Oxygen transport in thin oxide films at high field strength:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Buch |
| Sprache: | English |
| Veröffentlicht: |
Jülich
Forschungszentrum Jülich, Zentralbibliothek
2014
|
| Schriftenreihe: | Schriften des Forschungszentrums Jülich
Reihe Information ; 33 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | Zsfassung in dt. und engl. Sprache |
| Beschreibung: | XII, 115 S. Ill., graph. Darst. |
| ISBN: | 9783893369508 |
Internformat
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Datensatz im Suchindex
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| adam_text | CONTENTS
1 INTRODUCTION 1
1.1 IONIC THREE-TERMINAL DEVICES 2
1.2 IONIC TRANSPORT AT HIGH FIELD STRENGTH 3
1.3 DISTINCTION FROM OTHER DEVICES 3
1.3.1 FETS 3
1.3.2 POLARIZATION MEASUREMENTS WITH PARTIALLY BLOCKING ELECTRODES 4
1.3.3 CONDUCTIVITY RELAXATION 4
1.3.4 ELECTROCHEMICAL LOADING 5
2 BACKGROUND 7
2.1 METALS, INSULATORS, IONIC CONDUCTORS, SEMICONDUCTORS 7
2.2 CONDUCTIVITY CHANGE OF SEMICONDUCTORS 9
2.3 FUNCTIONAL OXIDES 9
2.3.1 PEROVSKITES 14
2.3.2 OXYGEN ANION CONDUCTORS 16
2.4 CHEMISTRY AND CHEMICAL ETCHING OF OXIDES 18
2.4.1 MIXED METAL OXIDES 18
2.4.2 ETCHING OF OXIDES 19
2.4.3 RINSING 20
2.5 LINEAR AND NON-LINEAR CONDUCTANCE 21
2.6 DEVELOPMENT OF MEMORY TECHNOLOGIES 24
2.7 PHYSICAL VAPOR DEPOSITION 25
2.7.1 SUBSTRATE PREPARATION 25
2.7.2 FILM GROWTH 26
2.7.3 PULSED LASER DEPOSITION 27
2.7.4 MOLECULAR BEAM EPITAXY 27
2.7.5 SPUTTERING 27
I
HTTP://D-NB.INFO/1051391792
II CONTENTS
3 CONCEPTS 29
3.1 DEVICE LAYOUT AND SCALING BEHAVIOR 29
3.2 CHOICE OF MATERIALS 31
3.3 COMPLEXITY OF THE MANUFACTURING PROCESS 34
3.4 MEASUREMENTS 35
4 MATERIALS AND METHODS 39
4.1 OXIDE DEPOSITION 39
4.1.1 PREPARING SPUTTER TARGETS 40
4.2 AFM 43
4.2.1 USED DEVICES 43
4.2.2 TYPICAL PROBLEMS 43
4.3 X-RAY DIFFRACTION AND X-RAY REFLECTIVITY 44
4.4 SUBSTRATES AND SUBSTRATE TERMINATION 45
4.5 CHEMICAL ETCHING OF LSMO, SRO AND LCO 45
4.5.1 ROUTE OF ATTACK 45
4.5.2 SRO 46
4.5.3 LSMO 46
4.5.4 LCO 48
4.5.5 SURFACE QUALITY 49
4.6 PHOTOLITHOGRAPHY 50
4.7 SETUP FOR ELECTRICAL MEASUREMENTS 52
4.8 SOFTWARE 52
4.8.1 REQUIREMENTS FOR THE MEASUREMENT SOFTWARE 53
4.8.2 REQUIREMENTS FOR THE DATA PROCESSING SOFTWARE 53
4.8.3 CHOICE OF PROGRAMMING LANGUAGE AND PLATFORM 53
4.8.4 VALIDATION AND DEBUGGING 54
4.8.5 EVALUATION 55
5 RESULTS 59
5.1 DEVICE STRUCTURE 59
5.2 ELECTRICAL PROPERTIES OF THE ELECTRODES 59
5.3 CHARACTERISTIC CURVE OF THE DIELECTRIC 63
5.4 RESPONSE TO WRITE CURRENTS 67
5.4.1 ELECTRICAL RESPONSE 67
5.4.2 DRIFTING AFTER WRITING 71
5.4.3 OPTICAL CHANGES 71
CONTENTS
III
6 DISCUSSION 79
6.1 BEHAVIOR OF THE ELECTRODES 79
6.2 DIELECTRIC CHARACTERISTIC CURVE 79
6.3 IS IT REALLY IONIC CONDUCTION? 80
6.4 EMPIRICAL FORMULA 81
6.5 TIME-DOMAIN BEHAVIOR 81
6.6 CURRENT DEPENDENCE 84
6.7 DRIFTING BEHAVIOR 85
6.8 BEHAVIOR OF DIFFERENT MATERIALS 85
6.9 ASYMMETRY 86
6.10 INFLUENCE OF TEMPERATURE AND VOLTAGE 86
6.11 QUANTITATIVE MEASUREMENTS 88
7 CONCLUSIONS AND OUTLOOK 91
8 ACKNOWLEDGEMENTS 93
A SOFTWARE DESCRIPTION 107
A.L DATA STRUCTURE 107
A.2 LAYOUT OF THE MEASUREMENT SOFTWARE 108
A.3 LAYOUT OF THE DATA PROCESSING SOFTWARE 108
B FUTURE 111
B.L ATTEMPTS OIL REACHING A STEADY STATE ILL
B.2 FAILED SAMPLES WITH INSUFFICIENT INSULATION ILL
B.3 SECONDARY ION MASS SPECTROSCOPY WITH
LS
O TRACER 112
B.4 EELS TO DETECT OXYGEN STOICHIOMETRY CHANGE 112
B.5 HIGHER AND LOWER TEMPERATURE 113
B.6 INFLUENCE OF ATMOSPHERE AND WATER 113
B.7 MATERIAL COMBINATIONS 113
B.8 CANTED LAYERED STRUCTURES 114
B.9 CARRIER DENSITY VERSUS CARRIER MOBILITY 114
B.10 TEM STUDY ON INTERNAL POTENTIALS OF OXIDE JUNCTIONS 114
B.LL ELLIPSOMETRY 114
B.12 DEFECTS VERSUS BULK 114
B.13 ULTRA-FAST DYNAMICS 115
|
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| bvnumber | BV041953071 |
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| ctrlnum | (OCoLC)883015957 (DE-599)HBZHT018231770 |
| discipline | Physik |
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| indexdate | 2024-07-10T01:09:05Z |
| institution | BVB |
| isbn | 9783893369508 |
| language | English |
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| physical | XII, 115 S. Ill., graph. Darst. |
| publishDate | 2014 |
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| publisher | Forschungszentrum Jülich, Zentralbibliothek |
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| series | Schriften des Forschungszentrums Jülich |
| series2 | Schriften des Forschungszentrums Jülich : Reihe Information |
| spelling | Weber, Dieter 1983- Verfasser (DE-588)1049897730 aut Oxygen transport in thin oxide films at high field strength Dieter Weber Jülich Forschungszentrum Jülich, Zentralbibliothek 2014 XII, 115 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Schriften des Forschungszentrums Jülich : Reihe Information 33 Zsfassung in dt. und engl. Sprache Zugl.: Aachen, Techn. Hochsch., Diss., 2014 (DE-588)4113937-9 Hochschulschrift gnd-content Schriften des Forschungszentrums Jülich Reihe Information ; 33 (DE-604)BV035800087 33 DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=027395998&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Weber, Dieter 1983- Oxygen transport in thin oxide films at high field strength Schriften des Forschungszentrums Jülich |
| subject_GND | (DE-588)4113937-9 |
| title | Oxygen transport in thin oxide films at high field strength |
| title_auth | Oxygen transport in thin oxide films at high field strength |
| title_exact_search | Oxygen transport in thin oxide films at high field strength |
| title_full | Oxygen transport in thin oxide films at high field strength Dieter Weber |
| title_fullStr | Oxygen transport in thin oxide films at high field strength Dieter Weber |
| title_full_unstemmed | Oxygen transport in thin oxide films at high field strength Dieter Weber |
| title_short | Oxygen transport in thin oxide films at high field strength |
| title_sort | oxygen transport in thin oxide films at high field strength |
| topic_facet | Hochschulschrift |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=027395998&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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