Proceedings of the fifth Symposium on Automated Integrated Circuits Manufacturing:
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Pennington, NJ
Electrochemical Soc.
1990
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| Schriftenreihe: | Electrochemical Society: Proceedings
1990,3 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | Literaturangaben |
| Beschreibung: | VII, 288 S. Ill., graph. Darst. |
Internformat
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Datensatz im Suchindex
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| adam_text | IMAGE 1
PROCEEDINGS OF THE FIFTH SYMPOSIUM ON
AUTOMATED INTEGRATED CIRCUITS MANUFACTURING
EDITED BY
VAUGHN AKINS MOTOROLA AUSTIN, TEXAS
UNIVERSITATSBIBUOTHEK
TECHN SOHE HVIFORMATIONSBISLIOTHEK ASSISTANT EBTFORT
HIROYUKI HARADA
ROBERT MILLER
MIHIR PARIKH
UB/TIB HANNOVER 89 120 908 042.
ELECTRONICS AND DIELECTRICS AND INSULATION DIVISIONS
PROCEEDINGS VOLUME 90-3
THE ELECTROCHEMICAL SOCIETY, INC., 10 SOUTH MAIN ST., PENNINGTON, NJ
08534-2896
IMAGE 2
CONTENTS
PREFACE
I. SYSTEMS
PROPOSAL FOR ADVANCED SEMICONDUCTOR MANUFACTURING
EQUIPMENT - AN APPROACH TO AUTOMATED IC MANUFACTURING T. OHMI 3
PROGRESS IN FACTORY MODELING R. W. ATHERTON 19
II. SIMULATION AND SCHEDULING 31
VLSI PRODUCTION ANALYSIS USING QUEUEING NETWORK MODEL G. INOUE, K.
YONEDA 33
ICLAB VERSION 2, AN UPDATED COMPUTER SIMULATION OF MICROELECTRONICS
LABORATORY F. MILLER 45
HYPERMEDIA USER INTERFACE FOR CIM E. J. WOOD, T, A. EVJEN 50
III. PROCESS CONTROL 65
A METHODOLOGY FOR THE DEVELOPMENT OF SEMICONDUCTOR EQUIPMENT
MODELS/PROCESS MODELS D. J. COLLINS, A. J, STROJWAS 66
PROCESS CONTROL SYSTEM FOR VLSI FABRICATION E. SACHS, R.-S. GUO, S. HA,
A.K.HU 78
CIM NEEDS FOR SINGLE WAFER IN-SITU SEMICONDUCTOR MANUFACTURING R.S.
GYURCSIK, G.A. RUGGLCS 102
IMAGE 3
INTERNAL PROCESS CONTROL AND AUTOMATION FOR SEMICONDUCTOR
MANUFACTURINGEQUIPMENT L. PFUZNER, C. SCHNEIDER, G. TEMMEL, H. RYSSEL
114
STATISTICAL EQUIPMENT MODELING FORVLSI MANUFACTURING K.-K. LIN, J.
HUANG, C. SPANOS 127
IV.
CONTAMINATION CONTROL AND SAFETY 139
PROBABILITY OF DUST PARTICLES RAISED IN PUMP-DOWN AND VENTILATION
PROCESSES IN A VACUUM CHAMBER Y. MAEBA, H. YAMAKAWA, H. NARUSE 141
ULTRA-CLEAN GAS DELIVERY SYSTEM FOR ADVANCED SUBMICRON ULSI
MANUFACTURING K. SUGIYAMA, T. OHMI, Y. MIZUGUCHI, F. NAKAHARA 148
IMPROVEMENT OF ULTRAPURE WATER QUALITY - REDUCTION OF PARTICLES T.
MIZUNIWA, K. YABE 173
SAFETY IN AN ACADEMIC MICROELECTRONICSLABORATORY F.MILLER 181
V. FACTORY AUTOMATION 187
AUTOMATED TRANSPORT SYSTEM IN IC FACILITY M. KONDO, T. MITAMURA, K.
ISHIBASHI 189
AUTOMATION AND PARTICULATE CONTROL WITHIN AN IC MANUFACTURING FACILITY
R. S. WEISS 199
MECHANICAL CASSETTE LOADING IN LOCALIZED CLEANROOMS H, HAINZL 213
TRANSFERRING NEW TECHNOLOGIES INTO EXISTING MANUFACTURING LINES A. E.
BALLENBERGER, G. P. WOODS 226
VT
IMAGE 4
VI. EQUIPMENT COMMUNICATION AND INTERFACES 233
A MAGNETIC LEVITATION MICRO-AUTOMATION SYSTEM FOR SEMICONDUCTOR
FABRICATION
/. J. BUSCH-VISHNIAC, M.-C. JEONG 235
EQUIPMENT COMMUNICATIONS AND SQL QUERIES WITH NETWORKED SECS
MESSAGES E. J. WOOD 247
AN AUTOMATED PROGRAM GENERATION METHOD OF SECS INTERFACE FOR LSI
MANUFACTURING FACILITIES K. WADA 257
SECS NETWORKING AND CONTROL SYSTEMS FOR AUTOMATED SEMICONDUCTOR
MANUFACTURING
J. C. DILWORTH 267
AUTHORS 279
INDEX 281
VII
|
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| discipline | Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
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| physical | VII, 288 S. Ill., graph. Darst. |
| publishDate | 1990 |
| publishDateSearch | 1990 |
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| publisher | Electrochemical Soc. |
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| series | Electrochemical Society: Proceedings |
| series2 | Electrochemical Society: Proceedings |
| spelling | Symposium on Automated Integrated Circuits Manufacturing 5 1989 Hollywood, Fla. Verfasser (DE-588)5076102-X aut Proceedings of the fifth Symposium on Automated Integrated Circuits Manufacturing ed. by Vaughn Akins Automated integrated circuits manufacturing Pennington, NJ Electrochemical Soc. 1990 VII, 288 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Electrochemical Society: Proceedings 1990,3 Literaturangaben Datenverarbeitung Electronic industries Automation Congresses Integrated circuits Design and construction Data processing Congresses Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1989 Hollywood Fla. gnd-content Halbleitertechnologie (DE-588)4158814-9 s DE-604 Akins, Vaughn E. Sonstige oth Electrochemical Society: Proceedings 1990,3 (DE-604)BV001900941 1990,3 GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=005303526&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Proceedings of the fifth Symposium on Automated Integrated Circuits Manufacturing Electrochemical Society: Proceedings Datenverarbeitung Electronic industries Automation Congresses Integrated circuits Design and construction Data processing Congresses Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4158814-9 (DE-588)1071861417 |
| title | Proceedings of the fifth Symposium on Automated Integrated Circuits Manufacturing |
| title_alt | Automated integrated circuits manufacturing |
| title_auth | Proceedings of the fifth Symposium on Automated Integrated Circuits Manufacturing |
| title_exact_search | Proceedings of the fifth Symposium on Automated Integrated Circuits Manufacturing |
| title_full | Proceedings of the fifth Symposium on Automated Integrated Circuits Manufacturing ed. by Vaughn Akins |
| title_fullStr | Proceedings of the fifth Symposium on Automated Integrated Circuits Manufacturing ed. by Vaughn Akins |
| title_full_unstemmed | Proceedings of the fifth Symposium on Automated Integrated Circuits Manufacturing ed. by Vaughn Akins |
| title_short | Proceedings of the fifth Symposium on Automated Integrated Circuits Manufacturing |
| title_sort | proceedings of the fifth symposium on automated integrated circuits manufacturing |
| topic | Datenverarbeitung Electronic industries Automation Congresses Integrated circuits Design and construction Data processing Congresses Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Datenverarbeitung Electronic industries Automation Congresses Integrated circuits Design and construction Data processing Congresses Halbleitertechnologie Konferenzschrift 1989 Hollywood Fla. |
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