Semiconductor wafer bonding: science and technology
Gespeichert in:
Hauptverfasser: | , |
---|---|
Format: | Buch |
Sprache: | English |
Veröffentlicht: |
New York [u.a.]
Wiley
1999
|
Schriftenreihe: | The Electrochemical Society series
A Wiley-Interscience publication |
Schlagworte: | |
Beschreibung: | XVIII, 297 S. graph. Darst. |
ISBN: | 0471574813 |
Internformat
MARC
LEADER | 00000nam a2200000 c 4500 | ||
---|---|---|---|
001 | BV012510066 | ||
003 | DE-604 | ||
005 | 00000000000000.0 | ||
007 | t | ||
008 | 990415s1999 d||| |||| 00||| eng d | ||
020 | |a 0471574813 |9 0-471-57481-3 | ||
035 | |a (OCoLC)633008640 | ||
035 | |a (DE-599)BVBBV012510066 | ||
040 | |a DE-604 |b ger |e rakddb | ||
041 | 0 | |a eng | |
049 | |a DE-29T |a DE-703 |a DE-1050 | ||
050 | 0 | |a TK7871.85 | |
082 | 0 | |a 621.3815/2 |2 21 | |
084 | |a ZN 4150 |0 (DE-625)157360: |2 rvk | ||
100 | 1 | |a Tong, Qin-Yi |e Verfasser |4 aut | |
245 | 1 | 0 | |a Semiconductor wafer bonding |b science and technology |c Q.-Y. Tong ; U. Gösele |
264 | 1 | |a New York [u.a.] |b Wiley |c 1999 | |
300 | |a XVIII, 297 S. |b graph. Darst. | ||
336 | |b txt |2 rdacontent | ||
337 | |b n |2 rdamedia | ||
338 | |b nc |2 rdacarrier | ||
490 | 0 | |a The Electrochemical Society series |v A Wiley-Interscience publication | |
650 | 7 | |a Materiais e dispositivos semicondutores |2 larpcal | |
650 | 4 | |a Semiconductor wafers | |
650 | 4 | |a Semiconductors |x Bonding | |
650 | 0 | 7 | |a Bonden |0 (DE-588)4232594-8 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Silicium |0 (DE-588)4077445-4 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Wafer |0 (DE-588)4294605-0 |2 gnd |9 rswk-swf |
689 | 0 | 0 | |a Silicium |0 (DE-588)4077445-4 |D s |
689 | 0 | 1 | |a Wafer |0 (DE-588)4294605-0 |D s |
689 | 0 | 2 | |a Bonden |0 (DE-588)4232594-8 |D s |
689 | 0 | |5 DE-604 | |
700 | 1 | |a Gösele, Ulrich |d 1949-2009 |e Verfasser |0 (DE-588)108522024 |4 aut | |
999 | |a oai:aleph.bib-bvb.de:BVB01-008490827 |
Datensatz im Suchindex
_version_ | 1804127152912728064 |
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any_adam_object | |
author | Tong, Qin-Yi Gösele, Ulrich 1949-2009 |
author_GND | (DE-588)108522024 |
author_facet | Tong, Qin-Yi Gösele, Ulrich 1949-2009 |
author_role | aut aut |
author_sort | Tong, Qin-Yi |
author_variant | q y t qyt u g ug |
building | Verbundindex |
bvnumber | BV012510066 |
callnumber-first | T - Technology |
callnumber-label | TK7871 |
callnumber-raw | TK7871.85 |
callnumber-search | TK7871.85 |
callnumber-sort | TK 47871.85 |
callnumber-subject | TK - Electrical and Nuclear Engineering |
classification_rvk | ZN 4150 |
ctrlnum | (OCoLC)633008640 (DE-599)BVBBV012510066 |
dewey-full | 621.3815/2 |
dewey-hundreds | 600 - Technology (Applied sciences) |
dewey-ones | 621 - Applied physics |
dewey-raw | 621.3815/2 |
dewey-search | 621.3815/2 |
dewey-sort | 3621.3815 12 |
dewey-tens | 620 - Engineering and allied operations |
discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
format | Book |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01494nam a2200433 c 4500</leader><controlfield tag="001">BV012510066</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">990415s1999 d||| |||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0471574813</subfield><subfield code="9">0-471-57481-3</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)633008640</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV012510066</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-29T</subfield><subfield code="a">DE-703</subfield><subfield code="a">DE-1050</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7871.85</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3815/2</subfield><subfield code="2">21</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4150</subfield><subfield code="0">(DE-625)157360:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Tong, Qin-Yi</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Semiconductor wafer bonding</subfield><subfield code="b">science and technology</subfield><subfield code="c">Q.-Y. Tong ; U. Gösele</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York [u.a.]</subfield><subfield code="b">Wiley</subfield><subfield code="c">1999</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XVIII, 297 S.</subfield><subfield code="b">graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">The Electrochemical Society series</subfield><subfield code="v">A Wiley-Interscience publication</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Materiais e dispositivos semicondutores</subfield><subfield code="2">larpcal</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductor wafers</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors</subfield><subfield code="x">Bonding</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Bonden</subfield><subfield code="0">(DE-588)4232594-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Wafer</subfield><subfield code="0">(DE-588)4294605-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Wafer</subfield><subfield code="0">(DE-588)4294605-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Bonden</subfield><subfield code="0">(DE-588)4232594-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Gösele, Ulrich</subfield><subfield code="d">1949-2009</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)108522024</subfield><subfield code="4">aut</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-008490827</subfield></datafield></record></collection> |
id | DE-604.BV012510066 |
illustrated | Illustrated |
indexdate | 2024-07-09T18:28:49Z |
institution | BVB |
isbn | 0471574813 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008490827 |
oclc_num | 633008640 |
open_access_boolean | |
owner | DE-29T DE-703 DE-1050 |
owner_facet | DE-29T DE-703 DE-1050 |
physical | XVIII, 297 S. graph. Darst. |
publishDate | 1999 |
publishDateSearch | 1999 |
publishDateSort | 1999 |
publisher | Wiley |
record_format | marc |
series2 | The Electrochemical Society series |
spelling | Tong, Qin-Yi Verfasser aut Semiconductor wafer bonding science and technology Q.-Y. Tong ; U. Gösele New York [u.a.] Wiley 1999 XVIII, 297 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier The Electrochemical Society series A Wiley-Interscience publication Materiais e dispositivos semicondutores larpcal Semiconductor wafers Semiconductors Bonding Bonden (DE-588)4232594-8 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf Wafer (DE-588)4294605-0 gnd rswk-swf Silicium (DE-588)4077445-4 s Wafer (DE-588)4294605-0 s Bonden (DE-588)4232594-8 s DE-604 Gösele, Ulrich 1949-2009 Verfasser (DE-588)108522024 aut |
spellingShingle | Tong, Qin-Yi Gösele, Ulrich 1949-2009 Semiconductor wafer bonding science and technology Materiais e dispositivos semicondutores larpcal Semiconductor wafers Semiconductors Bonding Bonden (DE-588)4232594-8 gnd Silicium (DE-588)4077445-4 gnd Wafer (DE-588)4294605-0 gnd |
subject_GND | (DE-588)4232594-8 (DE-588)4077445-4 (DE-588)4294605-0 |
title | Semiconductor wafer bonding science and technology |
title_auth | Semiconductor wafer bonding science and technology |
title_exact_search | Semiconductor wafer bonding science and technology |
title_full | Semiconductor wafer bonding science and technology Q.-Y. Tong ; U. Gösele |
title_fullStr | Semiconductor wafer bonding science and technology Q.-Y. Tong ; U. Gösele |
title_full_unstemmed | Semiconductor wafer bonding science and technology Q.-Y. Tong ; U. Gösele |
title_short | Semiconductor wafer bonding |
title_sort | semiconductor wafer bonding science and technology |
title_sub | science and technology |
topic | Materiais e dispositivos semicondutores larpcal Semiconductor wafers Semiconductors Bonding Bonden (DE-588)4232594-8 gnd Silicium (DE-588)4077445-4 gnd Wafer (DE-588)4294605-0 gnd |
topic_facet | Materiais e dispositivos semicondutores Semiconductor wafers Semiconductors Bonding Bonden Silicium Wafer |
work_keys_str_mv | AT tongqinyi semiconductorwaferbondingscienceandtechnology AT goseleulrich semiconductorwaferbondingscienceandtechnology |