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Fundamentals of semiconductor manufacturing and process control:

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Bibliographische Detailangaben
Hauptverfasser:	May, Gary S. (VerfasserIn), Spanos, Costas J. (VerfasserIn)
Format:	Elektronisch E-Book
Sprache:	English
Veröffentlicht:	Hoboken, NJ Wiley 2006
Schlagworte:	Semiconductors > Design and construction Integrated circuits > Design and construction Process control > Statistical methods Halbleitertechnologie Halbleiterbauelement
Online-Zugang:	FHI01 FHN01 Volltext
Beschreibung:	1 Online-Ressource
ISBN:	0471790281 0471784060 9780471790280 9780471784067

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spelling	May, Gary S. Verfasser aut Fundamentals of semiconductor manufacturing and process control Gary S. May ; Costas J. Spanos Hoboken, NJ Wiley 2006 1 Online-Ressource txt rdacontent c rdamedia cr rdacarrier Semiconductors Design and construction Integrated circuits Design and construction Process control Statistical methods Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Halbleiterbauelement (DE-588)4113826-0 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 s Halbleiterbauelement (DE-588)4113826-0 s b DE-604 Spanos, Costas J. Verfasser (DE-588)14371371X aut https://onlinelibrary.wiley.com/doi/book/10.1002/0471790281 Verlag Volltext
spellingShingle	May, Gary S. Spanos, Costas J. Fundamentals of semiconductor manufacturing and process control Semiconductors Design and construction Integrated circuits Design and construction Process control Statistical methods Halbleitertechnologie (DE-588)4158814-9 gnd Halbleiterbauelement (DE-588)4113826-0 gnd
subject_GND	(DE-588)4158814-9 (DE-588)4113826-0
title	Fundamentals of semiconductor manufacturing and process control
title_auth	Fundamentals of semiconductor manufacturing and process control
title_exact_search	Fundamentals of semiconductor manufacturing and process control
title_exact_search_txtP	Fundamentals of semiconductor manufacturing and process control
title_full	Fundamentals of semiconductor manufacturing and process control Gary S. May ; Costas J. Spanos
title_fullStr	Fundamentals of semiconductor manufacturing and process control Gary S. May ; Costas J. Spanos
title_full_unstemmed	Fundamentals of semiconductor manufacturing and process control Gary S. May ; Costas J. Spanos
title_short	Fundamentals of semiconductor manufacturing and process control
title_sort	fundamentals of semiconductor manufacturing and process control
topic	Semiconductors Design and construction Integrated circuits Design and construction Process control Statistical methods Halbleitertechnologie (DE-588)4158814-9 gnd Halbleiterbauelement (DE-588)4113826-0 gnd
topic_facet	Semiconductors Design and construction Integrated circuits Design and construction Process control Statistical methods Halbleitertechnologie Halbleiterbauelement
url	https://onlinelibrary.wiley.com/doi/book/10.1002/0471790281
work_keys_str_mv	AT maygarys fundamentalsofsemiconductormanufacturingandprocesscontrol AT spanoscostasj fundamentalsofsemiconductormanufacturingandprocesscontrol

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