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1
Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications / by Vaz, Filipe
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2
Metallic oxynitride thin films by reactive sputtering and related deposition methods processes, properties and applications by Vaz, Filipe
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3
Metallic oxynitride thin films by reactive sputtering and related deposition methods processes, properties and applications by Vaz, Filipe
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4
Research and innovation 2018
Published 2020Other Authors: “…Vaz, Filipe…”
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Electronic eBook