . 305 XVI 7.1.2 PARTICLE BALANCE EQUATIONS FOR DETERMINING THE MASS SPECTRA . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 310 7.1.3 PROTON CONTENT OF AN RF ION SOURCE . . . . . . . . . . . . 313 7.1.4 MASS SPECTRA OF A MAGNETIC MULTIPOLE ION SOURCE . . . 314 7.1.5 MASS SPECTRA OF A DUOPLASMATRON ION SOURCE . . . . . . 315 7.1.6 MASS SPECTRA OF A HOT-CATHODE PIG ION SOURCE . . . . 316 7.1.7 MASS SPECTRA OF A COLD-CATHODE PIG ION SOURCE . . . 317 7.2 ENERGY SPECTRA OF ION SOURCES . . . . . . . . . . . . . . . . . . . . . 318 7.2.1 PHYSICAL CAUSE OF THE ENERGY SPREAD . . . . . . . . . . . 318 7.2.2 ENERGY SPECTRA OF AN RF ION SOURCE . . . . . . . . . . . . 319 7.2.3 ENERGY SPECTRA OF OTHER ION SOURCES . . . . . . . . . . . 322 REFERENCES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 323 8 NEGATIVE ION SOURCES 325 8.1 INTRODUCTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 325 8.1.1 ELECTRON ANITY . . . . . . . . . . . . . . . . . . . . . . . . . 325 8.1.2 HISTORICAL DEVELOPMENT . . . . . . . . . . . . . . . . . . . . 326 8.2 NEGATIVE ION FORMATION PROCESSES . . . . . . . . . . . . . . . . . . 327 8.3 VOLUME FORMATION OF NEGATIVE IONS . . . . . . . . . . . . . . . . . 328 8.3.1 H * FORMATION BY ELECTRON IMPACT . . . . . . . . . . . . . 328 8.3.2 NEGATIVE ION FORMATION BY MULTIPLE CHARGE-TRANSFER . 332 8.4 SURFACE FORMATION OF NEGATIVE IONS . . . . . . . . . . . . . . . . . 338 8.4.1 WORK-FUNCTION OF SURFACES . . . . . . . . . . . . . . . . . . . 338 8.4.2 SURFACE SPUTTERING . . . . . . . . . . . . . . . . . . . . . . . . 342 1. ESSENTIAL PRINCIPLE . . . . . . . . . . . . . . . . . . . . . 343 2. DISTRIBUTIONS OF SPUTTERED PARTICLES . . . . . . . . . . 347 8.4.3 PARTICLE REFLECTION FROM A SOLID SURFACE . . . . . . . . . . 348 1. ESSENTIAL PRINCIPLES . . . . . . . . . . . . . . . . . . . . . 348 2. PARAMETER DEPENDENCE OF REFLECTION . . . . . . . . . . 349 3. DISTRIBUTION OF REFLECTED PARTICLES . . . . . . . . . . . 350 8.4.4 SECONDARY ION EMISSION . . . . . . . . . . . . . . . . . . . . 352 1. GENERAL PRINCIPLES . . . . . . . . . . . . . . . . . . . . . . 352 2. H * ION FORMATION BY PARTICLE AND SURFACE INTERACTION . . . . . . . . . . . . . . . . . . . . . . . . . . . 355 3. OTHER NEGATIVE IONS FORMED BY SPUTTERING . . . . . 356 8.4.5 NEGATIVE SURFACE IONIZATION . . . . . . . . . . . . . . . . . . 357 8.5 DESTRUCTION OF NEGATIVE IONS . . . . . . . . . . . . . . . . . . . . . . 358 8.5.1 DESTRUCTION PROCESSES OF NEGATIVE IONS . . . . . . . . . . 358 8.5.2 CROSS-SECTIONS OF H * DESTRUCTION . . . . . . . . . . . . . . 359 8.6 VOLUME H * ION SOURCE . . . . . . . . . . . . . . . . . . . . . . . . . . 361 8.6.1 DUOPLASMATRON NEGATIVE ION SOURCES . . . . . . . . . . . 361 8.6.2 PENNING NEGATIVE ION SOURCES . . . . . . . . . . . . . . . . 363 8.6.3 MAGNETICALLY FILTERED MULTICUSP VOLUME SOURCES . . . . 364 1. ESSENTIAL PRINCIPLE . . . . . . . . . . . . . . . . . . . . . 364 2. MAGNETIC FILTER . . . . . . . . . . . . . . . . . . . . . . . . 364 XVII 3. DEPENDENCE ON VARIOUS PARAMETERS . . . . . . . . . . 366 4. CESIUM SEEDED MULTICUSP H * SOURCE . . . . . . . . . 368 5. GIANT H * ION SOURCES . . . . . . . . . . . . . . . . . . . 368 8.6.4 OTHER VOLUME PRODUCTION NEGATIVE ION SOURCES . . . . 371 8.6.5 H * ION EXTRACTION AND ELECTRON SUPPRESSION . . . . . . 372 8.7 SURFACE-PLASMA H * ION SOURCES . . . . . . . . . . . . . . . . . . . . 374 8.7.1 MAGNETRON H * ION SOURCES . . . . . . . . . . . . . . . . . . 374 8.7.2 PENNING SURFACE-PLASMA H * ION SOURCES . . . . . . . . . 377 8.7.3 MAGNETIC CUSPED SURFACE-PLASMA H * SOURCES . . . . . 381 8.7.4 HOLLOW DISCHARGE DUOPLASMATRON H * SOURCES . . . . . 382 8.8 CHARGE-TRANSFER NEGATIVE ION SOURCES . . . . . . . . . . . . . . . . 384 8.8.1 EXCHANGE TARGET . . . . . . . . . . . . . . . . . . . . . . . . . 384 8.8.2 CHARGE-TRANSFER H * ION SOURCES . . . . . . . . . . . . . . 385 1. RADIO FREQUENCY NEGATIVE ION SOURCE . . . . . . . . . 385 2. POWERFUL CHARGE-TRANSFER H * ION SOURCES . . . . . . 386 8.8.3 HE * ION SOURCE . . . . . . . . . . . . . . . . . . . . . . . . . . 387 8.8.4 OTHER CHARGE-TRANSFER HEAVY NEGATIVE ION SOURCES . . 387 8.9 CESIUM SPUTTER NEGATIVE ION SOURCES . . . . . . . . . . . . . . . . 388 8.9.1 MIDDLETON CESIUM SPUTTER SOURCE (UNIS) . . . . . . . . 388 8.9.2 CESIATED PLASMA SPUTTER NEGATIVE ION SOURCES . . . . . 391 1. RADIAL EXTRACTION SPUTTERING PENNING NEGATIVE ION SOURCE . . . . . . . . . . . . . . . . . . . . . . . . . . . 391 2. SELF-EXTRACTION PLASMA-SPUTTERING NEGATIVE ION SOURCE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 392 8.9.3 UNIVERSAL HIGH INTENSITY CESIUM SPUTTER NEGATIVE ION SOURCES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 395 8.10 DISSOCIATIVE SOURCE BY POSITIVE ION IMPACT . . . . . . . . . . . . 397 8.11 SURFACE NEGATIVE IONIZATION ION SOURCES . . . . . . . . . . . . . . 397 REFERENCES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 398 9 SELF-NEUTRALIZATION OF BEAM SPACE CHARGE 404 9.1 SELF-NEUTRALIZATION OF POSITIVE BEAMS . . . . . . . . . . . . . . . . 404 9.2 DYNAMIC DECOMPENSATION OF THE BEAM SPACE CHARGE . . . . . 410 REFERENCES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 415 10 BEAM DIAGNOSTICS FOR ION SOURCES 416 10.1 INTRODUCTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 416 10.2 BEAM CURRENT MEASUREMENTS . . . . . . . . . . . . . . . . . . . . . 417 10.2.1 ELECTRIC METHODS INTERCEPTING THE BEAM . . . . . . . . . 417 1. DC CURRENT MEASUREMENT BY A FARADAY CUP . . . . 417 2. PULSED CURRENT MEASUREMENT BY A FARADAY CUP . . 420 10.2.2 CALORIMETRIC METHODS . . . . . . . . . . . . . . . . . . . . . 421 1. ESSENTIAL PRINCIPLES OF CALORIMETRIC METHODS . . . . 421 2. FLOW CALORIMETER . . . . . . . . . . . . . . . . . . . . . . 422 3. STEM CALORIMETER . . . . . . . . . . . . . . . . . . . . . . 423 XVIII 4. CALORIMETER IN AN ISOTHERMAL MODE . . . . . . . . . . 424 10.2.3 MAGNETIC-CONDUCTION PROBE FOR PULSED BEAMS . . . . . 424 10.2.4 RESIDUAL GAS IONIZATION CHAMBER . . . . . . . . . . . . . 425 10.3 BEAM DENSITY PROLE MEASUREMENTS . . . . . . . . . . . . . . . . . 425 10.3.1 MECHANICAL BEAM PROLE SCANNER . . . . . . . . . . . . . . 427 10.3.2 SEGMENTED WIRE (OR TARGET) . . . . . . . . . . . . . . . . . 429 10.3.3 ELECTRIC OR MAGNETIC SCANNER . . . . . . . . . . . . . . . . . 431 10.3.4 OTHER METHODS . . . . . . . . . . . . . . . . . . . . . . . . . . 431 10.4 BEAM EMITTANCE MEASUREMENTS . . . . . . . . . . . . . . . . . . . . 432 10.4.1 PHYSICAL CONCEPT OF BEAM EMITTANCE MEASUREMENT . . 432 10.4.2 PRINCIPLE AND ERRORS OF EMITTANCE MEASUREMENT . . . . 436 10.4.3 VARIOUS EMITTANCE DEVICES . . . . . . . . . . . . . . . . . . 440 1. PEPPER-POT EMITTANCE PROBE . . . . . . . . . . . . . 440 2. MECHANICAL SCANNER . . . . . . . . . . . . . . . . . . . . . 441 3. ELECTRIC (MAGNETIC) SCANNER . . . . . . . . . . . . . . . 442 4. SLIT-MULTIPLE COLLECTOR DEVICE . . . . . . . . . . . . . . 444 5. THREE BEAM WIDTHS METHOD . . . . . . . . . . . . . 444 10.5 ION ENERGY SPECTRA MEASUREMENTS . . . . . . . . . . . . . . . . . . 446 10.5.1 CYLINDRICAL ELECTROSTATIC ENERGY ANALYZER . . . . . . . . 447 10.5.2 RETARDING FIELD ENERGY ANALYZER . . . . . . . . . . . . . . 449 10.6 MASS OR CHARGE SPECTRA MEASUREMENTS . . . . . . . . . . . . . . . 452 10.6.1 UMFORM MAGNETIC FIELD ANALYZER . . . . . . . . . . . . . . 453 10.6.2 E * B MASS SEPARATOR . . . . . . . . . . . . . . . . . . . . . 454 10.6.3 TIME-OF-FLIGHT SPECTROMETER . . . . . . . . . . . . . . . . . 457 REFERENCES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 459 APPENDIX 462 A1. PHYSICAL CONSTANTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . 462 A2. COMMON USITS AND CONVERSION FACTORS . . . . . . . . . . . . . . . 463 A3. DENSITIES, MELTING POINTS, BOILING POINTS, VAPOR PRESSURE, SOME SOURCE FEED COMPOUNDS . . . . . . . . . . . . . . . . . . . . 464 A4. WORK-FUNCTION, FIRST AND STEPWISE IONIZATION POTENTIAL, ELECTRON A*NITY OF THE ELEMENTS . . . . . . . . . . . . . . . . . . . 468 A5. THE CALCULATED VALUES OF THE STEPWISE IONIZATION POTENTIAL OF NOBLE GASES . . . . . . . . . . . . . . . . . . . . . . . . 472 A6. THE MINIMUM WORKFUNCTIONS OF AMORPHOUS SURFACES WITH ADSORBATE MATERIALS AT OPTIMUM LAYER . . . . . . . . . . . 472 A7. SOLUTION OF THE PLASMA-SHEATH EQUATION . . . . . . . . . . . . . . 473 INDEX 474
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spelling	Zhang, Huashun Verfasser aut Ion sources Huashun Zhang Beijing [u.a.] Science Press [u.a.] 1999 XVIII, 476 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Ionenquelle (DE-588)4162341-1 gnd rswk-swf Ionenquelle (DE-588)4162341-1 s DE-604 SWB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008653328&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis
spellingShingle	Zhang, Huashun Ion sources Ionenquelle (DE-588)4162341-1 gnd
subject_GND	(DE-588)4162341-1
title	Ion sources
title_auth	Ion sources
title_exact_search	Ion sources
title_full	Ion sources Huashun Zhang
title_fullStr	Ion sources Huashun Zhang
title_full_unstemmed	Ion sources Huashun Zhang
title_short	Ion sources
title_sort	ion sources
topic	Ionenquelle (DE-588)4162341-1 gnd
topic_facet	Ionenquelle
url	http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008653328&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
work_keys_str_mv	AT zhanghuashun ionsources

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