Nanofabrication: nanolithography techniques and their applications
Gespeichert in:
Weitere Verfasser: | |
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Format: | Elektronisch E-Book |
Sprache: | English |
Veröffentlicht: |
Bristol, UK
IOP Publishing
[2020]
|
Ausgabe: | Version: 20201201 |
Schriftenreihe: | IOP ebooks
|
Schlagworte: | |
Online-Zugang: | TUM01 UBR01 Volltext |
Beschreibung: | 1 Online-Ressource (450 Seiten in verschiedenen Seitenzählungen) |
ISBN: | 9780750326087 |
DOI: | 10.1088/978-0-7503-2608-7 |
Internformat
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Datensatz im Suchindex
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doi_str_mv | 10.1088/978-0-7503-2608-7 |
edition | Version: 20201201 |
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illustrated | Not Illustrated |
index_date | 2024-07-03T16:57:54Z |
indexdate | 2024-07-10T09:06:04Z |
institution | BVB |
isbn | 9780750326087 |
language | English |
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oclc_num | 1245333166 |
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physical | 1 Online-Ressource (450 Seiten in verschiedenen Seitenzählungen) |
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publishDate | 2020 |
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publisher | IOP Publishing |
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series2 | IOP ebooks |
spelling | Nanofabrication nanolithography techniques and their applications edited by José María de Teresa Version: 20201201 Bristol, UK IOP Publishing [2020] © 2020 1 Online-Ressource (450 Seiten in verschiedenen Seitenzählungen) txt rdacontent c rdamedia cr rdacarrier IOP ebooks Nanolithography Nanostructured materials Design and construction Teresa, José Maria de edt Erscheint auch als Online-Ausgabe, MOBI 978-0-7503-2607-0 Erscheint auch als Druck-Ausgabe 978-0-7503-2606-3 Erscheint auch als Druck-Ausgabe, myPrint 978-0-7503-2609-4 https://doi.org/10.1088/978-0-7503-2608-7 Resolving-System Volltext |
spellingShingle | Nanofabrication nanolithography techniques and their applications Nanolithography Nanostructured materials Design and construction |
title | Nanofabrication nanolithography techniques and their applications |
title_auth | Nanofabrication nanolithography techniques and their applications |
title_exact_search | Nanofabrication nanolithography techniques and their applications |
title_exact_search_txtP | Nanofabrication nanolithography techniques and their applications |
title_full | Nanofabrication nanolithography techniques and their applications edited by José María de Teresa |
title_fullStr | Nanofabrication nanolithography techniques and their applications edited by José María de Teresa |
title_full_unstemmed | Nanofabrication nanolithography techniques and their applications edited by José María de Teresa |
title_short | Nanofabrication |
title_sort | nanofabrication nanolithography techniques and their applications |
title_sub | nanolithography techniques and their applications |
topic | Nanolithography Nanostructured materials Design and construction |
topic_facet | Nanolithography Nanostructured materials Design and construction |
url | https://doi.org/10.1088/978-0-7503-2608-7 |
work_keys_str_mv | AT teresajosemariade nanofabricationnanolithographytechniquesandtheirapplications |